• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.374.2-374.2
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• 2016

Volatile organic compounds (VOCs) in the atmosphere are harmful materials which influence indoor air environment and human health. Titanium dioxide ($TiO_2$) is photocatalyst extensively used in degradation of organic compound. To improve the photocatalytic activity in the visible light region, doping with non-metals element or loading noble metals on the surface of $TiO_2$ is generally proposed. In this study, N- doped $TiO_2$ having photocatalytic activity in visible light region was attached noble metal such as Pt, Ag, Pd, Au by coupling method. Catalytic activities of Noble metal coupled $N-TiO_2$ powders were evaluated by the improvement of their photocatalytic activities and the degradation of VOC gas. A UV-Vis spectrophotometer was used to measure the diffuse reflectance spectra of coupled $N-TiO_2$ sample. The photocatlytic activities of as prepared samples were characterized by the decoloration of aqueous MB solution under Xenon light source (UV and visible light). To measure of decomposition VOCs, ethylbenzene was selected for target VOC material and the concentration was monitored under UVLED irradiation in a closed chamber system. Adjusting the initial concentration of 10~12 ppm, to evaluate the removal characteristics by using the coupled $N-TiO_2$.

• 한국표면공학회지
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• 제55권1호
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• pp.1-8
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• 2022

Titanium dioxide (TiO₂) is one of the most intensively investigated materials in materials science. Mostly, TiO₂ has been used in the form of nanoparticles, but recently new highly ordered TiO₂ nanotubes (U-tube) has been introduced and applied to various applications due to their one-dimensional charge path way. In the present paper, we described the formation process and physical properties of U-tube then, gave examples of applications in sequence. Firstly, in photocatalysis, U-tube was used with Au/Pt co-catalysts and showed enhanced photogenerated H₂ efficiency compared to bare TiO₂. Secondly, photoelectrochemical performance of U-tube was evaluated with different heat-treatment temperatures. As a further application, two different types of electrical cell (Ti-TiO₂-Pt and Ti-TiO₂-Pt_NP) was configurated to observe memristive behavior of U-tube. Both cells behaved as switching electrodes and follow a memristive movement in the high and low resistance state extremely well with high reproducibility.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.662-662
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• 2013

Over the last several decades, innovative light-harvesting devices have evolved to achieve high efficiency in solar energy transfer. Research on the mechanisms for plasmon resonance is very desirable to overcome the conventional efficiency limits of photovoltaics. The influence of localized surface plasmon resonance on hot electron flow at a metal-semiconductor interface was observed with a Schottky diode composed of a thin silver layer on $TiO_2$. The photocurrent is generated by absorption of photons when electrons have enough energy to travel over the Schottky barrier and into the titanium oxide conduction band. The correlation between the hot electrons and the surface plasmon is confirmed by matching the range of peaks between the incident photons to current conversion efficiency (IPCE, flux of collected electrons per flux of incident photons) and UV-Vis spectra. The photocurrent measured on Ag/$TiO_2$ exhibited surface plasmon peaks; whereas, in contrast to the Au/$TiO_2$, a continuous Au thin film doesn't exhibit surface plasmon peaks. We modified the thickness and morphology of a continuous Ag layer by electron beam evaporation deposition and heating under gas conditions and found that the morphological change and thickness of the Ag film are key factors in controlling the peak position of light absorption.

• 한국재료학회지
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• 제5권6호
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• pp.754-762
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• 1995

차세대 LSI용 유전체 박막으로서의 응용을 목적으로 RF 마그네트론 스퍼터링법으로 Si기판위에 SrTiO$_3$박막을 제조하였다. Ar과 $O_2$혼합가스 비, 바이어스 전압변화, 열처리 온도등의 증착조건을 다양하게 변화시키며 SrTiO$_3$박막을 제조하여 최적의 증착조건을 조사하였다. 박막의 결정성을 XRD로, 박막과 Si 사이의 계면의 조성분포를 AES로 각각 분석하였다. Ar과 $O_2$의 혼합가스를 스퍼터링 가스로 사용함으로써 결정성이 좋은 박막을 얻었다. 그리고 보다 치밀한 박막을 얻고자 바이어스 전압을 걸어주며 증착시켰다. 본 실험결과에서는 스퍼터링 가스는 Ar+20% $O_2$혼합가스, 바이어스 전압은 100V에서 좋은 결정성을 얻었다. 또한 하부전극으로 Pt, 완충층으로 Ti를 사용함으로써 SrTiO$_3$막과 Si 기판과의 계면에서 SiO$_2$층의 형성을 억제할 수 있었으며, Si의 확산을 막을 수 있었다. 전류 및 유전특성을 측정하기 위해 Au/SrTiO$_3$/Pt/Ti/SiO$_2$/Si로 구성된 다층구조의 시편을 제작하였다. Pt/Ti층은 RF 스퍼터링으로, Au 전극은 DC 마그네트론 스퍼터링법으로 증착시켰다 $600^{\circ}C$로 열처리함에 의해 미세하던 결정림들이 균일하게 성장하였으며, 이에 따라 유전율이 증가하고 누설전류가 감소하였다. $600^{\circ}C$에서 열처리한 두께 300nm의 막에서 유전율은 6.4fF/$\mu\textrm{m}$$^2$이고, 비유전상수는 217이었으며, 누설전류밀도는 2.0$\times$$10^{-8}$ A/$\textrm{cm}^2$로 양질의 SrTiO$_3$박막을 제조하였다.

• 한국재료학회지
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• 제20권5호
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• pp.235-240
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• 2010

We investigated the carbon monoxide (CO) gas-sensing properties of nanostructured Al-doped zinc oxide thin films deposited on self-assembled Au nanodots (ZnO/Au thin films). The Al-doped ZnO thin film was deposited onto the structure by rf sputtering, resulting in a gas-sensing element comprising a ZnO-based active layer with an embedded Pt/Ti electrode covered by the self-assembled Au nanodots. Prior to the growth of the active ZnO layer, the Au nanodots were formed via annealing a thin Au layer with a thickness of 2 nm at a moderate temperature of $500^{\circ}C$. It was found that the ZnO/Au nanostructured thin film gas sensors showed a high maximum sensitivity to CO gas at $250^{\circ}C$ and a low CO detection limit of 5 ppm in dry air. Furthermore, the ZnO/Au thin film CO gas sensors exhibited fast response and recovery behaviors. The observed excellent CO gas-sensing properties of the nanostructured ZnO/Au thin films can be ascribed to the Au nanodots, acting as both a nucleation layer for the formation of the ZnO nanostructure and a catalyst in the CO surface reaction. These results suggest that the ZnO thin films deposited on self-assembled Au nanodots are promising for practical high-performance CO gas sensors.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.245-245
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• 2012

Syntheses of oxide supported metal catalysts by wet-chemical routes have been well known for their use in heterogeneous catalysis. However, uniform deposition of metal nanoparticles with controlled size and shape on the support with high reproducibility is still a challenge for catalyst preparation. Among various synthesis methods, arc plasma deposition (APD) of metal nanoparticles or thin films on oxide supports has received great interest recently, due to its high reproducibility and large-scale production, and used for their application in catalysis. In this work, Au and Pt nanoparticles with size of 1-2 nm have been deposited on titania powder by APD. The size of metal nanoparticles was controlled by number of shots of metal deposition and APD conditions. These catalytic materials were characterized by x-ray diffraction (XRD), inductively coupled plasma (ICP-AES), CO-chemisorption and transmission electron microscopy (TEM). Catalytic activity of the materials was measured by CO oxidation using oxygen, as a model reaction, in a micro-flow reactor at atmospheric pressure. We found that Au/$TiO_2$ is reactive, showing 100% conversion at $110^{\circ}C$, while Pt/$TiO_2$ shows 100% conversion at $200^{\circ}C$. High activity of metal nanoparticles suggests that APD can be used for large scale synthesis of active nanocatalysts. We will discuss the effect of the structure and metal-oxide interactions of the catalysts on catalytic activity.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.172-173
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• 2006

Metal-ferroelectric-insulator-semiconductor (MFIS) structures with $Bi_{3.35}La_{0.75}Ti_3O_{12}$ (BLT) ferroelectric film and Zirconium oxide ($ZrO_2$) layer were fabricated on p-type Si(100). $ZrO_2$ and BLT films were prepared by sol-gel technique. Surface morphologies of $ZrO_2$ and BLT film were measured by atomic force microscope (AFM). The electrical characteristics of Au/$ZrO_2$/Si and Au/BLT/$ZrO_2$/Si film were investigated by C-V and I-V measurements. No hysteretic characteristics was observed in the C-V curve of the Au/$ZrO_2$/Si structure. The memory window width m C-V curve of the Au/BLT/$ZrO_2$/Si diode was about 1.3 V for a voltage sweep of ${\pm}5$ V. The leakage current of Au/$ZrO_2$/Si and Au/BLT/$ZrO_2$/Si structures were about $3{\times}10^{-8}$ A at 30 MV/cm and $3{\times}10^{-8}$ A at 3 MV/cm, respectively.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2010년도 춘계학술발표대회
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• pp.54.1-54.1
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• 2010

산화물 기반의 TFT는 유리, 금속, 플라스틱 등 기판 종류에 상관없이 균일한 제작이 가능하며, 상온 및 저온에서 대면적으로 제작이 가능하고, 저렴한 비용으로 제작 가능하다는 장점 때문에 최근 많은 연구가 이루어지고 있다. 현재 TFT 물질로 많이 연구되고 있는 산화물은 ZnO (3.4 eV)나 InOx (3.6 eV), GaOx (4.9 eV), SnOx(3.7 eV)등의 물질과 각각의 조합으로 구성된 재료들이 주로 사용되고 있으며, 가장 많은 연구가 이루어진 ZnO 기반의 TFT는 mobility와 switching 속도에서 우수한 특성을 보이나, 트렌지스터의 안정성이 떨어지는 것으로 보고 되고 있다. 그러나 IGZO 물질의 경우 결정학적으로 비정질이며 상온 및 저온에서 대면적으로 제작이 가능하고, 높은 전자 이동도의 특성을 가지고 있는 장점 때문에 최근 차세대 산화물 트렌지스터로 각광받고 있다. IGZO TFT 소자의 경우 Ag, Au, In, Pt, Ti, ITO 등 다양한 전극 물질이 사용되고 있는데, 이들 중 active channel과 ohmic contact을 이루는 Al, Ti, Ag의 적용을 통해 향상된 성능을 얻을 수 있다. 하지만 이들 전극 재료는 TFT 소자 제작시 필수적인 열처리 공정에 노출되면서 active channel 과 전극 사이 계면에 문제점을 야기할 수 있다. 특히, Ti의 경우 산화가 잘되기 때문에 전극계면에 TiO2를 형성하여 contact resistance의 큰 영향을 미치는 것으로 보고 되고 있다. 본 연구에서는 ohmic 전극재료인 Ti 또는 Ti/Au를 적용하여 TFT 소자 제작 및 특성에 대한 평가를 진행했으며, 열처리에 따른 전극과 IGZO 계면 사이의 미세구조와 전기적인 특성간의 상관관계를 연구하였다. 이를 통해, 소자 제작 공정을 최적화하고 신뢰성 있는 소자 특성을 얻을 수 있었다.

• 광물과 암석
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• 제33권2호
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• pp.115-127
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• 2020

운산 금 광상은 한반도의 3대(대유동 광상, 광양 광상) 금 광상중의 하나이었다. 이 광상 주변지질은 선캠브리아기의 변성퇴적암류와 중생대의 반상화강암으로 구성된다. 이 광상은 선캠브리아기의 변성퇴적암류와 중생대의 반상화강암내에 발달된 단층대를 따라 충진한 함 금 석영맥 광상으로 조산형 금 광상에 해당된다. 이 광상의 석영맥은 광물조합에 따라 1)방연석-석영맥형, 2)자류철석-석영맥형, 3)황철석-석영맥형, 4)페크마틱 석영맥형, 5)백운모-석영맥형 및 6)단순석영맥형으로 분류된다. 연구된 석영맥은 황철석-석영맥형이며 견운모화작용, 녹니석화작용 및 규화작용이 관찰된다. 이 석영맥은 백색 석영, 백색 운모, 녹니석, 황철석, 금홍석, 방해석, 모나자이트, 저어콘 및 인회석 등이 산출된다. 금홍석은 엽리상 석영맥내 유색대에서 자형내지 중립질 입단으로 어두운 금홍석과 밝은 금홍석으로 산출된다. 금홍석의 화학조성은 89.69~98.71 wt.% (TiO₂), 0.25~7.04 wt.% (WO₃), 0.30~2.56 wt.% (FeO), 0.00~1.71 wt.% (Nb₂O₅), 0.17~0.35 wt.% (HfO₂), 0.00~0.30 wt.% (V₂O₃), 0.00~0.35 wt.% (Cr₂O₃) 및 0.04~0.25 wt.% (Al₂O₃)으로 밝은 금홍석이 어두운 금홍석보다 WO₃, Nb₂O₅ 및 FeO 원소들의 함량이 높게 산출되며 서로 다른 시기에 형성된 것으로 생각된다. 어두운 금홍석과 밝은 금홍석내 미량원소들은 어두운 금홍석 [(V³⁺, Cr³⁺) + (Nb⁵⁺, Sb⁵⁺) ↔ 2Ti⁴⁺, 4Cr³⁺ (or 2W⁶⁺) ↔ 3Ti⁴⁺ (W⁶⁺ ↔ 2Cr³⁺), V⁴⁺ ↔ Ti⁴⁺], 밝은 금홍석 [2Fe³⁺ + W⁶⁺ ↔ 3Ti⁴⁺, 3Fe²⁺ + W⁶⁺ ↔ Ti⁴⁺ + (V³⁺, Al³⁺, Cr³⁺) +Nb⁵⁺]로써 치환관계가 있었다. 이들 자료를 근거로, 어두운 금홍석은 광역변성작용 동안 모암광물들의 변질 시 광물내 존재했던 V³⁺, V⁴⁺, Cr³⁺, Nb⁵⁺, Sb⁵⁺, W⁶⁺과 같은 양이온들의 재 농집에 의해 형성되었으나 밝은 금홍석은 ductile shear 시 높은 함량의 Fe²⁺ 및 W⁶⁺ 양이온들을 함유한 열수용액의 유입에 따른 어두운 금홍석과 반응에 의해 어두운 금홍석에 존재하였던 V³⁺, V⁴⁺, Al³⁺, Cr³⁺ 및 Nb⁵⁺과 같은 양이온들의 재 농집에 의해 형성된 것으로 생각된다.

• 대한화장품학회지
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• 제22권2호
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• pp.52-69
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• 1996

Nano-Sized TiO$_2$ particles with diameter between 2 and 5 nm are synthesized in Water/Triton X-100/n-Hexane microemulsion. Particles show the amorphous structure and partially hydroxide form. The optical absorbance of particles appears at 250nm and band edge at 340nm. Gold metal is deposited on the surface of TiO$_2$ particles by reduction reaction of Au(III) ion with sodium hypophosphite. The size of gold-deposited particles is 20nm, and the optical absorbance appears at 270nm and at 550nm. So particles show the red color. The dense precipitation is formed by aggregation in the TiO$_2$ nano-sized particles of about 5nm size. But the bulky precipitation is formed by agglomeration phenomena in the gold-deposited particles of 20nm size. And also gold-deposited particles is easily dispersed by being re-dispersed in PEG/Water solution. This study has compared those things measuring the SPF characteristics of the cosmetics made of the synthesized particles. If the particle size is controlled appropriately, then the SPF value will be higher, or more colorless cosmetics will be made.