Uniformity control of sol-gel derived $BaTiO_3$ thin film for MLCC(Multi-Layer Ceramic Capacitor) fabrication
(초박층 MLCC 제조용 BaTiO3 유전체 박막의 균일성 제어)
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- Proceedings of the Materials Research Society of Korea Conference
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- 2005.05a
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- pp.124-124
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- 2005