• Title/Summary/Keyword: $Al-SiC_p$

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High-Voltage GaN Schottky Barrier Diode on Si Substrate Using Thermal Oxidation (열 산화공정을 이용하여 제작된 고전압 GaN 쇼트키 장벽 다이오드)

  • Ha, Min-Woo;Roh, Cheong-Hyun;Choi, Hong-Goo;Song, Hong-Joo;Lee, Jun-Ho;Kim, Young-Shil;Han, Min-Koo;Hahn, Cheol-Koo
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1418-1419
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    • 2011
  • 차세대 전력 반도체인 고전압 GaN 쇼트키 장벽 다이오드의 역방향 특성을 개선하기 위해서 열 산화공정이 제안되었다. AlGaN/GaN 에피탁시 위에 쇼트키 장벽 다이오드 구조가 제작되었으며, 쇼트키 컨택은 증착 후 $450^{\circ}C$에서 산화되었다. 열 산화공정이 메사 측벽의 AlGaN 및 GaN 표면에 $AlO_x$$GaO_x$를 형성하여 표면으로 흐르는 누설전류를 억제한다. 표면 및 GaN 버퍼를 통한 누설전류는 열 산화 공정 이후 100 ${\mu}m$-너비당 51.3 nA에서 24.9 pA로 1/2000 배 수준으로 감소하였다. 표면 산화물 형성으로 인하여 생성된 Ga-vacancy와 Al-vacancy는 acceptor로 동작하여 surface band bending을 증가시켜 쇼트키 장벽 높이를 증가시킨다. 애노드-캐소드 간격이 5 ${\mu}m$인 제작된 소자는 0.99 eV의 높은 쇼트키 장벽 높이를 획득하여, -100 V에서 0.002 A/$cm^2$의 낮은 누설전류를 확보하였다. 애노드-캐소드 간격이 5에서 10, 20, 50 ${\mu}m$로 증가되면 소자의 항복전압은 348 V에서 396, 606, 941 V로 증가되었다. 열 산화공정은 전력용 GaN 전자소자의 누설전류감소와 항복전압 증가를 위한 후처리 공정으로 적합하다.

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Synthesis of Zeolite P1 and Analcime from Sewage Sludge Incinerator Fly Ash (하수슬러지 소각 비산재를 이용한 제올라이트 P1 및 Analcime의 합성)

  • Lee, Je-Seung;Chung, Sook-Nye;Park, Chul-Hwi
    • Journal of Korean Society of Environmental Engineers
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    • v.30 no.6
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    • pp.659-665
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    • 2008
  • This study is about zeolite synthesis from the sewage sludge incinerator fly ash of "S" sewage treatment center located in Seoul. For this purpose, the properties of raw fly ash as starting material, the hydrothermal conditions for zeolite synthesis and the environmental applicabilities of synthesized zeolites were examined. Fly ash from sewage sludge incinerator has large quantities of SiO$_2$ and Al$_2$O$_3$ and their contents are 42.8 wt.% and 21.2 wt.% respectively. So fly ash is considered to be possible starting material for zeolite synthesis. The results from leaching test of fly ash showed that the concentration of hazardous metals were very low as compared with the Korea leaching standard of the Waste Management Law. But the concentration from total recoverable test of fly ash were higher than the fertilizer standard of Fertilizer Management Law. Major zeolite products synthesized by hydrothermal reaction are analcime in teflon vessel and zeolite P1 in borosilicate flask. Optimum conditions for the synthesis of analcime were 1 N of NaOH concentration, 16 hour of reaction time and 135$^{\circ}C$ of reaction temperature. For the zeolite P1 formation, the proper conditions were demonstrated to be 5 N of NaOH concentration, 16 hour reaction time and 130$^{\circ}C$ of reaction temperature in this study. Hazardous metal contents in the analcime product are similar with those in raw fly ash. In case of the zeolite P1, the contents are reduced to nearly a half. Raw fly ash and the analcime product showed NH$_4{^+}$ ion exchange capacity of 0$\sim$1.0 mg of NH$_4{^+}$g$^{-1}$ and 3.0$\sim$7.4 mg of NH$_4{^+}$g$^{-1}$, respectively. However, the zeolite P1 product reached exchange capacity to 14.6$\sim$17.8 mg of NH$_4{^+}$g$^{-1}$. This values are in the range of those of natural clinoptilolite and phillipsite. From this point of view, zeolite synthesis from sewage treatment sludge incinerator fly ash is a good alternative for solid waste recycling.

인체친화적 $CuInS_2$-ZnS 코어-쉘 나노입자가를 포함한 Poly(methylmethacrylate) 박막을 사용하여 제작한 비휘발성 메모리 소자에 대한 전기적 안정성

  • Yun, Dong-Yeol;Kim, Tae-Hwan;Kim, Seong-U;Kim, Sang-Uk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.336-336
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    • 2012
  • 유기물/무기물 하이브리드 나노 복합체를 사용하여 제작한 비휘발성 유기 메모리 소자는 공정의 간편성과 휘어짐이 가능한 장점을 가지고 있어 많은 연구가 활발히 진행되고 있으나 대부분의 좋은 전기적 성능을 갖는 소자에 포함되는 나노 입자는 독성을 가지거나 가격이 비싸다는 단점을 갖고 있다. 인체진화적이며 가격이 저렴한 나노입자를 이용한 비휘발성 메모리 소자에 대한 전기적 성능의 안정성에 대한 연구는 미미한 상황이다. 이에 본 연구에서는 인체친화적 $CuInS_2(CIS)$-ZnS 코어-쉘 나노 입자가 분산되어 있는 poly (methylmethacrylate) (PMMA) 박막을 사용하여 비휘발성 메모리 소자를 제작하여 전기적 성능과 안정성에 대한 연구를 하였다. 인체친화적 CIS-ZnS 나노입자를 포함한 PMMA 용액을 Al 하부전극을 가진 p-Si (100) 기판 위에 스핀코팅 방법으로 균일하게 도포 하였다. 남아 있는 용매를 완전히 제거하기 위해 열을 가해 CIS-ZnS 나노입자가 분산되어 있는 PMMA 나노 복합체를 형성하였다. CIS-ZnS 나노입자를 포함한 PMMA 박막 위에 금속 마스크를 사용하여 Al 상부전극을 열 증착 방법으로 형성하여 비휘발성 메모리 소자를 완성하였다. 정전용량-전압 (C-V) 측정을 하여 평탄 전압 이동을 관찰하였고, CIS-ZnS 나노입자의 역할을 알아보기 위해 나노입자가 없는 PMMA 박막을 갖는 소자를 제작하여 동일한 조건에서 C-V 측정을 하였다. 소자의 안정성을 알아보기 위해 평탄 전압-유지 시간 (Vth-t) 측정을 수행하였다. Vth-t 측정은 CIS-ZnS 나노입자가 전하 포획 장소로 사용할 수 있는 것과 전기적 안정성을 갖고 있는 것을 확인하였다. C-V와 Vth-t 측정결과 및 에너지 대역도를 사용하여 CIS-ZnS 나노입자가 분산되어 있는 PMMA 박막을 포함한 나노 복합체를 사용하여 제작한 이용한 비휘발성 메모리 소자에서 전하수송 메커니즘을 설명하였다.

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Gas sensing properties of CuO nanowalls synthesized via oxidation of Cu foil in aqueous NH4OH (NH4OH 수용액 하에서 Cu 호일의 산화를 통해 합성한 CuO 나노벽의 가스센싱 특성)

  • ;;;Lee, Si-Hong;Lee, Sang-Uk;Lee, Jun-Hyeong;Kim, Jeong-Ju;Heo, Yeong-U
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.141-141
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    • 2018
  • Copper is one of the most abundant metals on earth. Its oxide (CuO) is an intrinsically p-type metal-oxide semiconductor with a bandgap ($E_g$) of 1.2-2.0 eV 1. Copper oxide nanomaterials are considered as promising materials for a wide range of applications e.g., lithium ion batteries, dye-sensitized solar cells, photocatalytic hydrogen production, photodetectors, and biogas sensors 2-7. Recently, high-density and uniform CuO nanostructures have been grown on Cu foils in alkaline solutions 3. In 2011, T. Soejima et al. proposed a facile process for the oxidation synthesis of CuO nanobelt arrays using $NH_3-H_2O_2$ aqueous solution 8. In 2017, G. Kaur et al. synthesized CuO nanostructures by treating Cu foils in $NH_4OH$ at room temperature for different treatment times 9. The surface treatment of Cu in alkaline aqueous solutions is a potential method for the mass fabrication of CuO nanostructures with high uniformity and density. It is interesting to compare the gas sensing properties among CuO nanomaterials synthesized by this approach and by others. Nevertheless, none of above studies investigated the gas sensing properties of as-synthesized CuO nanomaterials. In this study, CuO nanowalls versus nanoparticles were synthesized via the oxidation process of Cu foil in NH4OH solution at $50-70^{\circ}C$. The gas sensing properties of the as-prepared CuO nanoplates were examined with $C_2H_5OH$, $CH_3COCH_3$, and $NH_3$ at $200-360^{\circ}C$.

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Ni/Au Electroless Plating for Solder Bump Formation in Flip Chip (Flip Chip의 Solder Bump 형성을 위한 Ni/Au 무전해 도금 공정 연구)

  • Jo, Min-Gyo;O, Mu-Hyeong;Lee, Won-Hae;Park, Jong-Wan
    • Korean Journal of Materials Research
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    • v.6 no.7
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    • pp.700-708
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    • 1996
  • Electroless plating technique was utilized to flip chip bonding to improve surface mount characteristics. Each step of plating procedure was studied in terms pf pH, plating temperature and plating time. Al patterned 4 inch Si wafers were used as substrstes and zincate was used as an activation solution. Heat treatment was carried out for all the specimens in the temperature range from room temperature to $400^{\circ}C$ for $30^{\circ}C$ minutes in a vacuum furnace. Homogeneous distribution of Zn particles of size was obtained by the zincate treatment with pH 13 ~ 13.5, solution concentration of 15 ~ 25% at room temperature. The plating rates for both Ni-P and Au electroless plating steps increased with increasing the plating temperature and pH. The main crystallization planes of the plated Au were found to be (111) a pH 7 and (200) and (111) at pH 9 independent of the annealing temperature.

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Surface Properties of Color Concrete Using Acid Stained Agent (표면 착색용 산화제를 사용한 컬러 콘크리트의 표면 특성)

  • Kim, Jin-Man;Jeong, Ji-Yong;Park, Hyo-Jin
    • Journal of the Korea Concrete Institute
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    • v.23 no.3
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    • pp.265-272
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    • 2011
  • Even though concrete is the most important material for building structures, its intrinsic gray color degrades urban esthetics. In order to improve this problem, coloring methods of mixing pigment in concrete batch and painting the surface of concrete surface have been tried. However, applications of the coloring methods in construction field are difficult due to high cost and low durability. Recently, acid stain agent is emerging as a new coloring method for concrete. It is able to apply a remarkably thin colored layer on a concrete surface from chemical reaction between acid and alkaline solutions. This study has examined the changes and variations of the surface layer of mortar specimen from chemical reaction of acid stained agents. The colors were changed into natural irregular stains according to aging. After the staining, no shape change was found from visible inspections. Microstructure of the colored surface applied with acid stained agent was much rougher than that of original mortar. When the colored layer was compared to original surface, crystals of hydrate such as $Ca(OH)_2$ and C-S-H gel were observed. Surface hardness was same or slightly higher in the colored layer. The value of pH was reduced by approximately 10%, weight contents of elements such as Ca, Si, and Al were low. In the chemical composition of the colored layer, the non-cement based elements of Mn, Cr, and Cu increased. Also, Fe and alkali elements of K and Na increased.

The Removal Efficiency of Microcystis spp. and Its Ecotoxicity Using Clay (황토의 Microcystis spp. 제거효율 및 생태독성평가)

  • Park, Hye-Jin;Kim, Sang-Hoon;Park, Woo-Sang;Lee, Jae-Yoon;Lee, Jae-An
    • Journal of Korean Society on Water Environment
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    • v.30 no.3
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    • pp.261-268
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    • 2014
  • Four clays (both natural and commercial types) mainly used in Korea were tested for removal efficiency of Microcystis spp. and ecotoxicity on Daphnia magna and Vibrio fischeri. Four clays (clay A~D) were composed of 91.9~100% of sand (0.02~0.2 mm in particle size). Clay D consisted of lager particles than other clays. Major elements of the four clays were $SiO_2$ (45.3~62.8%), $Al_2O_3$ (18.5~29.7%) and $Fe_2O_3$ (5.4~7.9%). They contained kaolinite (clay mineral), quartz, muscovite, and so on. Clay C and D contained montmorillonite, one of the clay minerals improving clay-cell aggregation. For clay A, B and C, removal efficiency of Microcystis spp. was over 60% at 2 g/L. It reached about 100% at over 5 g/L. For clay D, it was over 60% and 95~100% at 5 g/L and 20 g/L respectively. After adding clays, pH decreased. The greatest drop of pH appeared at clay C. Except for addition of 100 g/L clay C, ecotoxicity on D. magna and V. fischeri didn't appeared at all dose of clays.

Characterization and Distribution of Clay Minerals in Corn Field Soils in Korea

  • Jang, Jeonghun;Park, Nayun;Lee, Donghoon;Choi, Seyeong;Park, Junhong;Park, Man
    • Korean Journal of Soil Science and Fertilizer
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    • v.49 no.6
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    • pp.813-818
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    • 2016
  • Distribution of clay minerals separated from clay fraction of corn fields in Korea has been investigated along with their characterization. Crystalline phases of the clay minerals were identified by powder X-ray diffraction (XRD) pattern, and their relative chemical compositions were analyzed by X-ray fluorescence spectrometry (XRF). The soils were found to have pH 6.4, organic matter $37.2g\;kg^{-1}$, available $P_2O_5$ $599mg\;kg^{-1}$, respectively, and exchangeable K, Ca and Mg were 1.2, 7.3 and $1.8cmol_c\;kg^{-1}$, respectively. Major primary minerals consisted mainly of quartz and mica, and kaolinite and chlorite were identified as major secondary clay minerals. For most of soils, mica phase was identified to be muscovite rather than biotite. The average contents of $SiO_2$, $Al_2O_3$ and $Fe_2O_3$ were 43.7, 23.6 and 8.8%, respectively, although they were different with the locations.

Demonstration of Nonpolar Light Emitting Diodes on a-plane GaN Templates

  • Seo, Yong-Gon;Baek, Gwang-Hyeon;Yun, Hyeong-Do;O, Gyeong-Hwan;Hwang, Seong-Min
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.148-148
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    • 2011
  • 일반적으로 LED 제작에 사용되는 c-plane GaN는 c축 방향으로 발생하는 분극의 영향을 받게 된다. 분극은 LED내 양자우물의 밴드를 기울게 하여 그 결과 전자와 홀의 재결합 확률을 감소시켜 낮은 내부양자효율을 가지게 된다. 이러한 문제를 해결하기 위한 여러 가지 방법들이 제시되었는데 그 중에서도 특히 a-plane 혹은 m-plane면과 같은 무분극 면을 사용하는 GaN LED가 주목받고 있다. 그 이유는 무분극 면은 분극이 발생하는 c축과 수직이기 때문에 분극의 영향을 받지 않아 높은 내부 양자효율을 가질수 있다. 본 연구에서는 MOCVD 장비를 사용하여 2인치 r-plane 사파이어 기판위에 3um두께의 a-plane GaN을 성장하였다. 그위에 2um정도로 Si을 도핑하여 n-type GaN 형성한후 단일 양자우물, 그리고 Mg을 도핑하여 p-type GaN을 성장하였다. 장파장대역의 a-plane LED의 특성을 알아보기 위해서 양자우물 형성시 In의 조성비를 높였다. 일반적인 포토리소그래피 공정과 Dry etching 공정을 사용하여 메사구조를 형성하였으며 Ti/Al/Pt/Au와 Ni/Au를 각각 n-type과 p-type의 전극 물질로 사용하였다. 제작된 LED의 특성을 파악하기 위해서 인가전류를 0부터 100mA까지 출력 스펙트럼을 측정하였으며 orange대역의 파장을 갖는 LED를 얻었다. 인가전류별 Peak 파장의 변화와 반측폭의 변화를 파악하여 장파장 대역의 a-plane LED의 특성을 확인하였다.

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Hydrothermal Solution-Rhyolite Reaction and Origin of Sericitite in the Yukwang Mine (유문암-열수 반응과 유광 견운모 광상의 성인)

  • Park, Maeng-Eon;Choi, In-Sik;Kim, Jin-Sup
    • Economic and Environmental Geology
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    • v.25 no.3
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    • pp.225-232
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    • 1992
  • The hydrothermal alteration is evaluated using multicomponent equilibrium calculations with the program CHILLER for the reactions between hydrothermal water and rhyolite at the temperature of $300^{\circ}C$ and pressure of 500 bars. The chemical-reaction model on the depositional processes of the sericitite confirms that the hydrothermal water-rock interaction(hydrothermal alteration) is the main mechanism of the sericitite formation. The principal change in the aqueous phase during the reaction is the pH increase. Overall trends for the major species are the increase in total molalities of K, Ca, $SiO_2$, Al, Mg, Fe, Na, and sulfide in solid phase with hydrothermal water-rhyolite reaction and the decrease of them in aqeous solution by precipitation of hydrothermal products. Quartz and sericite are the first minerals to form. The sequence of minerals to precipitate following them is chlorite, epidote, pyrite and microcline as water/rock ratio decreases. Although calculated results cannot duplicate the complexities of natural hydrothermal alteration, the calculation provides thermodynamic constraints on the natural process. The calculation results resemble those of experimental studies. Sericitite forms where pH decreases and water/rock ratio increases.

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