• Title/Summary/Keyword: $Al-SiC_p$

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The characteristics of MIS BST thin film capacitor

  • Park, Chi-Sun;Kim, In-Ki
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.11 no.1
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    • pp.38-42
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    • 2001
  • Electric and dielectric(Ba,Sr)$TiO_3$[BST] thin films for emtal-Insulator-Semiconductor(MIS) capacitors have been studied. BST thin films wre deposted on p-Si(100) substrates bythe RF magnetron sputtering with tempratue range of 500~$600^{\circ}C$. The dielectric properties of MIS capacitors consisting of Al/BST/$SiO_2$/Si sandwich structure were evaluated ot redcue the leakage current density. The charge state densities of the MIS capacitors were determined by high frequency (1 MHz) C-V measurement. In order to reduce the leakage current in MIS capacitor, high quality $SiO_2$ layer was deposited on bare p-Si substrate. Depending on the oxygen pressure and substrate temperature both positive and negative polarities of effective oxide charge in the MIS capacitors were evaluated. It is considered that the density of electronic states, generated at the BST/$SiO_2$/p-Si interface due to the asymmetric structure within BST/$SiO_2$/Si structure, and the oxygen vacancy content has influence on the behavior of oxide charge.

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Characterization of Cast-Forging Process in Hypereutectic Al-15wt.%Si alloy

  • Kim, Eok-Soo;Lim, Kyung-Mook;Hong, Young-Myung;Han, Yoon-Sung;Lee, Kwang-Hak
    • Journal of Korea Foundry Society
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    • v.27 no.5
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    • pp.212-216
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    • 2007
  • 과공정 Al-15wt.%Si 합금의 주단조 공정의 적용을 위해 주조 예비성형체를 제작하는 과정에서 P와 Sr을 첨가하여 과공정 Al-Si 합금의 응고과정에서 발생하는 초정 Si과 공정 Si의 미세화 개량처리를 행하였다. 미세화 조직의 변화에 따른 기계적성질 및 단조성을 조사하였으며, 미세화제로 첨가된 0.075wt.% Sr과 0.1wt.% P의 첨가에서 가장 효과적인 미세한 조직을 얻을 수 있었고, 인장강도와 연신율은 이들 첨가원가의 증가에 따라 향상되는 결과를 보였으나 일정 이상의 첨가에서는 더 이상의 향상은 없었다. 단조성 평가를 위한 열간가공 재현실험에서는 $450^{\circ}C$에서 약60N/mm2의 하중이 필요함을 알 수 있었다. 열간단조 및 열처리 후의 인장강도와 연신율은 보다 많은 향상을 가져왔으며, 이는 압축가공에 의한 주조 예비성형체 내부에 잔존하던 주조결함의 제어와 열처리에 의한 조직의 개량 및 균질화 효과에 의한 것으로 판단된다.

Recycling of Ferro-manganese Furnace Dust Collected from Converter (페로망간 집진분(集塵粉)의 재활용(再活用)에 관한 연구(硏究))

  • Kim, Youn-Che;Song, Young-Jun;Park, Young-Koo
    • Resources Recycling
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    • v.21 no.3
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    • pp.21-27
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    • 2012
  • In order to make high-purity ferro-manganese from $Mn_3O_4$ dust, the application of aluminothermy process to the reduction of $Mn_3O_4$ dust was investigated in previous work. The result showed the fact that can be obtained high purity ferro-manganese which have over about 93% of manganese content and lower impurities such as C, P, S than those of KS D3712 specification. The addition of silicon powder instead of aluminum powder was investigated as reductant in the thermite reaction process of $Mn_3O_4$ dust in this work because its production cost is lower than that of aluminum powder. In case of addition of silicon powder only as reductant, the experimental result showed the unstable ignition and no thermite reaction of mixture, but in case of simultaneous addition of silicon and aluminum powders as reductant, showed the fact that can be obtained high purity ferro-manganese which have much low content of impurities such as C, P, S component.

A Study on the Mechanical Properties of Spray-cast Al 6061 Alloy with Variation of Mg/Si Content (분사주조한 Al 6061 합금의 Mg/Si 첨가량의 변화에 따른 기계적 특성 고찰)

  • Lee, Jae-Sung;Kim, Myung-Ho
    • Journal of Korea Foundry Society
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    • v.28 no.4
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    • pp.179-183
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    • 2008
  • Mechanical properties of the spray-cast Al 6061 alloy with variation of Mg/Si addition were investigated. After spray-cast, hot extrusion was performed at $460^{\circ}C$ then followed ageing treatment to the T6 condition. SEM, EDX, and XRD were used to characterize a ${\beta}(Mg_{2}Si)$ precipitate. The amount of ${\beta}$ precipitate was calculated from the XRD measurements. Hardness, ultimate tensile strength and elongation were tested then compared with those of the Al 6061 alloys made by ingot metallurgy (I/M) and powder metallurgy (P/M). The ultimate tensile strength and elongation of the spray-cast Al 6061 alloy were 318MPa and 16.5%, respectively. These properties were improved in the 2.2 wt%Mg and 1.3wt%Si addition up to 349MPa of UTS and 12.5% of elongation, mainly due to increased amount of a fine supersaturated ${\beta}(Mg_{2}Si)$ precipitate.

An inspection of stability for annealing SiOCH thin flim (SiOCH 박막의 열처리에 대한 안정성 검토)

  • Park, Yong-Heon;Kim, Min-Seok;Hwang, Chang-Su;Kim, Hong-Bae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.41-42
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    • 2008
  • p-type(100) Si 위에 BTMSM과 산소를 혼합한 전구체를 가지고 PECVD 방법을 사용 하여 저유전상수를 갖는 SiOCH막을 형성하였다. 알루미늄 전극을 구현한 MIS (Al/SiOCH/p-si(100)) 구조의 커패시터를 가지고 C-V 특성을 측정하여 유전상수를 계산하였다. 상온에서 증착된 SiOCH 박막의 유전상수는 $450^{\circ}C$에서 30분 동안 열처리 후 뚜렷하게 감소하는 경향을 나타냈으며, 상온 및 대기압에서 공기 중에 노출시켜 자연 산화과정을 겪은 후에 각각의 유전상수는 전체적으로 증가하였지만, 열처리한 박막이 상대적으로 경시효과(aging effects)에 대하여 안정화된 것을 확인하였다.

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Effect of Aluminum and Silicon on Atmospheric Corrosion of Low-alloying Steel under Containing NaHSO3 Wet/dry Environment

  • Chen Xinhua;Dong Junhua;Han Enhou;Ke Wei
    • Corrosion Science and Technology
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    • v.7 no.6
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    • pp.315-318
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    • 2008
  • The atmospheric corrosion performance of Al-alloying, Si-alloying and Al-Si-alloying steel were studied by wet/dry cyclic corrosion tests (CCT) at $30^{\circ}C$ and 60% relative humidity (RH). The corrosion electrolyte used for CCT was 0.052 wt% $NaHSO_{3}$ (pH~4) solution. The result of gravimetry demonstrated that Al-Si-bearing steels showed lower corrosion resistance than other rusted steels. But the rusted 0.7%Si-alloying steel showed a better corrosion resistance than rusted mild steel. Polarization curves demonstrated that Al-/Si-alloying and Al-Si-alloying improved the rest potential of steel at the initial stage; and accelerated the cathodic reduction and anodic dissolution after a rust layer formed on the surfaces of steels. XRD results showed that Al-Si-alloying decreased the volume fraction of $Fe_{3}O_{4}$ and $\alpha-FeOOH$. The recycle of acid accelerated the corrosion of steel at the initial stage. After the rust layer formed on the steel, the leak of rust destabilized the rust layer due to the dissolution of compound containing Al (such as $FeAl_{2}O_{4}$, $(Fe,\;Si)_{2}(Fe,\;Al)O_{4}$). Al-Si-alloying is hence not suitable for improving the anti-corrosion resistance of steel in industrial atmosphere.

Growth and Electrical Characteristics of Ultrathin $SiO_2$ Film Formed in an Electron Cyclotron Resonance Oxygen Plasma (ECR 산소 플라즈마에 의한 $SiO_2$ 박막의 성장 거동 및 전기적 특성)

  • 안성덕;이원종
    • Journal of the Korean Ceramic Society
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    • v.32 no.3
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    • pp.371-377
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    • 1995
  • Silicon oxide films were grown on single-crystal silicon substrates at low temperatures (25~205$^{\circ}C$) in a low pressure electron cyclotron resonance (ECR) oxygen plasma. The growth rate of the silicon oxide film increased as the temperature increased or the pressure decreased. Also, the thickness of the silicon oxide film increased at negative bias voltage, but not changed at positive bias voltage. The growth law of the silicon oxide film was approximated to the parabolic form. Capacitance-voltage (C-V) and current density-electric field (J-E) characteristics were studied using Al/SiO2/p-Si MOS structures. For a 10.2 nm thick silicon oxide film, the leakage current density at the electric field of 1 MVcm-1 was less than 1.0$\times$10-8Acm-2 and the breakdown field was higher than 10 MVcm-1. The flat band voltage of Al/SiO2/p-Si MOS capacitor was varied in the range of -2~-3 V and the effective dielectric constant was 3.85. These results indicate that high quality oxide films with properties that are similar to those of thermal oxide film can be fastly grown at low temperature using the ECR oxygen plasma.

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Electromigration Characteristics in PSG/SiO$_2$ Passivated Al-l%Si Thin Film Interconnections

  • Kim, Jin-Young
    • Journal of Korean Vacuum Science & Technology
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    • v.7 no.2
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    • pp.39-44
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    • 2003
  • Recent ULSI and multilevel structure trends in microelectronic devices minimize the line width down to a quarter micron and below, which results in the high current densities in thin film interconnections. Under high current densities, an EM(electromigration) induced failure becomes one of the critical problems in a microelectronic device. This study is to improve thin film interconnection materials by investigating the EM characteristics in PSG(phosphosilicate glass)/SiO$_2$ passivated Al-l%Si thin film interconnections. Straight line patterns, wide and narrow link type patterns, and meander type patterns, etc. were fabricated by a standard photholithography process. The main results are as follows. The current crowding effects result in the decrease of the lifetime in thin film interconnections. The electric field effects accelerate the decrease of lifetime in the double-layered thin film interconnections. The lifetime of interconnections also depends upon the current conditions of P.D.C.(pulsed direct current) frequencies applied at the same duty factor.

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Microstructure and Mechanical Properties of P Added 0.15C-1.5Mn-1.5Al TRIP Aided Cold Rolled Steel (P 첨가 0.15C-1.5Mn-1.5Al TRIP형 냉연강판의 미세조직과 기계적 성질)

  • Ahn M. W.;Cho K. M.;Suh D. W.;Oh C. S.;Kim S. J.
    • Transactions of Materials Processing
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    • v.14 no.8 s.80
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    • pp.712-717
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    • 2005
  • Microstructure and mechanical properties are investigated for 0.15C-1.5Mn-1.5Al TRIP aided cold rolled steels containing $0.05wt\%P$ and $0.1wt\%P$. Despite of the complete replacement of Si by Al, the TRIP steel shows tensile strength of 700MPa and total elongation of $35\%$ by addition of $0.1wt\%$ P. Tensile strength of P added TRIP steels is not only affected by the solid solution hardening but also the volume fraction of retained austenite. As P content increases from $0.05wt\%$ to $0.1wt\%$, tensile strength and volume fraction of retained austenite are increased, but elongation is decreased. The lower stability of austenite in $0.1wt\%$ P added steel is responsible for the decrease of the elongation.

Effects of Processing Parameters on the Mechanical Properties of Aluminium Matrix Composites (알루미늄 기지 금속복합재료의 기계적 성질에 미치는 제조변수의 영향)

  • Kim, J.D.;Koh, S.W.;Kim, H.J.
    • Journal of Power System Engineering
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    • v.9 no.4
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    • pp.130-136
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    • 2005
  • The effects of additional Mg content, the size and volume fraction of reinforcement phase on the mechanical properties of ceramic particle reinforced aluminium matrix composites fabricated by pressureless metal infiltration process were investigated. The hardness of $SiC_p/AC8A$ composites increased gradually with an increase in the additive Mg content, while the bending strength of $SiC_p/AC8A$ composites increased with an increase in additive Mg content up to 5%. However, this decreased when the level of additive Mg content was greater than 5% due to the formation of coarse precipitates by excessive Mg reaction and an increase in the porosity level. The hardness and strength of the composites increased with decreasing the size of SiC particle. It was found that the composites with smaller particles enhanced the interfacial bonding than those with bigger particles from fractography of the composites. The hardness of $Al_2O_{3p}/AC8A$ composites increased gradually with an increase in the volume fraction, however, the bending strength of $Al_2O_{3p}/AC8A$ composites decreased when the volume fraction of alumina particle was greater than 40% owing to the high porosity level.

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