• Applied Chemistry for Engineering
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• v.16 no.6
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• pp.853-856
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• 2005

Inductively coupled plasma reactive ion etching of magnetic tunnel junction (MTJ) stack, which is one of the key elements in magnetic random access memory, was studied. The MTJ stacks were patterned in nanometer size by electron(e)-beam lithography, and TiN thin films were employed as a hard mask. The etch process of TiN hard mask was examined using Ar, $Cl_2/Ar$, and $SF_6/Ar$. The TiN hard mask patterned by e-beam lithography was first etched and then the etching of MTJ stack was performed. The MTJ stacks were etched using Ar, $Cl_2/Ar$, and $BCl_3/Ar$ gases by varying gas concentration and pressure.

• Proceedings of the Korean Vacuum Society Conference
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• 1997.02a
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• pp.104-104
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• 1997

• Proceedings of the Korean Vacuum Society Conference
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• 1995.06a
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• pp.92-92
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• 1995

• Proceedings of the Korean Vacuum Society Conference
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• 1997.02a
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• pp.170-170
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• 1997

• Proceedings of the Korean Vacuum Society Conference
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• 2008.08a
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• pp.313-313
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• 2008

• Proceedings of the Korean Vacuum Society Conference
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• 2002.06a
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• pp.176-176
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• 2002

• 한국전자현미경학회:학술대회논문집
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• 2001.11a
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• pp.66-69
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• 2001

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.3
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• pp.259-263
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• 2005

The changes in secondary electron emission coefficient(${\gamma}$) and work function($\Phi$$_{\omega}$) have been studied on the surface of MgO protective layer aster plasma(Ar. $O_2$) treatment using ${\gamma}$-focused ion beam (${\gamma}$-FIB) system. The values of ${\gamma}$ varied as follows: $O_2$-treated MgO > Ar-treated MgO > Non-treated MgO, and the work functions varied in the reverse order. The result indicates that both the physical etching and the chemical reaction of $O_2$-plasma removed the contaminating materials from the surface of MgO.

• Proceedings of the Korean Vacuum Society Conference
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• 1994.02a
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• pp.35-35
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• 1994

The surface segragation of NiZr, CuZr alloy has been studied wi th X-ray Imotoelectron spectroscopy(XPS), Auger electron spectroscopy(AES) and low energy ion scattering(LEIS). The composition of outmost atomic layer has been determinded by the use of LEIS at several incident energies using Ar+ ion. In the LEIS analysis, the effect of charge exchange has been estimated by a novel measurment of the charge exchange parameters while simul taneous determining the relative concentrations of Ni and Zr and the complementary information obtained will be described. The composition of the clean annealed surface, measured with AES only, will be contrasted wi th the surface concentration of the preferentially sputtered surface. The experimental results has been clearly demonstrated that when the NiZr ruld CuZr alloys are exposed to continuous Ar+ ion bombardment the outermost atomic layer is Zr rich due to preferential sputtering of Ni atoms. where Ni is preferentially sputtered, but the difference in sputtering yields is not sufficient to explain the observed composition. Therefore, it is necessary to consider other processes such as Radiation Induced Segregation(RIS). The surface composition of the heated sample surface predicts that Zr should surface segregate which futher supports the view that part of the Zr enrichment is due to RIS.to RIS.

• Journal of Environmental Science International
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• v.12 no.8
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• pp.871-879
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• 2003

The complexation of co-contaminant mixtures between Ag(I) and polycyclic aromatic hydrocarbon (PAH) molecules (naphthalene, pyrene, and perylene) were investigated to quantify the equilibrium constants of their complexes and elucidate the interactions between Ag(I) and PAH molecules. The apparent solubilities of PAHs in aqueous solutions increased with increasing Ag(I) ion concentration. The values, K$_1$ and K$_2$ of equilibrium constants of complexes of Ag(I)-PAHs, were 2.990 and 0.378, 3.615 and 1.261, and 4.034 and 1.255, for naphthalene, pyrene, and perylene, respectively, The K$_1$and K$_2$ values of PAHs for Ag(I) increased in the order of naphthalene ＜ pyrene ＜ perylene and naphthalene ＜ pyrene ≒ perylene, respectively, indicating that a larger size of PAH molecule is likely to have more a richer concentration of electrons on the plane surfaces which can lead to stronger complexes with the Ag(I) ion. For the species of Ag(I)-PAH complexes, a 1:1 Ag(I) : the aromatic complex, AgAr$\^$＋/, was found to be a predominant species over a 2:1 Ag(I) : aromatic complex, Ag$_2$Ar$\^$＋＋/. The PAH molecules with four or more aromatic rings and/or bay regions were observed to have slightly less affinity with the Ag(I) ion than expected, which might result from inhibiting forces such as the spread of aromatic $\pi$ electrons over o wide molecular surface area and the intermolecular electronic repulsion in bay regions.