• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.155.2-155.2
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• 2014

Plasma Enhanced Atomic Layer Deposition(PEALD)와 Atomic Layer Deposition(ALD) Techniques는 '정확한 두께 조절' 및 '우수한 균일도'를 가지는 신뢰할 수 있는 진공 기술이다. 본 연구에서는 다공성 구조를 가지는 기판을 대상으로 PEALD와 ALD Techniques을 이용한 $Al_2O_3$ 형성 공정의 증착 특성을 비교하였다. 각 공정은 공통적으로 Tris-Methyl-Aluminium(TMA)을 첫번째 전구체로 사용하였고 purge gas로는 Nitrogen를 사용하였다. 그리고 두번째 전구체로 PEALD 공정에서는 Oxygen Plasma를 사용하였고 ALD 공정에서는 Water를 사용하였다. 복잡한 다공성 구조를 가지는 기판은 $TiO_2$ Nano-Particle paste과 colloidal Silver paste를 소결시켜 제작하여 사용하였다. 각 공정의 차이점을 비교하기 위해서 배기단에 Capacitor Diaphram Gauge(CDG)와 Residual Gas Analyzer(RGA)를 통해서 압력과 잔류 가스를 모니터하였다. 그리고 각 공정을 통해서 porous한 Nano-Particles Network에 형성된 $Al_2O_3$막의 특성을 비교하기 위해서 FE-SEM과 EDX를 통해서 관찰하였다. 또한 좀 더 자세한 비교 분석을 위해서 $Al_2O_3$ 막이 형성된 porous한 Nano-Particles Networks의 각 각의 particles들을 분산시켜 TEM과 AFM를 통해서 관찰하였다. 나아가 전기적 물성의 차이점을 비교하기 위해서 IV 및 CV를 측정하였다. 위의 일련의 비교 실험을 통해서 'PEALD과 ALD을 이용한 다공성 기판의 증착 특성'에 대하여 고찰하였다.

• 대한환경공학회지
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• 제22권10호
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• pp.1881-1891
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• 2000

석탄화력 발전소에서 석탄이 연소되면서 생성된 석탄회 중 Cenosphere는 속이 비어 있거나 미세 입자들로 채워져 있고 입자의 크기가 큰 구형의 입자로 물에 부유할 정도로 비중이 작을뿐만 아니라 입자의 벽면에 유리질 성분이 많은 입자이다. 본 연구는 Cenosphere 입자에 대한 형성메카니즘을 분석하여 형태적, 물리적, 화학적 특성을 파악하였다. Cenosphere는 석탄이 연소하면서 입자의 내부에서 발생된 가스가 밖으로 방출되면서 형성되기 때문에 입자가 부풀어져 크게 되고 가스의 분출로 입자의 표변에 구멍이 발생하며 알루미노실리케이트 (Aluminosilicate) 성분에 의해 형성된 기포가 용융표면층에 부착되어 Cenosphere내부에 미세 입자들을 형성한다. 이와 같온 입자의 형성메카니즘 특성 때문에 분말성이 좋으면서 가볍고 큰 입자를 형성한다. Cenosphere의 입도분포는 $100{\sim}200{\mu}m$에 집중된 Single Modal로 질량중앙직경은 $123.11{\mu}m$이고 비중은 $0.67g/cm^3$, 분말도는 $1,135g/cm^3$으로 분석되었다. 또한 Cenosphere의 입자를 구성하는 성분 중 $SiO_2$는 59.17%, $Al_2O_3$는 30.16%로 전체의 89.33%를 차지하고 있고 있어 알루미노실리케이트 성분, 즉 유리질 성분이 높아 열절연성이 뛰어나다. 따라서 Cenosphere 입자를 실리카 바인더로 입자를 결합하면 다양한 온도에서 사용할 수 있는 우수한 열절연체를 만들 수 있어 재활용 원료로 활용이 가능하다.

• 한국세라믹학회지
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• 제30권2호
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• pp.115-122
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• 1993

Transparent Al2O3 and TiO2 clear sols prepared by hydrolysis and subsequent peptization were mixed into wet gel. EDS analysis for this gel showed that wet gel was extremely homogeneous in chemical composition. Calcination of the wet gel at 120$0^{\circ}C$ for 50 minutes resulted in Al2O3-TiO2 nanocomposite powders where TiO2 particles of 101~102 nanometer were dispersed in the Al2O3 matrix. Both powders were sintered for 4 hours in the temperature range over 1500~1$650^{\circ}C$ with and without 5wt% MgO sintering aid. Among these sintered bodies, nanocomposite powder compacts sintered at 1$650^{\circ}C$ for 4 hours with 5wt% MgO showed the most dense structure with the grain size under 5${\mu}{\textrm}{m}$ and highest relative density of 98.2%.

• 한국세라믹학회지
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• 제46권3호
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• pp.288-294
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• 2009

The platelet AlO(OH) nano colloids were prepared by hydrothermal reaction of the $\gamma-Al_2O_3$ obtained with dehydration of $\gamma$-AlO(OH) and dilute $CH_3COOH$ solution. In hydrothermal reaction process, reversible reaction was accompanied between $\gamma-Al_2O_3$ and AlO(OH), and hydrothermal reaction temperature, hydrothermal reaction time and $CH_3COOH$ concentration had an effect on the crystal structure, surface chemical property, surface area, pore characteristics and crystal morphology of the AlO(OH) nano colloid particles. In this study, it was investigated to the hydrothermal reaction condition of the AlO(OH) nano colloid for using catalyst support, heat resisting agent, adsorbents, binder, polishing agent and coating agent. The crystal structure, surface area, pore volume and pore size of the platelet AlO(OH) nano colloids were investigated by XRD, TEM, TG/DTA, FT-IR and $N_2$ BET method in liquid nitrogen temperature.

• 한국세라믹학회지
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• 제33권11호
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• pp.1209-1216
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• 1996

MoSi2-Al2O3 composites were prepared by thermal explosion mode of self-propagating high temperature syn-thesis (SHS) using element powders of MoO3 Mo Si and Al. The combustion products of MoSi2 which have 10, 20, 30 and 40 wt% Al2O3 showed the molten state in the range of Mo to MoO3 6:1-9.5:1, 2:1-8:1, 1:1-5:1, and 1:1-3:1 (molar ratio) respectively. The combustion products which made least seperation the molten phase from the slag phase were in Mo/MoO3=9, 5:1, 8:1, 5:1 and 3:1 (molar ratio) respectively. Particles size of MoSi2 and Al2O3 in the combustion product were decreased as the molar ratio of Mo to MoO3 increase. By XRD analysis only MoSi2 and $\alpha$-Al2O3 peaks were identified in the combusion products, In case of MoSi2 containing 20wt% Al2O3 5.1wt% Al existed into MoSi2 grains and 30.7wt% Si and 7.7wt% Mo existed into Al2O3 grains. The relative density of MoSi2 containing 10, 20, 30 and 40 wt% Al2O3 were 82.7, 85.2, and 81.9% respectively. The fracture strength of MoSi2-Al2O3 composites increased with increasing Al2O3 and that of MoSi2-20wt% Al2O3 composite was 195 MPa.

• 한국세라믹학회지
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• 제56권3호
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• pp.256-268
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• 2019

In this research, some mechanical properties of Al₂O₃-based composites containing nanoSiC and nanoMgO additives, including elasticity modulus, hardness, and fracture toughness, have been evaluated. Micron-sized Al₂O₃ powders containing 0.08 wt.% nanoMgO particles have been mixed with different volume fractions of nanoSiC particles (2.5 to 15 vol.%). Untreated samples have been sintered by using hot-press technique at temperatures of 1600 to 1750℃. The results show significant increases in the mechanical characteristics with increases in the sintering temperature and amount of nanoSiC particles, with the result that the elasticity modulus, hardness, and fracture toughness were obtained as 426 GPa, 21 GPa, and 4.5 MPa.m^1/2, respectively.

• 한국표면공학회지
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• 제22권2호
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• pp.78-87
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• 1989

Mechanism of formation of electroless composite coatings is similar to that of electrodeposited composite coating, but the amount of particles entraped in electroless coating is higher that the one of electrodeposited coatings. The methol of entrapment by the metal for SiC and Al2O3 particles is different from that for WC particles. In the former case the particles are gracually engulfed by the depositing metal, wheran with WC a metal envelope is rapidly fomed around each particles. This difference can be attributed to the difference in electrical resistivity of the particles. Inclusion density of SiC and Al2O3 particles during copeposition depend on the particle size, agitation condition, vabration conditions and electrolyte temperatures.

• 한국표면공학회지
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• 제25권2호
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• pp.73-81
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• 1992

The composite coating of suspended inert particles $\alpha$-Al2O3 and copper from acid sulphate bath was investigated at the Rotating Disk Electrode. Effects of rotation speeds of electrode, physical properties of electrolyte, the size and concentration of suspended particles on the codeposition ratio of Al2O3 and the enhancement of mass transfer of copper ions were examined. Particularly, new experimental method for the measurement of the codeposition ratio was suggested and also the characteristics of the composite coating layer were measured by Rutherford Backscattering Spectrometry. Mass transfer of suspended particles system were increased up to 40% more than those of without suspended particles system. Optimum conditions of current density, hydrodynamics of RDE, and particles concentration showing maximum codeposition ratio were appeared in our experimental ranges. It was shown that the suspended inert particles were codeposited mainly near the surface of the composite coating layer.

• 한국세라믹학회지
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• 제34권11호
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• pp.1187-1197
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• 1997

Dry gel composed of primary particles more homogeneous than starting boehmite powder was prepared by dispersing and gelling the boehmite powder. The transformation temperatures of boehmite powder, dry gel seeded with 0, 1, 3, 5 wt% $\alpha$-Al2O3, and ball milled gel were 1192$^{\circ}C$, 1184$^{\circ}C$, 1141$^{\circ}C$, 1119$^{\circ}C$, 1117$^{\circ}C$, and 1106$^{\circ}C$, respectively. Sintering behavior of dry gel without seed was similar to that of boehmite powder, but the sintered density of dry gel was improved as much as 10%~15% than boehmite powder. In the case of dry gel seeded with 5 wt% $\alpha$-Al2O3, sintering behavior was much improved. The relative density of the gel seeded with 5 wt% $\alpha$-Al2O3 was 96% when sintered at 140$0^{\circ}C$ for 1h. On the other hand, ball milling of the non-seeded sol for 48h resulted in the relative density of 97% when sintered at 130$0^{\circ}C$ for 1h. The size and amount of $\alpha$-Al2O3 particles added by ball milling were 0.107 ${\mu}{\textrm}{m}$ and 0.5 wt%.

• 한국세라믹학회지
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• 제31권3호
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• pp.337-345
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• 1994

The reaction-sintered alumina and zirconia-alumina ceramics having low firing shrinkage were prepared from the Al/Al2O3 or Al/ZrO2(Ca-PSZ) powder mixtures via the attrition milling. And in this milling process the effect of the characteristics of used powders was investigated. Attrition milling was much more effective in reducing the particle size of ceramic/metal mixed powders than ball milling. Powder mixtures of flake-type Al with coarse alumina was much more effectively comminuted by the attrition milling than the mixtures of globular-type Al with coarse alumina powders. And coarse alumina than fine alumina was much more beneficial in cutting and reducing the ductile Al particles. In the contrary to Al/Al2O3 powder mixtures, Al/ZrO2 powder mixtures was not effectively comminutd. But whether using the alumina ball media or attrition milled with Al2O3 powder rather than Al, the milling efficiency was much more increased.