• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.96-97
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• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

• 한국표면공학회지
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• 제30권4호
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• pp.272-280
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• 1997

The Thermal Barrier Coation(TBC) to improve the that barrier and wear resistant propenrty in high temperature ofthe aircraftength between the accumlation of the aircraft engine and the automobile engine has usually the two layer structure. One is a creamic top layer for heat insulation and the other is a metal bond layer to facilitate the bond strength between the top ceramic layer and the substrate. But, the coated layers should be peeled off because of the accumulation of the thermal stress by the differance of the thermal expantion coefficient between metal and ceramics in a hrat cyclic environment. In this study, the intermediate layer by plasm spray process was introduced to reduce the thermal stress. The powders of plasm spray coating were the Yttria Stabilized Zirconia (YSZ), the Magnesia Stabillized Zirconia(MSZ) and NiCrAlY. the intermediate layer was sprayed with the powders of the bond cast for the purpose of test were executed. The high temperature wear resistance tends to decreasnceee wear and thermal shock test were exeucuted. The high temperature were resistance of the YSZ TBC is better that of the MSZ TBC. The wearrsistance tends to decrease accoring to incresing the temperature between $400^{\circ}C$to $600^{\circ}C$. The thermal shock life of the 3 layer TBC with YSZ top casting was the most outstanding thermal shock rsisstasnce. This means that the intermediate layer should play an importnat roll to alleviate the diffrerence of the thermal expansion coef frcients between metallic layer and cermics layer.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1998년도 제14회 학술발표회 논문개요집
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• pp.24-24
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• 1998

반도체장비를 포함하는 초고진공장비의 園훌化가 급속히 그리고 절실히 요구되고 있는 것이 현실정이다. 當面해서 실현할 국산진공장비의 대상은 廣範圍하다. 즉, 각종 진공 pump ( (rotary, dry, diffusion, cryo, ion, turbo melecular pump), 진공 chamber, 진공 line, gate valve 를 위 시 한 진공 V머ve, flange, gasket, fl않d야lU, mainpulater 퉁 진공 部品이 다. 진공계 의 핵심 은 適切하고 優良한 진공재료의 선태파 사용이다. 진공장비는 사용자가 원하는 진공도를 원하 는 시간 동안 륨空度를 유지해 주어야 한다. 진공재료 선태의 기준사항은:(1) 기체의 透過성 (2) 薰했훌 (3) 혔體放出특성 - -outgassing과 degassing- (4) 機械的 량훌度 (5) 온도 의존성 (6) 化學톡성 (7) 加I성 및 鎔接 성 (8) 課電특성 (9) 磁氣특성 (10) 高速함子 및 放射線 특성 (11) 經濟성 및 調達생 둥이 다. 우량한 초고진공계재료는 풍부하게 개발되어 왔고, 또 新材料들이 개발되고 있다. 여기에서는 주로 초고진공 내지는 극고진공계의 構造材料, 機能材料, 部品材料 일반파 몇가지 신재료의 특 성에 관해서 記述한다. M Mild SteeHSAE, 1112, 1010, 1020, 1022, etc)., S Stainless SteeHAlSI, 304, 304L, 310, 316, 321, 347): 구조재료, chamber, fl하1ges A Aluminum과 Alloys (1060, 1100, 2014, 4032, 6(뻐1): 구조재료, chamber, flanges, gaskets A AI, Al 떠loy는 SS에 代替하는 역 할올 시 작하고 있다. C Copper, Copper Alloys(C11$\alpha$)0, C26800, C61400, Cl7200): 내장인자, gasket, cryopanel, tubing T Titanium, Ziriconium, Haf띠um 및 Alloys: 특히 Ti은 10n pump 용 getter material 이 외 에 U UHV,XHV용 chamber계로서 관심올 끌고 있다. N Nickel, Nickel Alloys (200, 204, 211, monel, nichrome): 부식 방지 , 전자장치 , 자기 장치 귀 금속(Ag, Au, Pt, Pd, Rh, Ir, Os, Ru): 보조부품, gasket, filament, coating, thermocouple, 접 합부위 T TiC, SiC, zrC, HfC, TaC 둥의 탄화물과, BN, TiN, AlN 동의 질화물, 붕화물이 둥장하고 었 다. 유리: Soda Lime, Borosilicate, Potash Soda Lead: View Port, Chamber envelope C Ceramics: AlZ03, BeO, MgO, zrOz, SiOz, MgOzSiOz, 3Alz032SiOz, Z$textsc{k}$hSiOz S상N4: e electrical, thermal insulators, crucibles, boats, single crystals, sepctr려 windows 저자는 최근 저자들이 발견한 Zr-Ti-Cu-Ni-Be amorphous alloys coated cham뾰r가 radiation p proof로 이용될 수 있는 사실을 점검하고 었다 .. Z.Y. Hua 들은 Cs3Sb를 새로운 photocathode 재료로 보고하고 있다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.221-221
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• 2006

The SMD type P-N junction diode with ceramic package for diode case were fabricated. It was made this diode with simple process from $Al_2O_3$ ceramic chip, solder preform, diode chip, coating reagent and conductive paste for chip terrmination. Its merit is small size, easy manufacture. fast cooling with ceramic case. The electric characteristics of the diode such as reverse recovery time, breakdown voltage, forward voltage, and leakage current were 5 28ns, 1322V, 1.08V, $0.45{\mu}A$.

• 한국표면공학회지
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• 제34권5호
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• pp.414-420
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• 2001

A 30-kV plasma immersion ion implantation setup (P $I^3$) has been equipped with a self-developed 6'-magnetron to perform hard coatings with enhanced adhesion by P $I^3$D(P $I^3$ assisted deposition) process. Using ICP source with immersed Ti antenna and reactive magnetron sputtering of Ti target in $N_2$/Ar ambient gas mixture, the TiN films were prepared on Si substrates at different pulse bias and ion-to-atom arrival ratio ( $J_{i}$ $J_{Me}$ ). Prior to TiN film formation the nitrogen implantation was performed followed by deposition of Ti buffer layer under A $r^{+}$ irradiation. Films grown at $J_{i}$ $J_{Me}$ =0.003 and $V_{pulse}$=-20kV showed columnar grain morphology and (200) preferred orientation while those prepared at $J_{i}$ $J_{Me}$ =0.08 and $V_{pulse}$=-5 kV had dense and eqiaxed structure with (111) and (220) main peaks. X-ray diffraction patterns revealed some amount of $Ti_{x}$ $N_{y}$ in the films. The maximum microhardness of $H_{v}$ =35 GN/ $M^2$ was at the pulse bias of -5 kV. The P $I^3$D technique was applied to enhance wear properties of commercial tools of HSS (SKH51) and WC-Co alloy (P30). The specimens were 25-kV PII nitrogen implanted to the dose 4.10$^{17}$ c $m^{-2}$ and then coated with 4-$\mu\textrm{m}$ TiN film on $Ti_{x}$ $N_{y}$ buffer layer. Wear resistance was compared by measuring weight loss under sliding test (6-mm $Al_2$ $O_3$ counter ball, 500-gf applied load). After 30000 cycles at 500 rpm the untreated P30 specimen lost 3.10$^{-4}$ g, and HSS specimens lost 9.10$^{-4}$ g after 40000 cycles while quite zero losses were demonstrated by TiN coated specimens.s.

• 한국재료학회지
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• 제21권7호
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• pp.384-390
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• 2011

Ti-6Al-4V ELI (Extra Low Interstitial) alloy has been widely used as an alternative to bone due to its excellent biocompatibility. However, it still has many problems, including a high elastic modulus and toxicity. Therefore, nontoxic biomaterials with a low elastic modulus should be developed. However, the fabrication of a uniform coating is challenging. Moreover, the coating layer on Ti and Ti alloy substrates can be peeled off after implantation. To overcome these problems, it is necessary to produce bulk Ti and Ti alloy with hydroxyapatite (HA) composites. In this study, Ti, Nb, and Zr powders, which are biocompatible elements, were milled in a mixing machine (24h) and by planetary mechanical ball milling (1h, 4h, and 6h), respectively. Ti-35%Nb-7%Zr and Ti-35%Nb-7%Zr-10%HA composites were fabricated by spark plasma sintering (SPS) at $1000^{\circ}C$ under 70MPa using mixed and milled powders. The effects of HA addition and milling time on the biocompatibility and physical and mechanical properties of the Ti-35%Nb-7%Zr-(10%HA) alloys have been investigated. $Ti_2O$, CaO, $CaTiO_3$, and $Ti_xP_y$ phases were formed by chemical reaction during sintering. Vickers hardness of the sintered composites increases with increased milling time and by the addition of HA. The biocompatibilty of the HA added Ti-Nb-Zr alloys was improved, but the sintering ability was decreased.

• 분석과학
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• 제6권2호
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• pp.225-229
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• 1993

알루미나 강화 지르코니아(10-30ATZ) 제조에 있어 지르코니아(TZ-2Y or TZ-0Y)와 알루미나(AKP-30) 분말 slurry에 2wt% 알루미나에 해당하는 알루미나졸을 첨가한 후 겔화시킴으로써 분말이 고르게 분산되어 있고, 동시에 알루미나겔이 분말의 표면을 코팅함으로써 응집이 일어나는 것을 막았다. 이렇게 제조된 ATZ는 $1450{\sim}1550^{\circ}C$ 이상에서 2시간 소결로 알루미나 grain이 $0.5{\mu}m$ 이하로 잘 분포되어 있는 좋은 미세구조와 이론 밀도의 99% 이상의 소결밀도를 보여 주었다. 또한 20ATZ 부근에서의 $K_{IC}$값은 ${\sim}8MPa{\cdot}m^{1/2}$으로 볼-밀링으로 얻는 $6MPa{\cdot}m^{1/2}$보다 높은 값을 보여주고 있다.

• 한국산림과학회지
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• 제86권2호
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• pp.186-199
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• 1997

화강편마암질(花崗片麻巖質) 삼림토양(森林土壤)은 우리나라 국토면적(國士面積)의 1/3에 해당(該當)한다. 이 논문은 우리나라 남부지역에 있는 전남 순천시 소재 화강편마암질(花崗片麻巖質) 삼림토양(森林土壤)의 풍화(風化) 과정(過程)과 1차광물(一次鑛物)이 2차광물(二次鑛物)인 점토광물(粘土鑛物)로 풍화변성(風化變成)하는 광정(過程)에 대하여 연구(硏究)하였다. 이 삼림토양(森林土壤)은 많은 양(量)의 푸오하(風化) 흑운모(黑雲母)와 같은 Ferromagnesian mineral을 함유하고 있으며 풍화(風化)가 잘된 토양(土壤)으로서 강산성(强酸性)이고 유기물(有機物)의 함량(含量)이 적으며 CEC 값이 낮다. 토양단면 Bt층에는 점토광물(粘土鑛物)의 함량(含量)이 C층 보다 배(倍)나 많고 O층은 토층(土層)이 엷고 분해된 식물유휴(植物遺休)가 적으며 다공성(多孔性)으로서 Granic fabric이고 Moder humus의 토양미세형태학적(土壤微細形態學的)인 특징(特徵)을 가지고 있다. E층의 Related distribution pattern은 Enaulic이며 많은 양(量)의 미사(微砂)를 함유(含有)하고 있으나 모래량은 Bt, C층에 비하여 매우 적은 것이 특징(特徵)이다. Bt, C층에서 토양미세형태학적(土壤微細形態學的)인 특징(特徵)으로 볼 수 있는 공극(空隙)에서 Multilaminated clay coating과 Infilling을 볼 수 있으며 토양(土壤)의 색(色)을 붉게 해주는 Ferriargillan이 흑운모(黑雲母)로부터 분리(分離)되어 형성(形成)된다. Bt층에서 점토(粘土)의 함량이 높은 것은 점토(粘土)가 운반 집적된 것은 물론 풍화(風化) 원위치(原位置)에서 강력(彈力)한 풍화작용(風化作用) 결과(結果)에서 비롯된 것이다. 편광현미경과 SEM으로 관찰한 바 토양생성과정(土壤生成過程)중 아주 특이한 것은 흑운모(黑雲母)로부터 산화철(酸化鐵)의 형성(形成)이며, Tubular halloysite의 형성(形成)과 두가지 형태의 흑운모(黑雲母) 풍화(風化)모델 (Wedge weathering과 Layer weathering)의 확인(確認)되었다. 흑운모(黑雲母) 풍화(風化)에서 2차광물(二次鑛物)인 산화철(酸化鐵)이 흑운모(黑雲母) 표면(表面)에 두껍게 입혀지는 것이 특징(特徵)이며 점토광물(粘土鑛物)의 TEM 관찰(觀察)로 밝혀진 바, synthetic hematite의 존재(存在)가 확인(確認)되었다. 점토(粘土)의 화확분석(化學分析)에서 많은 양의 Ca, Na의 유실(流失)을 확인(確認)할 수 있었으며 상당량(量)의 Fe와 Al 이온이 유리(遊離)되어 있음을 밝힐 수 있었다. 점토(粘土)의 XRD에 의하여 운모(雲母)가 Kaolinite, Vermiculite-kaolinite intergrade, Hematite, Gibbsite 등 점토광물(粘土鑛物)로 변성됨을 확인(確認)할 수 있었으며 한편 Halloysite는 다른 1차광물(一次鑛物)에서 풍화형성(風化形成)된다는 것을 알 수 있었다. 또 풍화(風化)가 되지 않은 약간의 Dioctahedral mica의 존재(存在)를 확인(確認)할 수 있었다. 모암(母岩)에 상당량(相當量)의 흑운모(黑雲母)를 함유(含有)하고 있으며 이 화강편마암질(花崗片麻巖質) 삼림토양(森林土壤)은 흑운모(黑雲母)의 풍화(風化)에 대한 특징(特徵)을 보여 주고 있다.

• 한국전기전자재료학회논문지
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• 제36권6호
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• pp.638-646
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• 2023

Recently, active research has been conducted to enhance the power characteristics and thermal stability of lithium-ion batteries (LiBs) by modifying separators using a ceramic coating method. However, since the thermal properties and surface features of the separator vary depending on the characteristics of the ceramic powders applied to the separator, it is crucial to manufacture ceramic powders optimized for the separator's performance. In this study, we evaluated the characteristics of three types of α-alumina (A-1, A-2, and A-3) produced with varying dispersant contents and milling times, in addition to commercial α-alumina (AES-11). Subsequently, the optimized powders (A-3) were coated onto the separator using an aqueous binder for comparison with the characteristics of an AES-11 coated separator and an uncoated PE separator. The A-3 coated separator improved electrolyte wettability with a low contact angle (44.69°) and increased puncture strength (538 gf). Furthermore, it exhibited excellent thermal stability, with a shrinkage value of 5.64% when exposed to 140℃ for 1 hour, compared to the AES11 coated separator (6.09%) and the bare PE separator (69.64%).