• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.455-458
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• 2001

The thin films of high pemitivity in ferroelectric materials using a capacitor are applied to DRAMs and FRAMs. (Ba, Sr)$TiO_3$ thin films as ferroelectric materials were prepared by the sol-gel method and made by spin-coating on the Pt/Ti/$SiO_2/Si$ substrate at 4,000 [rpm] for 10 seconds. The devices of BST thin films to composite $(Ba_{0.7},Sr_{0.3})TiO_3$ were fabricated by changing of the depositing layer number on $Pt/Ti/SiO_2/Si$ substrate. The thin film capacitor to be ferroelectric devices was investigated by structural and electrical properties. The thickness of BST thin films at each coating numbers 3, 4 and 5 times was $2500[\AA]$, $3500[\AA]$, $3800[\AA]$. The dielectric factor of thin film when the coating numbers were 3, 4 and 5 times was 190, 400 and 460 on frequency l[MHz]. The dielectric loss of BST thin film was linearly increased by increasing of the specimen area.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.455-458
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• 2001

The thin films of high permitivity in ferroelectric materials using a capacitor are applied to DRAMs and FRAMs. (Ba, Sr)TiO$_3$ thin films as ferroelectric materials were prepared by the sol-gel method and made by spin-coating on the Pt/Ti/SiO$_2$/Si substrate at 4,700 [rpm] for 10 seconds. The devices of BST thin films to composite (Ba$\_$0.7/Sr$\_$0.3/)TiO$_3$ were fabricated by changing of the depositing layer number on Pt/Ti/SiO$_2$/Si substrate. The thin film capacitor to be ferroelectric devices was investigated by structural and electrical properties. The thickness of BST thin films at each coating numbers 3, 4 and 5 times was 2500[${\AA}$], 3500[${\AA}$], 3800[${\AA}$]. The dielectric factor of thin film when the coating numbers were 3, 4 and 5 times was 190, 400 and 460 on frequency 1[MHz]. The dielectric loss of BST thin film was linearly increased by increasing of the specimen area.

• Electrical & Electronic Materials
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• v.10 no.1
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• pp.20-25
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• 1997

In this study, piezoelectric actuator samples were fabricated using 0.375PMN-0.37OPT-0.255PZ system ceramics with Barium substitution and the strain properties of them were investigated. Dielectric constant of the specimens increased with the increase of Ba content up to 5mol% and decreased with futher addition of Ba. The largest piezoelectric coefficient and electromechanical coupling coefficient were observed at the sintering temperature of 1250'C and Barium content of 5mol%. The characteristics of strain hysteresis was found largely with varing the sintering temperature on the single round type, and the strain is proportional to piezoelectric coefficient.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.52-52
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• 2003

Gbit급 DRAM 커패시터의 고유전물질로 각광받고 있는 (Ba,Sr)TiO$_3$〔BST〕의 하부전극 물질로서 (Ba,Sr)RuO$_3$〔BSR〕의 적용 가능성을 연구하였다. BSR은 BST와의 구조적, 화학적 유사성으로 인하여, BST와 하부전극사이의 저유전 계면반응 충의 생성을 최소화함으로서 향상된 전기적 특성을 구현 할 수 있다. 본 연구에서는 methoxyethoxytetramethylheptanedionate(METHD) 소스를 적용한 유기 화학 기상 증착법(MOCVD)법을 이용하여 BSR을 증착하였으며, 증착된 BSR의 특성을 x-ray photoelectron spectroscopy(XPS) 분석법으로 기화기 온도 변화에 따른 BSR박막의 특성을 분석하였다. 증착온도 55$0^{\circ}C$에서 소스의 기화효율에 영향을 미치는 기화기온도를 변화시켜가며 BSR박막의 증착실험을 진행하였으며 소스 유입 속도 0.075sccm, 증착 온도 55$0^{\circ}C$, Ar/O2 = 200/350 sccm일 때 기화기 온도를 260~28$0^{\circ}C$까지 1$0^{\circ}C$간격의 변화로 증착실험을 수행하였다.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.240.1-240.1
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• 2011

본 연구에서는 펄스레이져 박막 증착법(Pulsed Laser Deposition;PLD)을 이용하여 연자성의 CoNiFe (CNF) 물질과 강유전 특성의$BaTiO_3$ (BTO) 물질을 다층박막 구조로 제작하여 약자장(H=200 Oe)에 의해 에너지를 집적 시키거나 유전상수를 조절하여 박막의 구조 변화에 따른 커패시턴스 변화를 연구하였다. 다양한 구조의 다층 박막은 Si/$SiO_2$/Ti/Pt(111) 기판상에 PLD을 이용하여 증착하였으며, Phillp's X-선 회절기 (XRD)를 이용하여 결정구조와 격자 상수를 결정하였다. FE-SEM, TEM, AFM 및 EDS를 이용하여 박막 표면/단면의 미세구조 및 물질에 따른 조성비를 확인하였다. 자기적 특성을 위해Vibrating Sample Magnetometer (VSM)를 측정하였고, 전기적 특성은 LCR meter를 이용하여 측정하였다.

• Electrical & Electronic Materials
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• v.7 no.1
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• pp.73-79
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• 1994

페로브스카이트형 강유전체의 활발한 연구는 제2차 세계대전중 미국과 구 소련등에서 TiO$_{2}$ 고체 콘덴서를 개량하던 중에 Ba 이 첨가된 BaTiO$_{3}$를 발견하면서부터 시작되었고, 일본에서는 PbZr$_{0.5}$Ti$_{0.5}$O$_{3}$의 morphotropic phase boundary를 발견하면서부터 이루어졌으며, 그것이 지니는 특성때문에 고체콘덴서, 초전형 적외선 센서, 초음파 발생과 검출기, 압전 점화기 및 표면파필터기 등 여러방면에 실용화 되고 있다. 따라서, 본 보고에서는 지금까지 연구된 페로브스카이트형 강유전체 세라믹 재료의 물성을 소개하고 앞으로의 연구동향 등에 관하여 서술하고자 한다.

• Resources Recycling
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• v.7 no.4
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• pp.22-26
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• 1998

The purpose of this experimenL is to investigate the magnetic anisotropy and microwave absorbing properties in M-type Bat territe (${BaFe}_{12-2X}{A}_{X}{Me}_{X}{O}_{19}$), where $Fe_{3+}$ is substituted by $Ti_{4+}$ in A site and $Co_{2+}$ in Me site. The saturation magnetization (Ms) is linearly decreased with the substitution rate(x) and the coerciviLy (He) is rapidly decreased in accordance with the reduction in t the magnetocrystalline anisotropy For the specimen with x=0.8 and thickness of 2 mm, the reflection loss calculated from the n material constants is less than -10 dB (90% absorption) in the frequency range of 10~16 GHz. The absorption loss is pre이.ctcd t to be more than 20 dElern in the frequency range of 12-16 GHz. The results demonstrate that the Ti-Co substituted M-type Ba-ferrite can be effectively used as a microwave absorber at high frequency range.

• Proceedings of the Korean Ceranic Society Conference
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• 2003.10a
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• pp.186.1-186
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• 2003

• Transactions on Electrical and Electronic Materials
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• v.10 no.2
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• pp.49-52
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• 2009

Barium strontium calcium titanate powders were prepared with the sol-gel method. Ferroelectric $(Ba_{0.54}Sr_{0.36}Ca_{0.1})TiO_3$(BSCT) thick films were fabricated by the screen-printing method on alumina substrate. Then we investigated the structural and dielectric properties of the BSCT thick films at different sintering temperatures. The thermal analysis showed that the BSCT polycrystalline perovskite phase formed at around $660^{\circ}C$. The X-ray diffraction analysis showed a cubic perovskite structure with no second phase present in all of the BSCT thick films. The average grain size and the thickness of the specimens sintered at $1450^{\circ}C$ were about $1.6{\mu}m$ and $45{\mu}m$, respectively. The relative dielectric constant increased and the dielectric loss decreased as the sintering temperature was increased; for BSCT thick films sintered at $1450^{\circ}C$ the values of the dielectric constant and the dielectric loss were 5641 and 0.4%, respectively, at 1 kHz.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.6
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• pp.460-465
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• 2001

(Ba$_{0.6-x}$Sr$_{0.4}$Ca$_{x}$)TiO$_3$(x=1.10,0.15,0.20) specimens were fabricated by the solid state reaction method and then the structural and dielectric properties as a function of he composition ratio and sintering temperature were studied. As a result of the differential thermal analysis(DTA), exothermic peak was observed at around 102$0^{\circ}C$ due to the formation of the polycrystalline perovskite phase. The BSCT(50/40/10) specimen sintered at 150$0^{\circ}C$ showed the highest average grain size(18.25${\mu}{\textrm}{m}$). The Curie temperature and dielectric constant at room temperature decreased with increasing Ca content. The dielectric constant and dielectric loss of the BSCT(50/40/10) specimen, sintered at 145$0^{\circ}C$, were about 4324 and 0.972% at 1KHz, respectively.ively.