• Journal of Korean Society of Environmental Engineers
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• v.37 no.12
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• pp.668-673
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• 2015

Alumina-based catalysts with different Ce loadings were studied in the decomposition of $CF_4$ using microwave heating system. Heating material of microwave system used Silicon Carbide. The crystallographic phases of catalysts were investigated by XRD and decomposition rates of $CF_4$ were examined by GC-TCD. The catalysts of 10 wt% Ce modified $Al_2O_3$ showed higher $CF_4$ decomposition rate than un-modified $Al_2O_3$ for $500^{\circ}C$ reaction temperature. The k value of catalysts shows the order of $Ce(20)/Al_2O_3=Ce(0)/Al_2O_3<Ce(5)/Al_2O_3<Ce(10)/Al_2O_3$. XRD patterns of $Ce(0)/Al_2O_3$ were no difference before and after the reaction and showed $Al_2O_3$ phases. With the increase in Ce loadings, $CeO_2$, $AlF_3$ of XRD peaks was observed. The results was indicated that Ce modifed $Al_2O_3$ than un-modifed $Al_2O_3$ was decreased reaction temperature to $200^{\circ}C$ with same decomposition rate. Also the appropriated cerium sulfate loadings on $Al_2O_3$ were 5~10 wt%.

• Journal of Korean Society for Atmospheric Environment
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• v.20 no.5
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• pp.625-632
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• 2004

Perfluorocompounds ($PFC_s$), such as tetrafluoromethane ($CF_4$) and hexafluoroethane ($C_2F_6$), have been widely used as plasma etching and chemical vapor deposition (CVD) gases for semiconductor manufacturing processes. Since these $PFC_s$ are known to cause a greenhouse effect intensively, there has been a growing interest in reducing $PFC_s$ emissions. Among various $CF_4$ decomposing techniques, a dielectric barrier discharge (DBD) is considered as one of a promising candidate because it has been successfully used for generating ozone ($O_3$) and decomposing nitrogen oxide (NO). Firstly, optimal concentration of oxygen for $CF_4$ decomposition was found to figure out how many primary and secondary reactions are associated with DBD process. Secondary, to find effective discharge method for $CF_4$ decomposition, a streamer and a glow mode in DBD are experimentally compared, which includes (i) coaxialcylinder DBD, (ii) DBD reactor packed with glass beads. and (iii) a glow mode operation with a helium gas. The test results showed that optimal concentration of oxygen was ranged 500 ppm~1% for treating 500 ppm of $CF_4$ and helium glow discharge was the most efficient one to decompose $CF_4$.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2010.04a
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• pp.198-200
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• 2010

• Bulletin of the Korean Chemical Society
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• v.30 no.12
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• pp.2973-2978
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• 2009

The decomposition reaction mechanism of $CH_3CF_2O$ radical formed from hydroflurocarbon, $CH_3CHF_2$ (HFC-152a) in the atmosphere has been investigated using ab-initio quantum mechanical methods. The geometries of the reactant, products and transition states involved in the decomposition pathways have been optimized and characterized at DFT-B3LYP and MP2 levels of theories using 6-311++G(d,p) basis set. Calculations have been carried out to observe the effect of basis sets on the optimized geometries of species involved. Single point energy calculations have been performed at QCISD(T) and CCSD(T) level of theories. Out of the two prominent decomposition channels considered viz., C-C bond scission and F-elimination, C-C bond scission is found to be the dominant path involving a barrier height of 12.3 kcal/mol whereas the F-elimination path involves that of a 28.0 kcal/mol. Using transition-state theory, rate constant for the most dominant decomposition pathway viz., C-C bond scission is calculated at 298 K and found to be 1.3 ${\times}$ 10$^4s{-1}$. Transition states are searched on the potential energy surfaces involving both decomposition channels and each of the transition states are characterized. The existence of transition states on the corresponding potential energy surface are ascertained by performing Intrinsic Reaction Coordinate (IRC) calculation.

• Journal of Surface Science and Engineering
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• v.34 no.5
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• pp.391-394
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• 2001

A new type plasma reactor is proposed to decompose CF4 diluted with N2 gas in atmospheric pressure. The arc plasmas is surrounded with a waterwall which acts as a source of water vapor, the solvent of HF, resultant product after decomposition, and conveyer to take away fluorine compound from exhaust gas. Abatement more than 99% is achieved by small size plasmas such as 1 cm in diameter, 25cm in length and 3.4KW of DC discharge power in such gas as the mixture of 100 sccm of CF4 and 15 slm of N2. Reactors of this type are to be expanded to such a system as Nitrogen flow of 50 slm with 200 sccm of CF4 and 7-8 KW discharge power.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2008.10a
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• pp.311-312
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• 2008

• Journal of the Korean Mathematical Society
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• v.33 no.4
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• pp.955-982
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• 1996

In surface compression applications, one of the main issues is how to efficiently store and calculate the computer representation of certain surfaces. This leads us to consider a nonlinear approximation by box splines with free knots since, for instance, the nonlinear method based on wavelet decomposition gives efficient compression and recovery algorithms for such surfaces (cf. [12]).

• Clean Technology
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• v.17 no.3
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• pp.250-258
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• 2011

Thermal plasma has been presented for the decomposition of perfluorocompounds (PFCs) which are extensively used in the semiconductor manufacturing and display industry. We developed pilot-scale equipment to investigate the large scale treatment of PFCs and called it a "thermal plasma scrubber". PFCs such as $CF_4$, $C_2F_6$, $SF_6$, and $NF_3$ used in experiments were diluted with $N_2$. There were two different types of experiment setup related to the water spray direction inside the thermal plasma scrubber. The first type was that the water was sprayed directly into the gas outlet located at the exit of the reaction section. The second type was that the water was sprayed on the wall of the quenching section. More effective decomposition took place when the water was sprayed on the quenching section wall. For $C_2F_6$, $SF_6$, and $NF_3$ the maximum destruction and removal efficiency was nearly 100%, and for $CF_4$ was up to 93%.

• Clean Technology
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• v.18 no.2
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• pp.216-220
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• 2012

The objective of the present study was to evaluate catalytic performance of a commercial catalyst (Co/$ZrO_2-Al_2O_3$) for the decomposition of perfluorinated chemicals in a pilot scale reactor containing 30 L of catalysts. At a reaction condition of GHSV $1,800h^{-1}$, $T_{95}$ of $SF_6$ was increased from 580 to $610^{\circ}C$ with increasing of $SF_6$ concentration from 1,000 to 10,000 ppm. $T_{95}$ of $SF_6$ in catalytic decomposition was much smaller than that of thermal decomposition ($1,600^{\circ}C$). The 99% conversion of $SF_6$ was maintained for 72 hours a reaction temperature of $650^{\circ}C$. In order to maintain the $SF_6$ conversion more than 99%, it is necessary to operate at a reaction condition of GHSV less than $2,000h^{-1}$. An operating temperature of $710^{\circ}C$ was required to achieve >95% destruction of the $CF_4$, which was much higher than that of catalytic decomposition of $SF_6$.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1354-1355
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• 2008

교류 펄스전압을 이용한 글라이딩 아크 플라즈마를 이용하여 PFCs(Perfluoro compounds) 가스의 일종인 $CF_4$ $SF_6$, $NF_3$를 가스분해하는 연구를 실시하였다. 반응기 양전극 사이에 인가되는 전압은 10kV로 고정하고 각각의 가스의 유량을 조절하여 분해한후 FT-IR을 통해 각각의 가스의 분해율과 분해후 가스내 성분을 스펙트럼을 이용하여 분석하였다. 유량이 낮아질수록 분해율은 좋아졌고 $SF_6$와 $NF_3$의 경우 99%이상의 높은 분해율에 도달하였을 뿐 아니라 대표적인 난분해 가스로 손꼽히는 $CF_4$의 경우 82%이상의 분해율을 확인하였다.