• Proceedings of the Korea Association of Crystal Growth Conference
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• 1997.10a
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• pp.57-61
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• 1997

BaTiO$_3$의 결정성 평가와 이러한 결정성이 물성에 미치는 영향에 대하여 연구하였다. 분체 특성표에 나와있는 acetic acid soluble BaO의 물리적 의미는 결국 결정성과 관계가 있다는 것을 알 수 있었으며 이러한 결정성의 새로운 측정법으로 k-factor와 정방정의 격자상수비 c/a를 제안 하였다. 결정성의 차이는 Nb$_2$O5등과 같은 첨가제의 첨가효과에 큰 영향을 미치므로 BaTiO$_3$를 이용한 제품 제조 공정 중 반드시 관리하여햐 하는 인자라는 것을 알 수 있었다.

• Journal of the Korean Ceramic Society
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• v.26 no.5
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• pp.617-624
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• 1989

Piezoelectric composites of O-3 connectivity were prepared by thermosetting barium titanate-phenolic resin composite under various cruing pressure. Among three kinds of pore in O-3 type ceramic-polymer composite, such as matrix pores, particle pores, and ceramic-polymer interface pores, the effect of interface porosity on the dielectric and piezoelectric constant was investigated. In pure barium titanate ceramics, the porosity factor of dielectric and piezoelectric constants were 5.7 and 5.0, respectively. However, in BaTiO3-polymer composite, the interface porosity factor of the piezoelectric constant was greater than that of the dielectric constant, interface porosity factor b in d33 was 9.8 and in r 4.6. On the other, piezoelectric voltage constant g33 was independent of the porosity of barium titanate ceramics. But in composite system, the piezoelectric voltage constant g33 was decreased with interface porosity.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.296-297
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• 2006

A conventional oxide method was used to fabricate $Ba_{0.5}Sr_{0.5}TiO_3$(BST) ceramic plates doped by MgO from 10 to 60 wt%. The structural and dielectric properties of BST were investigated as a fraction of MgO dopant concentration. The dielectric properties of the MgO doped BST were strongly dependent on the MgO contents. The dielectric constant and dielectric loss of MgO doped BST decreased with increasing MgO content.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.60-60
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• 2008

We manufactured Liquid Crystal Polymer (LCP) and (1-x)$BaTiO_3-xSrTiO_3$(BST) ceramic composites and investigated dielectric properties to use as embedded capacitor in printed circuit boards and replace LTCC substrates. The dielectric properties of these composites are varied with volume fraction of BST and ratios of BT/ST. Dielectric constants are in the range of 3~28. In addition, we could get low TCC and High Q value that could not achieve in other ceramic-polymer composites. Especially, in composite with x=0.4 and 50vol% BST, the dieletric constant and Q-value are 27 and 300, respectively. And more TCC is -116~145ppm/$^{\circ}C$ in the temperature range of -55~$125^{\circ}C$. We think that this composites can be used high-Q substrate material like LTCC and embedded temperature compensation capacitor in printed circuit boards.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05b
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• pp.16-19
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• 2002

(Ba,Sr)TiO3(BST) thin film is an attractive material for the application in high-density dynamic random access memories (DRAMs) because of the high relative dielectric constant and small variation in dielectric properties with frequency. In this study, (Ba0.6,Sr0.4)TiO3 thin films on Pt/Ti/SiO2/Si substrates were deposited by a sol-gel method and the CF4/Ar inductively coupled plasma (ICP) etching behavior of BST thin films had been investigatedby varying the process parameters such as chamber pressure, ICP power, and substrate bias voltage. To analysis the composition of surface residue following etching BST films etched with different Ar/CF4 gas mixing ratio were investigated using x-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometer (SIMS).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.175-175
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• 2009

최근 전자 소자의 소형화 집적화에 따른 대응 방안으로 한 개의 소자에 두가지 이상의 물리적 특성을 갖는 다기능성 소재의 개발에 많은 연구가 진행되고 있다. 다강체는 강유전성 (ferroelectricty ), 강자성 (ferromagnetism), 강탄성 (ferroelasticity) 중에서 두 개 이상의 현상을 나타내는 재료로, 이중에서도 특히 강유전성과 강자성을 동시에 나타내는 다강체가 학계 및 산업계로부터 집중적인 관심을 받으면서 최근 이 분야 연구가 국내 외적으로 매우 활발하게 이루어지고 있다. 이는 다강체를 이용하면 기존의 강유전 현상을 이용한 메모리소자인 FRAM이나 차세대 메모리소자로 주목을 받고 있는 MRAM을 결합한 새로운 방식의 메모리소자의 탄생이 가능할 수도 있기 때문이다. 즉, 일부 다강체가 나타내는 magnetoelectric (ME) 현상을 이용하면 자기적으로 신호를 인가하여 전기신호로 데이터를 저장하거나 또는 전기적으로 신호를 인가하여 자기적으로 데이터를 저장하는 것이 가능해지기 때문이다. 이 연구에서는 다강체 특성을 가지는 $Fe/BaTiO_3$ 이중박막을 IBSD(Ion Beam Sputter Deposition)을 이용하여 (111)Pt/Ti/$SiO_2/Si$ 기판에 증착을 하여 구조적, 전기적, 자기적 특성을 토론할 것이다.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.740-742
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• 1998

In this paper, we described the effect of rapid thermal annealing on the electrical properties of interfacial layer between various top electrodes and $(Ba_{0.5}Sr_{0.5})TiO_3$ thin films. BST thin films were fabricated on Pt/TiN/$SiO_2$/Si substrate by RF magnetron sputtering technique. AI, Ag, and Cu films for the formation of top electrode were deposited on BST thin films by thermal evaporator. Top electrodes/BST/Pt capacitor annealed with rapid thermal annealing at various temperature. In $(Ba_{0.5}Sr_{0.5})TiO_3$ thin films with Cu top electrode annealed at $500^{\circ}C$, the dielectric constant was measured to the value of 366 at 1.2 [kHz] and the leakage current was obtained to the value of $5.85{\times}10^{-7}\;[A/cm^2}$ at the forward bias of 2 [V].

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.04b
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• pp.18-21
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• 2004

An alkoxide-based sol-gel method was used to fabricate $Ba_{0.6}Sr_{0.4}TiO_3$ thin films doped by Bi from 5 to 20 mol% on a $Pt/Ti/SiO_2/Si$ substrate. The structural and dielectric properties of BST thin films were investigated as a function of Bi dopant concentration. The dielectric properties of the Bi doped BST films were strongly dependent on the Bi contents. The dielectric constant and dielectric loss of the films decreased with increasing Bi content. However, the leakage current density of the 10 mol% Bi doped $Ba_{0.6}Sr_{0.4}TiO_3$ thin film showed the lowest value of $5.13{\times}10^{-7}\;A/cm^2$ at 5 V. The figure of merit (FOM) reached a maximum value of 32.42 at a 10 mol% Bi doped $Ba_{0.6}Sr_{0.4}TiO_3$ thin films. The dielectric constant, loss factor, and tunability of the 10 mol% Bi doped $Ba_{0.6}Sr_{0.4}TiO_3$ thin films were 333, 0.0095, and 31.1%, respectively.

• Journal of the Korean Ceramic Society
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• v.28 no.9
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• pp.689-695
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• 1991

Dielectric properties of Ba1-$\chi$Sr$\chi$Ti1-yCayO3-y ceramics, where Sr and Ca were doped to Ba-site and Ti-site within the range of 0 x 0.24 and 0 y 0.05, respectively, were investigated. The substitution of Ca for Ti, which maintained the high resistivity of these formulations after sintering in a reducing atmosphere, was confirmed. Ca addition decreased the tetragonality c/a, increased the unit cell volume, and lowered Curie temperature, which were attributed to the occupancy of Ca2+ ions on Ti-sites. The lowering of Curie temperature by Ca addition was affected by the substitution of Sr for Ba-site; within 2 mol% of Ca, Curie temperature was lowered at a rate of 2$0^{\circ}C$ and 16$^{\circ}C$ per mol% of Ca at x=0 and x=0.08, respectively. Whereas the resistivity of the formulations without Ca was reduced to 107 {{{{ OMEGA }}cm, when sintered at low oxygen partial pressure of 10-9 MPa, the resistivity value higher than 1011 {{{{ OMEGA }}cm was maintained for the formulations containing Ca more than 0.5 mol%. Dielectric loss factor, tan$\delta$, was about 1% for most formulations.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04b
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• pp.52-55
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• 2000

In this study, (Ba,Sr)$TiO_3$(BST) thin films were etched with a magnetically enhanced inductively coupled plasma(MEICP) as a function Ar/$CF_4$ gas mixing ratio. Experiment was done by varying the etching parameters such as rf power, dc bias voltage and chamber pressure. The maximum etch rate of the BST films was 1700 ${\AA}/min$ under $CF_4/(CF_4+Ar)$ of 0.1, 600 W/350 V and 5 mTorr. The selectivity of BST to Pt and PR was 0.6, 0.7, respectively. X -ray photoelectron spectroscopy(XPS) studies shows that there are surface reaction between Ba, Sr, Ti and C, F radicals during the etching. To analyze the composition of surface residue remaining after the etching, films etched with different $CF_4$/Ar gas mixing ratio were investigated using XPS.