• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.29-32
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• 2004

This work was devoted to an investigation of etching mechanisms for $(Ba,Sr)TiO_3$ (BST) thin films in inductively coupled $CF_4/Ar$ plasma. We have found that an increase of the Ar content in $CF_4/Ar$ plasma causes non-monotonic behavior of BST etch rate, which reaches a maximum value of 40 nm/min at 80% Ar. Langmuir probe measurements show a weak sensitivity of both electron temperature and electron density to the change of $CF_5/Ar$ mixing ratio. O-D model for plasma chemistry gave monotonic changes of both volume densities and fluxes for active species responsible for the etching process. The analysis of surface kinetics confirms the possibility of non-monotonic etch rate behavior due to the concurrence of physical and chemical pathways in ion-assisted chemical reaction.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.9
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• pp.56-63
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• 1999

Conventional method to improve the response time of the Cat-SPPCM was to increase fanning beam using cylindrical lens. But, in this case the temporal instability of this SPPCM is increased, and fanning beam plays a role as noise, so that it decreases the reflectivity. Thus, fanning beam must be controlled to improve the properties of SPPCM. In this paper, we propose the method to increase the reflectivity of SPPCM and decrease the response time by focusing line-shaped input beam into photorefractive crystal using cylindrical lens and decrease the temporal instability of output beam by using mixed-polarized beam instead of simple extraordinary polarized beam. Optical experiments show that the reflectivity of proposed SPPCM is increased twice and the response time is reduced by 15 times. Also, we observed that the temporal instability of SPPCM is reduced when the polarization angle of the mixed-polarized beam is between $10^{\circ}$ and $30^{\circ}$ . We used a $45^{\circ}-cut\;BaTiO_3$ crystal which has high electro-optical coefficients in optical experiments.

• Applied Chemistry for Engineering
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• v.17 no.5
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• pp.527-531
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• 2006

We have prepared organophilic inorganic particles and polyimide (PI) nanocomposite having excellent thermal stability and high dielectric constant that can be used for electronic application such as capacitor. We have chosen barium titanate (BT), a high dielectric constantmaterial and its surface was coated with nylon 6 to improve the affinity with PI. The FT-IR and TEM studies showed that the organophilic inorganic particle (BTN) has a polymer shell with thickness of 5 nm. We have suggested that it is possible to control the thickness of coating surface and also indicated the relationship between the ratio of inside and outside radius of BTN and the weight fraction of BT. The PI nanocomposite films based on poly(amic acid) and BTN were prepared by cyclodehydration reaction. The homogeneous dispersion of BTN in PI matrix was identified by using SEM. We have investigated the effect of BTN content on the coefficient of thermal stability, integral procedural decomposition temperature (IPDT), and dielectric constant of PI nanocomposite films.

• Journal of Powder Materials
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• v.31 no.1
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• pp.16-22
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• 2024

Composite-based piezoelectric devices are extensively studied to develop sustainable power supply and self-powered devices owing to their excellent mechanical durability and output performance. In this study, we design a lead-free piezoelectric nanocomposite utilizing (Ba_0.85 Ca_0.15)(Ti_0.9Zr_0.1)O₃ (BCTZ) nanomaterials for realizing highly flexible energy harvesters. To improve the output performance of the devices, we incorporate porous BCTZ nanowires (NWs) into the nanoparticle (NP)-based piezoelectric nanocomposite. BCTZ NPs and NWs are synthesized through the solid-state reaction and sol-gel-based electrospinning, respectively; subsequently, they are dispersed inside a polyimide matrix. The output performance of the energy harvesters is measured using an optimized measurement system during repetitive mechanical deformation by varying the composition of the NPs and NWs. A nanocomposite-based energy harvester with 4:1 weight ratio generates the maximum open-circuit voltage and short-circuit current of 0.83 V and 0.28 ㎂, respectively. In this study, self-powered devices are constructed with enhanced output performance by using piezoelectric energy harvesting for application in flexible and wearable devices.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.28-28
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• 2010

This study realized low-temperature crystallization process of the $Ba_{0.6}Sr_{0.4}TiO_3$ (BST) thin films without thermal damage of substrate using excimer laser annealing (ELA) and structural and electrical characteristics were investigated. The amorphous BST thin films were prepared on Pt/Ti/$SiO_2$/Si substrate by sol-gel method at $250^{\circ}C$. The ELA was carried out using KrF excimer laser which provided excitation wavelength of 248 nm. The beam homogenizing system was used in order to homogenize beam shape of Gaussian fit. The XRD and SEM were used to analyze structural characteristics and the microwave capacitance, dielectric loss and tunability of the BST films were measured by a symmetrical stripline resonator method with shorted end. Consequently, the crystallinity of BST thin films were improved after ELA process and RF tunable capacitor was demonstrated at low temperature below $300^{\circ}C$.

• Journal of the Korean Ceramic Society
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• v.42 no.2 s.273
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• pp.123-126
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• 2005

Barium Titanate (BT) powders were synthesized by solvothermal method with an ethanol as a solvent. The average particle size was increased with the feedstock concentration: the size was 59 nm at $6.25{\times}10^{-2}$ M and 89 nm at 0.5 M. The sample obtained at 0.5 M concentration was analysed by Rietveld refinement and the mole fraction of tetragonal phase was $75.5\%$ and lattice parameter of tetragonal phase was a=0.3999 (nm), c=0.4032 (nm), and cubic phase was a=0.4015 (nm). TEM analysis for the samples with condition of annealing at $500^{\circ}C$ for I h showed that hydroxyl ions on oxygen sites were not found for these experimental conditions.

• Journal of Korean Vacuum Science & Technology
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• v.4 no.4
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• pp.97-101
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• 2000

In this study, two kinds of barium strontium titanate (BST) samples were prepared. One is a conventional BST film that is sputtered in a mixture of argon and oxygen. The other is a nitrogen-incorporated BST film that is sputtered in a mixture of oxygen and intentionally added nitrogen instead of argon gas. The structural properties of both of the BST films had not changed significantly with the species of sputtering gas. However, the leakage current of BST films sputtered at ($N_2$+O$_2$) atmosphere was lower than those sputtered at (Ar +O$_2$) atmosphere: 1.9$\times$10$^{-8}$ A/cm$^2$ at 2V for the films prepared at (Ar +O$_2$) atmosphere and 8.6$\times$10$^{-9}$ A/cm$^2$ for the films at ($N_2$+O$_2$) atmosphere. From an XPS analysis, it has been found that nitrogen atoms are incorporated in BST films with a concentration of 1.92 at% and form a certain oxynitride phase. It is proposed that nitrogen atoms are able to fill the oxygen vacancies of BST films during sputtering process, and then the leakage current reduces due to a decrease in the vacancies. The BST films sputtered at ($N_2$+O$_2$) atmosphere have superior electrical properties to the films sputtered at (Ar +O$_2$), without any significant structural changes.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.393-396
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• 2004

본 논문에서는 완충층용 MgO 박막을 P-type(100)Si 기판위에 작업가스 $Ar:O_2=80:20$, RF 파워 50W, 기판온도 $400^{\circ}C$, 10mtorr의 작업진공에서 $500{\AA}$ 증착하였다. 제작된 MgO/Si 기판위에 RF Magnetron sputtering법으로 작업가스 $Ar:O_2$의 비율을 90:10, 80:20, 70:30으로 변화하면서 $BST(Ba_{0.5}Sr_{0.5}TiO_3)$ 박막을 약 $2000{\AA}$ 증착하였다. XRD 측정결과 작업가스비의 변화에 관계없이(110)BST와 (111)BST 피크만이 관찰되었으며 작업가스 $Ar:O_2=80:20$에서 가장 양호한 결정성을 나타내었다. I-V 측정결과 인가전계 ${\pm}100kV/cm$에서 $10^{-7}A/cm^2$이하의 양호한 누설전류 특성을 보여주고 있으며 C-V 측정결과 작업가스 $Ar:O_2$의 비율 90:10, 80:20, 70:30에서의 비유전율은 각각 283, 305, 296으로서 작업가스비 80:20에서 제작된 박막의 특성이 가장 우수하였다. 작업가스비 80:20에서 제작된 박막의 SEM 측정결과 결정이 성장되었음을 확인할 수 있었고 그레인의 크기는 약 10nm였다.

• Journal of the Korean Ceramic Society
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• v.49 no.5
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• pp.432-437
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• 2012

Electrical properties of the laminated SMD-type PTC thermistor for microcircuit protection were investigated as a function of calcination and sintering temperature. $BaTiO_3$ with $Y_2O_3$ and $MnO_2$ were calcined at 1000 to $1150^{\circ}C$ for 2h and the laminated SMD-type PTC thermistor was sintered at 1350 to $1400^{\circ}C$ for 2h in a reduced atmosphere (1% $H_2/N_2$). Sintered density of the sample was dependent on the calcination and sintering temperature. Electrical properties of the sintered samples were strongly dependent on the densities of samples. For the samples with density below 4.6 g/$cm^3$, the insulator characteristics were observed, while PTC jump characteristics (R150/R30) were disappeared for the sample with density above 5.05 g/$m^3$. Optimal PTC characteristics were obtained for the sintered samples with density of 5.05 g/$m^3$. The laminated SMD-type PTC thermistor prepared by calcination at $1100^{\circ}C$ for 2h and sintering at $1270^{\circ}C$ for 2h showed the room temperature resistivity of $11{\Omega}{\cdot}cm$ and PTC jump characteristics of $10^2$ order.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1929_1930
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• 2009

Fully embedded tunable bandpass filter (BPF) with inductive coupling circuits is newly designed and demonstrated for UHF TV tuner ranged from 500MHz to 900MHz receivers. Conventional RF tuning circuit with an electromagnetic coupled tunable filter has several problems such as large size, high volume, and high cost, since the electromagnetic coupled filter is comprised of several passive components and air core inductors to be assembled and controlled manually. To address these obstacles, compact tunable filter with inductive coupling circuit was embedded into low cost organic package substrate. The embedded filter was optimally designed to have high performance by using high Q spiral stacked inductors, high dielectric $BaTiO_3$ composite MIM capacitors, varactor diodes. It exhibited low insertion loss of approximately -2dB, high return loss of below -10dB, and large tuning range of 56.3%. It has an extremely compact size of $3.4{\times}4.4{\times}0.5mm^3$.