• 제목/요약/키워드: $Al-SiC_p$

검색결과 426건 처리시간 0.02초

CST 승화법을 이용한 p-type 4H-SiC(0001) 에픽텍셜층 성장과 이를 이용한 MESFET 소자의 전기적 특성 (Epitaxial Layer Growth of p-type 4H-SiC(0001) by the CST Method and Electrical Properties of MESFET Devices with Epitaxially Grown Layers)

  • 이기섭;박치권;이원재;신병철
    • 한국전기전자재료학회논문지
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    • 제20권12호
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    • pp.1056-1061
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    • 2007
  • A sublimation epitaxial method, referred to as the Closed Space Technique (CST) was adopted to produce thick SiC epitaxial layers for power device applications. In this study, we aimed to systematically investigate surface morphologies and electrical properties of SiC epitaxial layers grown with varying a SiC/Al ratio in a SiC source powder during the sublimation growth using the CST method. The surface morphology was dramatically changed with varying the SiC/Al ratio. When the SiC/Al ratio of 90/1 was used, the step bunching was not observed in this magnification and the ratio of SiC/Al is an optimized range to grow of p-type SiC epitaxial layer. It was confirmed that the acceptor concentration of epitaxial layer was continuously decreased with increasing the SiC/Al ratio. 4H-SiC MESFETs haying a micron-gate length were fabricated using a lithography process and their current-voltage performances were characterized. It was confirmed that the increase of the negative voltage applied on the gate reduced the drain current, showing normal operation of FET device.

무가압 침투법에 의해 제조된 $Al-5Mg-X(Si,Cu,Ti)/SiC_p$ 복합재료의 조직 및 마멸특성 (Microstructure and Wear Property of $Al-5Mg-X(Si,Cu,Ti)/SiC_p$ Composites Fabricated by Pressureless Infiltration Method)

  • 우기도;김석원;안행근;정진호
    • 한국주조공학회지
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    • 제20권4호
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    • pp.254-259
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    • 2000
  • Metal matrix composites(MMCs) reinforced with hard particles have many potential application in aerospace structures, auto parts, semiconductor package, heat resistant panels, wear resistant materials and so on. In this work, the effect of SiC partioel sizes(50 and 100 ${\mu}m$) and additional elements such as Si, Cu and Ti on the microstructure and the wear property of $Al-5Mg-X(Si,Cu,Ti)/SiC_p$ composites produced by pressureless infiltration method have been investigated using optical microscopy, scanning eletron microcopy(SEM) with EDS(energy dispersive spectrometry), hardness test, X-ray diffractometer(XRD) and wear test. In present study, the sound $Al-5Mg-X(Si,Cu,Ti)/SiC_p$(50 and 100 ${\mu}m$) composites were fabricated by pressureless infiltration method. The $Al-5Mg-0.3Si-O.1Cu-O.1Ti/SiC_p$ composite with $50 {\mu}m$ size of SiC particle has higher hardness and better wear property than any other composite with $100{\mu}m$ size of SiC particle produced by pressureless infiltration method. The hardness and wear property of $Al-5Mg/SiC_p$(50 and 100 ${\mu}m$) composites were enhanced by the addition of Si, Cu and Ti in Al-5%Mg matrix alloy.

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플라즈마 용사에 의한 Al-SiCp 복합재료 코팅층의 제조 (Preparation of Al-SiCp Composite Coating by Plasma Thermal Spray)

  • 민준원;유승을;김영정;김정석;서동수
    • 한국세라믹학회지
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    • 제40권5호
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    • pp.460-467
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    • 2003
  • 기계적 합금화법에 의해 준비된 복합분말을 이용하여 용사공정에 의해 알루미늄 모재에 Al-SiC$_{p}$ 복합재료 코팅층을 형성하였다. 24h milling 후 복합화된 분말을 제조할 수 있었으며, 이 분말을 용사하여 복합재료 코팅층을 형성할 수 있었다. 코팅층의 두께 및 기공율과 공정변수와 관계를 분석하였으며, 경도의 증가를 확인하였다. 또한 TEM분석에 의해 Al-Si-C-O 화합물의 존재를 확인하였다.

The Thermal Stability and Elevated Temperature Mechanical Properties of Spray-Deposited $SiC_P$/Al-11.7Fe-1.3V-1.7Si Composite

  • Hao, L.;He, Y.Q.;Wang, Na;Chen, Z.H.;Chen, Z.G.;Yan, H.G.;Xu, Z.K.
    • Advanced Composite Materials
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    • 제18권4호
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    • pp.351-364
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    • 2009
  • The thermal stability and elevated temperature mechanical properties of $SiC_P$/Al-11.7Fe-1.3V-1.7Si (Al-11.7Fe-1.3V-1.7Si reinforced with SiC particulates) composites sheets prepared by spray deposition (SD) $\rightarrow$ hot pressing $\rightarrow$ rolling process were investigated. The experimental results showed that the composite possessed high ${\sigma}_b$ (elevated temperature tensile strength), for instance, ${\sigma}_b$ was 315.8 MPa, which was tested at $315^{\circ}C$, meanwhile the figure was 232.6 MPa tested at $400^{\circ}C$, and the elongations were 2.5% and 1.4%, respectively. Furthermore, the composite sheets exhibited excellent thermal stability: the hardness showed no significant decline after annealing at $550^{\circ}C$ for 200 h or at $600^{\circ}C$ for 10 h. The good elevated temperature mechanical properties and excellent thermal stability should mainly be attributed to the formation of spherical ${\alpha}-Al_{12}(Fe,\;V)_3Si$ dispersed phase particulates in the aluminum matrix. Furthermore, the addition of SiC particles into the alloy is another important factor, which the following properties are responsible for. The resultant Si of the reaction between Al matrix and SiC particles diffused into Al matrix can stabilize ${\alpha}-Al_{12}(Fe,\;V)_3Si$ dispersed phase; in addition, the interface (Si layer) improved the wettability of Al/$SiC_P$, hence, elevated the bonding between them. Furthermore, the fine $Al_4C_3$ phase also strengthened the matrix as a dispersion-strengthened phase. Meanwhile, load is transferred from Al matrix to SiC particles, which increased the cooling rate of the melt droplets and improved the solution strengthening and dispersion strengthening.

반응소결법으로 제조한 Iron Aluminide-Cu 및 Ni-P 피복 $SiC_p$ 예비성형체의 특성평가 (Characteristic Evaluation of Iron Aluminide-Cu and Ni-P Coated $SiC_p$ Preform Fabricated by Reactive Sintering Process)

  • 차재상;김성준;최답천
    • 한국주조공학회지
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    • 제22권1호
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    • pp.42-48
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    • 2002
  • Effects of coating treatment of metallic Cu, Ni-P film on $SiC_p$, for $SiC_p$/iron aluminide composites were studied. Porous hybrid preforms were fabricated by reactive sintering after mixing the coated $SiC_p$, Fe and Al powders. Then the final composites were manufactured by squeeze casting after pouring AC4C Al alloy melts in preforms. The change of reactive temperature, density, microstructure of the preforms and microstructure of the composites were investigated. The exprimental results were summarized as follows. The thickness of Cu and Ni-P metallic layer formed on $SiC_p$ by electroless plating method were about $0.5{\mu}m$ and coated uniformly. There was no remakable change in the ignition temperature with variation of the mixing ratio of Fe and Al powder while in the case of coated $SiC_p$ it was lower about $20^{\circ}C$ than in the non-coated $SiC_p$. The maximum reaction temperature increased with increasing Al contents, but decreased with increasing $SiC_p$ contents. Expansion ratio of preform after reactive sintering increased with amount of Cu coated $SiC_p$. In the case of Fe-70at.%Al, the expansion ratio was about 7% up to 8wt.% of $SiC_p$, addition but further addition of $SiC_p$, increased the ratio significantly. And in the case of Fe-50 and 60at.%Al, it was about 20% up to 16wt.% of $SiC_p$ addition and about 28% in 24wt.% of $SiC_p$, addition. The microstructures of compounds showed that the grains became finer as amount of $SiC_p$, and mixing ratio of iron powder increased and the shape of compounds was changed gradually from irregular to spheroidal.

과공정 Al-Si 합금의 마모 특성에 미치는 잔류응력의 영향에 관한 연구 (A Study on the Relationship between Residual Stress and Wear Peroperty in Hypereutectic Al-Si Alloys)

  • 김헌주;김창규
    • 한국주조공학회지
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    • 제20권2호
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    • pp.89-96
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    • 2000
  • The effects of modification processing on the refinement of primary Si and the wear behavior of hyper-eutectic Al-Si alloys have been mainly investigated. Refining effects of primary Si in Al-17%Si alloy was more efficient than that of B.390 alloy. Optimum condition of getting the finest primary Si microstructure was when AlCuP modifier is added into the melt at $750^{\circ}C$ and held it at $700^{\circ}C$ for 30 minutes. Wear loss in the specimens of as-cast condition decreases as the size of primary Si decreases, in the order of B.390 alloy, B.390 alloy with AlCuP addition, Al-17%Si alloy and Al-17%Si alloy with AlCuP addition. Wear loss in the aged condition of Al-17%Si alloy, B.390 alloy and B.390 alloy with AlCuP addition decreased due to the increase of compressive residual stress in the matrix by the aging treatment. While, wear loss increased in the aged specimens of Al-17%Si alloy with AlCuP addition and Hepworth addition in which compressive residual stress decreases by the aging treatment. Therefore, it is assumed that higher compressive residual stress in the matrix can reduce the wear loss in composite materials such as hyper-eutectic Al-Si alloys.

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Al 이온 주입된 p-type 4H-SiC에 형성된 Ni/Ti/Al Ohmic Contact의 전기적 특성 (Electrical Characteristics of Ni/Ti/Al Ohmic Contacts to Al-implanted p-type 4H-SiC)

  • 주성재;송재열;강인호;방욱;김상철;김남균
    • 한국전기전자재료학회논문지
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    • 제21권11호
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    • pp.968-972
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    • 2008
  • Ni/Ti/Al multilayer system ('/'denotes the deposition sequence) was tested for low-resistance ohmic contact formation to Al-implanted p-type 4H-SiC. Ni 30 nm / Ti 50 nm / Al 300 nm layers were sequentially deposited by e-beam evaporation on the 4H-SiC samples which were implanted with Al (norminal doping concentration = $4\times10^{19}cm^{-3}$) and then annealed at $1700^{\circ}C$ for dopant activation. Rapid thermal anneal (RTA) temperature for ohmic contact formation was varied in the range of $840\sim930^{\circ}C$. Specific contact resistances were extracted from the measured current vs. voltage (I-V) data of linear- and circular transfer length method (TLM) patterns. In constrast to Ni contact, Ni/Ti/Al contact shows perfectly linear I-V characteristics, and possesses much lower contact resistance of about $2\sim3\times10^{-4}\Omega{\cdot}cm^2$ even after low-temperature RTA at $840^{\circ}C$, which is about 2 orders of magnitude smaller than that of Ni contact. Therefore, it was shown that RTA temperature for ohmic contact formation can be lowered to at least $840^{\circ}C$ without significant compromise of contact resistance. X-ray diffraction (XRD) analysis indicated the existence of intermetallic compounds of Ni and Al as well as $NiSi_{1-x}$, but characteristic peaks of $Ti_{3}SiC_2$, a probable narrow-gap interfacial alloy responsible for low-resistance Ti/Al ohmic contact formation, were not detected. Therefore, Al in-diffusion into SiC surface region is considered to be the dominant mechanism of improvement in conduction behavior of Ni/Ti/Al contact.

Thermostability of Monolithic and Reinforced Al-Fe-V-Si Materials

  • He, Yiqiang;Qiao, Bin;Wang, Na;Yang, Jianming;Xu, Zhengkun;Chen, Zhenhua;Chen, Zhigang
    • Advanced Composite Materials
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    • 제18권4호
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    • pp.339-350
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    • 2009
  • Al-Fe-V-Si alloys reinforced with SiC particles were prepared by multi-layer spray deposition technique. Both microstructures and mechanical properties including hardness and tensile properties development during hot exposure process of Al-8.5Fe-1.3V-1.7Si, Al-8.5Fe-1.3V-1.7Si/15 vol% $SiC_P$ and Al-10.0Fe-1.3V-2Si/15 vol% $SiC_P$ were investigated. The experimental results showed that an amorphous interface of about 3 nm in thickness formed between SiC particles and the matrix. SiC particles injected silicon into the matrix; thus an elevated silicon concentration was found around $\alpha-Al_{12}(Fe,\;V)_3Si$ dispersoids, which subsequently inhibited the coarsening and decomposition of $\alpha-Al_{12}(Fe,\;V)_3Si$ dispersoids and enhanced the thermostability of the alloy matrix. Moreover, the thermostability of microstructure and mechanical properties of Al-10.0Fe-1.3V-2Si/15 vol% $SiC_P$ are of higher quality than those of Al-8.5Fe-1.3V-1.7Si/15 vol% $SiC_P$.

플라즈마 용사에 의해 제조한 $Al-SiC_{p}$ 복합재료 코팅층의 고온마찰특성 (High Temperature Friction Characteristic of $Al-SiC_{p}$ Composite Coating Prepared by Plasma Thermal Spray)

  • 민준원;유승을;서동수
    • Tribology and Lubricants
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    • 제19권5호
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    • pp.274-279
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    • 2003
  • $Al-SiC_{p}$ composite layer was prepared by plasma thermal spray on aluminum substrate. The homogeneously dispersed composite powder for thermal spray was fabricated by mechanical alloying with ball mill. The friction tests of the composite layers and commercial aluminum alloys for comparison were performed in the temperature range of 20∼$260^{\circ}C$ with the interval of $40^{\circ}C$ with steel counter-face. Friction coefficient was recorded during test sequence, and the microstructure of surface and debris was investigated by optical and scanning electron microscope. Friction coefficients of composite and aluminum alloys at room temperature were similar except pure aluminum. As the temperature increase, friction coefficient was increased rapidly in AC4C, AC2A. But friction coefficient of $Al-SiC_{p}$ composite was not increased so much up to $220^{\circ}C$. Consequently, the reinforcement of $SiC_{p}$ into aluminum matrix increased the stability of friction coefficient as well as wear resistance.

다이캐스팅법에 의해 제조된 SiC 입자강화 알루미늄합금기 복합재료의 미세조직 및 인장특성 (Microstructure and Tensile Properties of $SiC_p$-reinforced Aluminum Alloy Composites Fabricated by Die Casting Method)

  • 이태원;이지환
    • 한국주조공학회지
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    • 제17권4호
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    • pp.385-392
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    • 1997
  • The main objective of this study is to investigate the microstructure and tensile strength of $SiC_p$/Al alloy composites fabricated by die casting method. Die casting was performed using the preheated mold at the pouring temperature range of $620{\sim}750^{\circ}C$ under the pressure of $1,039 kgf/cm^2$. The low speed and a following high injection speed were 0.4 and 2.1 m/s, respectively. The microstructure of $SiC_p$/Al alloy composites fabricated by die casting method was found to be finer than that of composites fabricated by gravity casting. Also, SiC particulates were homogeneously distributed in refined Al matrix due to rapid solidification. The tensile strength of $SiC_p$/Al alloy composites fabricated by die casting method was found to be varied with cast temperature. The maximun tensile strength of $SiC_p$(10 vol.% and 20 vol.%)/Al alloy composites showed 380 MPa at the cast temperature of $750^{\circ}C$ and 363 MPa at the cast temperature of $700^{\circ}C$, respectively.

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