• Title/Summary/Keyword: $BCl_3/N_2$

검색결과 204건 처리시간 0.039초

중성빔 식각과 중성빔 원자층 식각기술을 이용한 TiN/HfO2 layer gate stack structure의 저 손상 식각공정 개발

  • 연제관;임웅선;박재범;김이연;강세구;염근영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.406-406
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    • 2010
  • 일반적으로, 나노스케일의 MOS 소자에서는 게이트 절연체 두께가 감소함에 따라 tunneling effect의 증가로 인해 PID (plasma induced damage)로 인한 소자 특성 저하 현상을 감소하는 추세로 알려져 있다. 하지만 요즘 많이 사용되고 있는 high-k 게이트 절연체의 경우에는 오히려 더 많은 charge들이 trapping 되면서 PID가 오히려 더 심각해지는 현상이 나타나고 있다. 이러한 high-k 게이트 식각 시 현재는 주로 Hf-based wet etch나 dry etch가 사용되고 있지만 gate edge 영역에서 high-k 게이트 절연체의 undercut 현상이나 PID에 의한 소자특성 저하가 보고되고 있다. 본 연구에서는 이에 차세대 MOS 소자의 gate stack 구조중 issue화 되고 있는 metal gate 층과 gate dielectric 층의 식각공정에 각각 중성빔 식각과 중성빔 원자층 식각을 적용하여 전기적 손상 없이 원자레벨의 정확한 식각 조절을 해줄 수 있는 새로운 two step 식각 공정에 대한 연구를 진행하였다. 먼저 TiN metal gate 층의 식각을 위해 HBr과 $Cl_2$ 혼합가스를 사용한 중성빔 식각기술을 적용하여 100 eV 이하의 에너지 조건에서 하부층인 $HfO_2$와 거의 무한대의 식각 선택비를 얻었다. 하지만 100 eV 조건에서는 낮은 에너지에 의한 빔 스케터링으로 실제 패턴 식각시 etch foot이 발생되는 현상이 관찰되었으며, 이를 해결하기 위하여 먼저 높은 에너지로 식각을 진행하고 $HfO_2$와의 계면 근처에서 100 eV로 식각을 해주는 two step 방법을 사용하였다. 그 결과 anistropic 하고 하부층에 etch stop된 식각 형상을 관찰할 수 있었다. 다음으로 3.5nm의 매우 얇은 $HfO_2$ gate dielectric 층의 정확한 식각 깊이 조절을 위해 $BCl_3$와 Ar 가스를 이용한 중성빔 원자층 식각기술을 적용하여 $1.2\;{\AA}$/cycle의 단일막 식각 조건을 확립하고 약 30 cycle 공정시 3.5nm 두께의 $HfO_2$ 층이 완벽히 제거됨을 관찰할 수 있었다. 뿐만 아니라, vertical 한 식각 형상 및 향상된 표면 roughness를 transmission electron microscope(TEM)과 atomic force microscope (AFM)으로 관찰할 수 있었다. 이러한 중성빔 식각과 중성빔 원자층 식각기술이 결합된 새로운 gate recess 공정을 실제 MOSFET 소자에 적용하여 기존 식각 방법으로 제작된 소자 결과를 비교해 본 결과 gate leakage current가 약 one order 정도 개선되었음을 확인할 수 있었다.

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Assessment of the Cytotoxic and Apoptotic Effects of Chaetominine in a Human Leukemia Cell Line

  • Yao, Jingyun;Jiao, Ruihua;Liu, Changqing;Zhang, Yupeng;Yu, Wanguo;Lu, Yanhua;Tan, Renxiang
    • Biomolecules & Therapeutics
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    • 제24권2호
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    • pp.147-155
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    • 2016
  • Chaetominine is a quinazoline alkaloid originating from the endophytic fungus Aspergillus fumigatus CY018. In this study, we showed evidence that chaetominine has cytotoxic and apoptotic effects on human leukemia K562 cells and investigated the pathway involved in chaetominine-induced apoptosis in detail. Chaetominine inhibited K562 cell growth, with an $IC_{50}$ value of 35 nM, but showed little inhibitory effect on the growth of human peripheral blood mononuclear cells. The high apoptosis rates, morphological apoptotic features, and DNA fragmentation caused by chaetominine indicated that the cytotoxicity was partially caused by its pro-apoptotic effect. Under chaetominine treatment, the Bax/Bcl-2 ratio was upregulated (from 0.3 to 8), which was followed by a decrease in mitochondrial membrane potential, release of cytochrome c from mitochondria into the cytosol, and stimulation of Apaf-1. Furthermore, activation of caspase-9 and caspase-3, which are the main executers of the apoptotic process, was observed. These results demonstrated that chaetominine induced cell apoptosis via the mitochondrial pathway. Chaetominine inhibited K562 cell growth and induced apoptotic cell death through the intrinsic pathway, which suggests that chaetominine might be a promising therapeutic for leukemia.

Condurango (Gonolobus condurango) Extract Activates Fas Receptor and Depolarizes Mitochondrial Membrane Potential to Induce ROS-dependent Apoptosis in Cancer Cells in vitro -CE-treatment on HeLa: a ROS-dependent mechanism-

  • Bishayee, Kausik;Mondal, Jesmin;Sikdar, Sourav;Khuda-Bukhsh, Anisur Rahman
    • 대한약침학회지
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    • 제18권3호
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    • pp.32-41
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    • 2015
  • Objectives: Condurango (Gonolobus condurango) extract is used by complementary and alternative medicine (CAM) practitioners as a traditional medicine, including homeopathy, mainly for the treatment of syphilis. Condurango bark extract is also known to reduce tumor volume, but the underlying molecular mechanisms still remain unclear. Methods: Using a cervical cancer cell line (HeLa) as our model, the molecular events behind condurango extract's (CE's) anticancer effect were investigated by using flow cytometry, immunoblotting and reverse transcriptase-polymerase chain reaction (RT-PCR). Other included cell types were prostate cancer cells (PC3), transformed liver cells (WRL-68), and peripheral blood mononuclear cells (PBMCs). Results: Condurango extract (CE) was found to be cytotoxic against target cells, and this was significantly deactivated in the presence of N-acetyl cysteine (NAC), a scavenger of reactive oxygen species (ROS), suggesting that its action could be mediated through ROS generation. CE caused an increase in the HeLa cell population containing deoxyribonucleic acid (DNA) damage at the G zero/Growth 1 (G0/G1) stage. Further, CE increased the tumor necrosis factor alpha ($TNF-{\alpha}$) and the fas receptor (FasR) levels both at the ribonucleic acid (RNA) and the protein levels, indicating that CE might have a cytotoxic mechanism of action. CE also triggered a sharp decrease in the expression of nuclear factor kappa-light-chain-enhancer of activated B cells ($NF-{\kappa}B$) both at the RNA and the protein levels, a possible route to attenuation of B-cell lymphoma 2 (Bcl-2), and caused an opening of the mitochondrial membrane's permeability transition (MPT) pores, thus enhancing caspase activities. Conclusion: Overall, our results suggest possible pathways for CE mediated cytotoxicity in model cancer cells.

Kimchi attenuates fatty streak formation in the aorta of low-density lipoprotein receptor knockout mice via inhibition of endoplasmic reticulum stress and apoptosis

  • Woo, Minji;Kim, Mijeong;Noh, Jeong Sook;Park, Chan Hum;Song, Yeong Ok
    • Nutrition Research and Practice
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    • 제11권6호
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    • pp.445-451
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    • 2017
  • BACKGROUND/OBJECTIVES: Endoplasmic reticulum (ER) stress is positively associated with atherosclerosis via elevating macrophage cell death and plaque formation, in which oxidative stress plays a pivotal role. Antioxidative, lipid-lowering, and anti-atherogenic effects of kimchi, a Korean fermented vegetable, have been established, wherein capsaicin, ascorbic acid, quercetin, 3-(4'-hydroxyl-3',5'-dimethoxyphenyl)propionic acid, and lactic acids were identified. In this study, mechanisms of action of kimchi methanol extracts (KME) on fatty streak formation via suppression of ER stress and apoptosis in aorta were examined in low-density lipoprotein receptor knockout mice. MATERIALS AND METHODS: Mice fed a high cholesterol diet with an oral administration of KME (KME group, $200 mg{\cdot}kg-bw^{-1}{\cdot}day^{-1}$) or distilled water (control group) for 8 weeks (n = 20 for group). Plasma lipid and oxidative stress levels were evaluated. Protein expression was measured by western blot assay. Fatty streak lesion size and the degree of apoptosis were examined in the aorta. RESULTS: Compared to the control group, in the KME group, plasma lipids levels were decreased and oxidative stress was alleviated (P < 0.05). Protein expression levels of nuclear factor (erythroid-derived 2)-like 2-mediated antioxidants in aorta were increased whereas those for ER stress markers, glucose regulated protein 78, phospho-protein kinase RNA-like ER kinase, phospho-eukaryotic initiation factor 2 subunit ${\alpha}$, X-box binding protein 1, and C/EBP homologous protein were decreased in the KME group (P < 0.05). Moreover, apoptosis was suppressed via downregulation of phospho-c-Jun N-terminal kinase, bcl-2-associated X protein, caspases-9, and -3 with a concomitant upregulation of anti-apoptotic protein, B-cell lymphoma 2 (P < 0.05). Fatty streak lesion size was reduced and the degree of apoptosis was less severe in the KME group (P < 0.05). CONCLUSIONS: In conclusion, antioxidant activity of KME might prevent fatty streak formation through, in part, inhibition of ER stress and apoptosis in aortic sinus where macrophages are harbored.

베타아밀로이드로 유도된 신경소교세포 사멸에 대한 루테올린의 보호효과 연구 (Protective Effect of Luteolin against β-Amyloid-induced Cell Death and Damage in BV-2 Microglial Cells)

  • 박규환;장정희
    • 대한본초학회지
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    • 제28권6호
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    • pp.79-86
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    • 2013
  • Objectives : The purpose of this study is to investigate neuroprotective effects and molecular mechanisms of luteolin against ${\beta}$-amyloid ($A{\beta}_{25-35}$)-induced oxidative cell death in BV-2 cells. Methods : The protective effects of luteolin against $A{\beta}_{25-35}$-induced cytotoxicity and apoptotic cell death were determined by MTT dye reduction assay and TUNEL staining, respectively. The apoptotic cell death was further analyzed by measuring mitochondrial transmembrane potential and expression of pro- and/or anti-apoptotic proteins. To elucidate the molecular mechanisms underlying the protective effects of luteolin, intracellular accumulation of reactive oxygen species, oxidative damages, and expression of antioxidant enzymes were examined. Results : Luteolin pretreatment effectively attenuated $A{\beta}_{25-35}$-induced apoptotic cell death indices such as DNA fragmentation, dissipation of mitochondrial transmembrane potential, increased Bax/Bcl-2 ratio, and activation of c-Jun N-terminal kinase and caspase-3 in BV-2 cells. Furthermore, $A{\beta}_{25-35}$-induced intracellular formation of reactive oxygen species and subsequent oxidative damages such as lipid peroxidation and depletion of endogenous antioxidant glutathione were suppressed by luteolin treatment. The neuroprotective effects of luteolin might be mediated by up-regulation of cellular antioxidant defense system via up-regulation of ${\gamma}$-glutamylcysteine ligase, a rate-limiting enzyme in the glutathione biosynthesis and superoxide dismutase, an enzyme involved in dismutation of superoxide anion into oxygen and hydrogen peroxide. Conclusions : These findings suggest that luteolin has a potential to protect against $A{\beta}_{25-35}$-induced neuronal cell death and damages thereby exhibiting therapeutic utilization for the prevention and/or treatment of Alzheimer's disease.

우슬이 뇌허혈 유발 모래쥐의 해마에서 신경세포 사멸과 단기기억력에 미치는 영향 (The Effects of Achyranthis Radix on Short-term Memory and Apoptosis in the Hippocampus of the Gerbil with Transient Global Ischemia)

  • 윤현석;송윤경;임형호
    • 한방재활의학과학회지
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    • 제21권2호
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    • pp.15-30
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    • 2011
  • Objectives : The present study investigated the effects of Achyranthis Radix on short-term memory, apoptotic neuronal cell death in the hippocampus following transient global ischemia in gerbils. Methods : The gerbils were divided into 5 groups(n=10); Sham operation group, ischemia-induced group, ischemia-induced and 50 mg/kg Achyranthis Radix-treated group, ischemia-induced and 100 mg/kg Achyranthis Radix-treated group, ischemia-induced and 200 mg/kg Achyranthis Radix-treated group. For this study, a step-down avoidance task, terminal deoxynucleotidyl transferase-mediated dUTP nick end labeling(TUNEL) assay, immunohistochemistry for caspase-3 and BrdU(5-Bromo-2'-deoxyuridine), and western blotting for bax, bcl-2 were performed. Results : The results revealed that ischemic injury impaired short-term memory and increased apoototic neuronal cell death in the hippocampal CA1(cornu ammonis area 1) region. Ischemic injury enhanced cell proliferation in the hippocampal CA1 region, the compensatory and adaptive process for excessive apoptosis. Achyranthis Radix treatment improved short-term memory by suppressing ischemia-induced apoptotic neuronal cell death in the hippocampal CA1 region. Also, Achyranthis Radix suppressed the ischemia-induced increase in cell proliferation in the hippocampal CA1 region. Conclusions : We showed that Achyranthis Radix alleviates ischemia-induced apoptotic neuronal cell death, thus facilitates the recovery of short-term memory impairment induced by ischemic cerebral injury.

Bis Is Involved in Glial Differentiation of PI9 Cells Induced by Retinoic Acid

  • Yoon, Jung-Sook;Lee, Mun-Yong;Lee, Jae-Seon;Park, Chan-Sun;Youn, Ho-Joong;Lee, Jeong-Hwa
    • The Korean Journal of Physiology and Pharmacology
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    • 제13권3호
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    • pp.251-256
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    • 2009
  • Previous observations suggest that Bis, a Bcl-2-binding protein, may playa role the neuronal and glial differentiation in vivo. To examine this further, we investigated Bis expression during the in vitro differentiation of P19 embryonic carcinoma cells induced by retinoic acid (RA). Western blotting and RT-PCR assays showed that Bis expression was temporarily decreased during the free floating stage and then began to increase on day 6 after the induction of differentiation. Double immunostaining indicated that Bis-expressing cells do not express several markers of differentiation, including NeuN, MAP-2 and Tuj-1. However, some of the Bis-expressing cells also were stained with GFAP-antibodies, indicating that Bis is involved glial differentiation. Using an shRNA strategy, we developed bis-knock down P19 cells and compared them with control P19 cells for the expression of NeuroD, Mash-1 and GFAP during RA-induced differentiation. Among these, only GFAP induction was significantly attenuated in Pl9-dnbis cells and the population showing GFAP immunoreactivity was also decreased. It is noteworthy that distribution of mature neurons and migrating neurons was disorganized, and the close association of migrating neuroblasts with astrocytes was not observed in P19-dnbis cells. These results suggest that Bis is involved in the migration-inducing activity of glial cells.

Protective effect of Korean Red Ginseng against glucocorticoid-induced osteoporosis in vitro and in vivo

  • Kim, Jinhee;Lee, Hyejin;Kang, Ki Sung;Chun, Kwang-Hoon;Hwang, Gwi Seo
    • Journal of Ginseng Research
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    • 제39권1호
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    • pp.46-53
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    • 2015
  • Background: Glucocorticoids (GCs) are commonly used in many chemotherapeutic protocols and play an important role in the normal regulation of bone remodeling. However, the prolonged use of GCs results in osteoporosis, which is partially due to apoptosis of osteoblasts and osteocytes. In this study, effects of Korean Red Ginseng (KRG) on GC-treated murine osteoblastic MC3T3-E1 cells and a GC-induced osteoporosis mouse model were investigated. Methods: MC3T3-E1 cells were exposed to dexamethasone (Dex) with or without KRG and cell viability was measured by the 3-(4, 5-dimethylthiazol-2-yl)-2, 5-diphenyltetrazolium bromide (MTT) assay. Realtime polymerase chain reaction was performed to evaluate the apoptotic gene expression; osteogenic gene expression and alkaline phosphatase (ALP) activity were also measured. Western blotting was performed to evaluate the mitogen-activated protein kinase (MAPK) proteins. A GC-induced osteoporosis animal model was used for in vivo study. Results and conclusion: The MTT assay revealed that Korean Red Ginseng (KRG) prevents loss of cell viability caused by Dex-induced apoptosis in MC3T3E1 cells. Real-time polymerase chain reaction data showed that groups treated with both Dex and KRG exhibited lower mRNA levels of caspase-3 and -9, whereas the mRNA levels of Bcl2, IAPs, and XIAP increased. Moreover, groups treated with both Dex and KRG demonstrated increased mRNA levels of ALP, RUNX2, and bone morphogenic proteins as well as increased ALP activity in MC3T3-E1 cells, compared to cells treated with Dex only. In addition, KRG increased protein kinase B (AKT) phosphorylation and decreased c-Jun N-terminal kinase (JNK) phosphorylation. Moreover, microcomputed tomography analysis of the femurs showed that GC implantation caused trabecular bone loss. However, a significant reduction of bone loss was observed in the KRG-treated group. These results suggest that the molecular mechanism of KRG in the GC-induced apoptosis may lead to the development of therapeutic strategies to prevent and/or delay osteoporosis.

인체 전립선 암세포에서 Methyl Gallate의 항암효과 (Anticancer Activity of Methyl Gallate in RC-58T/h/SA#4 Primary Human Prostate Cancer Cells)

  • 권순재;이주혜;김재용;문광덕;이성태;서권일
    • 한국식품영양과학회지
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    • 제43권3호
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    • pp.367-373
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    • 2014
  • 본 연구에서는 MG의 RC-58T/h/SA#4 인체 전립선 암세포에 대한 증식 억제 및 apoptosis 유도효과에 대하여 확인하였다. MG는 RC-58T/h/SA#4 세포의 증식을 농도 의존적으로 억제하였다. 이러한 MG에 의한 RC-58T/h/SA#4 세포의 사멸이 apoptosis에 의해 일어나는지를 sub-G1 함량 측정 및 Hoechst 33258 염색을 이용하여 확인하였다. 그 결과 MG를 처리한 군의 sub-G1의 함량이 대조군에 비하여 증가하였으며, methyl gallate를 처리한 군에서 핵의 응축과 apoptotic body 형성을 Hoechst 33258 염색을 통하여 관찰할 수 있었다. 또한 RC-58T/h/SA#4 세포에서 MG가 유도하는 apoptosis의 기전을 확인하기 위하여 다양한 실험을 실시하였다. MG는 DNA의 분절량 증가 및 caspase 활성을 유도하였으며, 활성화된 caspase-8, -9 및 -3에 의해 PARP와 Bid 단백질의 분절을 발현시켰으며, Bcl-2 family 단백질의 발현에 영향을 미쳐 apoptosis를 유도하였음을 확인하였다. 한편 환경호르몬인 dioxin과 bisphenol A를 다양한 농도로 처리한 결과 각각 1 nM, $0.1{\mu}M$ 농도에서 가장 높은 전립선 암세포 과다증식을 유도하였으며, 이를 바탕으로 MG를 농도별로 처리한 결과 환경호르몬에 의해 유도된 인체 전립선 암세포의 증식을 농도 의존적으로 억제시켰다. 본 연구 결과 MG는 RC-58T/h/SA#4 전립선 암세포에서 apoptosis 유도를 통한 암세포 성장 억제효과를 가지고 있음을 확인하였으며, 환경호르몬에 의해 유발될 수 있는 암에 대해서도 유사한 보호효과를 가지고 있음을 증명하였다.

ARPE-19 세포에서 산화적 스트레스에 대한 갈색거저리 추출물의 항산화 효과 (Antioxidative Effects of Tenebrio molitor Larvae Extract Against Oxidative Stress in ARPE-19 Cells)

  • 김봉선;최라영;반유진;이준하;김인우;서민철
    • 생명과학회지
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    • 제32권11호
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    • pp.865-871
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    • 2022
  • 황반 변성은 현대 사회에서 발병율이 급격히 증가한 질환 중 하나이다. 황반 변성의 대표적인 원인은 노화로 인한 산화 스트레스로 널리 알려져 있고 최근 노령화로 인해 발병 연령은 40대부터 급격하게 증가하고 있다. 따라서 본 연구에서는 TMH를 이용해 산화적 스트레스에 대한 항산화 효능 및 세포 사멸 억제연구를 통해 눈 건강 개선 소재를 개발하였다. 먼저 TMH의 인간 망막색소상피세포 사멸 억제 효능 평가를 위해 MTS assay로 세포 생존율을 측정하였다. 망막색소상피세포에서 H2O2에 의한 산화적 스트레스로 인해 약 60%의 세포 생존율을 확인 할 수 있었고 TMH에 의해 농도 의존적으로 세포 사멸을 억제됨을 확인할 수 있었다. 또한 LDH release assay를 통해 세포막 보호 효능을 확인 하였으며 세포 내 ROS 측정을 통해 세포 내 활성산소종 조절을 통한 항산화 효능을 확인 할 수 있었다. 마지막으로 세포 생존과 사멸에 관여하는 세포 내 신호 단백질인 MAPKs의 인산화 조절, 항산화 효소인 HO-1 발현 조절, 세포 사멸 관여 단백질인 Bax/Bcl-2의 발현 그리고 cleaved caspase-3 단백질 분석을 통해 TMH의 산화 스트레스에 대한 항산화 그리고 세포 사멸 억제 경로를 확인 하였다. 위와 같은 결과 도출을 통해 TMH의 눈 건강 기능성 소재로서의 가능성을 확인하였다.