• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.168-168
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• 2008

Dimension of a transistor has rapidly shrunk to increase the speed of device and to reduce the power consumption. However, it is accompanied with several problems like direct tunneling through the gate dioxide layer and low conductivity characteristic of poly-Si gate in nano-region. To cover these faults, study of new materials is urgently needed. Recently, high dielectric materials like $Al_2O_3$, $ZrO_2$, and $HfO_2$ are being studied for equivalent oxide thickness (EOT). However, poly-Si gate is not compatible with high-k materials for gate-insulator. Poly Si gate with high-k material has some problems such as gate depletion and dopant penetration problems. Therefore, new gate structure or materials that are compatible with high-k materials are also needed. TiN for metal/high-k gate stack is conductive enough to allow a good electrical connection and compatible with high-k materials. According to this trend, the study on dry etching of TiN for metal/high-k gate stack is needed. In this study, the investigations of the TiN etching characteristics were carried out using the inductively coupled $BCl_3$-based plasma system and adding $Cl_2$ gas. Dry etching of the TiN was studied by varying the etching parameters including $BCl_3$/Ar gas mixing ratio, RF power, DC-bias voltage to substrate, and $Cl_2$ gas addition. The plasmas were characterized by optical emission spectroscopy analysis. Scanning electron microscopy was used to investigate the etching profile.

• 한국재료학회지
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• 제3권6호
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• pp.624-631
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• 1993

Alumimium Titanate-Mullite 복합체는 $Al_{2}O_{3}$분말 알콜용액에서 $Si(OC_{2}H_{5})_{4}$와 $Ti(OC_{2}H_{5})_4$ 의 단계적인 가수분해로 합성하였다. Sol-Gel 방법으로 합성된 모든 분말은 비정질과 단분산이고 좁은 분말크기의 분포를 보였다. 소결체($1600 ^{\circ}C$/2h)는 임계분해온도인 $1100^{\circ}C$에서 100시간 동안과 750와 $1400^{\circ}C$ 100시간동안 반복적인 열적 내구성 및 열충격 시험을 수행하였다. 가장 좋은 열적 내구성은 aluminium titanate함유량이 70rhk 80vol%일때 얻어졌으며, 이들은 위 실험을 한후 아주 적은 미세구조와 열팽창 곡선의 변화를 나타내었다. 소결체 미세구조의 붕괴는 주사현미경, X-선회절분석과 Dil-atometer로 연구하였다. 위 연구는 이와같은 과정에 의하여 합성된 aluminium titanate-mullite복합체의 서비스 수명을 예상하기 위하여 시도되었다.

• Applied Science and Convergence Technology
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• 제23권6호
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• pp.317-327
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• 2014

In order to develop nano-devices with much lower power consumption for beyond-CMOS applications, the fundamental understanding and precise control of the electronic properties of ultrathin transition metal oxide (TMO) films are strongly required. The metal-insulator transition (MIT) is not only an important issue in solid state physics, but also a useful phenomenon for device applications like switching or memory devices. For potential use in such application, the electronic structures of MIT, observed for TMO nano-structures, have been investigated using a synchrotron radiation angle-resolved photoelectron spectroscopy system combined with a laser molecular beam epitaxy chamber and a scanning photoelectron microscopy system with 70 nm spatial resolution. In this review article, electronic structures revealed by soft X-ray nano-spectroscopy are presented for i) polarity-dependent MIT and thickness-dependent MIT of TMO ultrathin films of $LaAlO_3/SrTiO_3$ and $SrVO_3/SrTiO_3$, respectively, and ii) electric field-induced MIT of TMO nano-structures showing resistance switching behaviors due to interfacial redox reactions and/or filamentary path formation. These electronic structures have been successfully correlated with the electrical properties of nano-structured films and nano-devices.

• 한국응용과학기술학회지
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• 제17권2호
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• pp.67-75
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• 2000

Cosmetic industries have recently developed sun-block products, which are composed of W/O or O/W emulsion system. It was very difficult for waterproofing product to show the stability in W/O emulsion with $TiO_{2}$. To enhance the stability of W/O emulsion, it needs to be combined with the water and oil soluble components as the gelling agents. The emulsifiers used in W/O were 3.0% of cetyl dimethicone copolyol, 2.0% of sorbitan sesquioleate as the basic emulsifiers, and 0.6% of quaternium-18 bentonite and 1.5% of dextrin palmitate as stabilizer were used. The content of titanium dioxide was optimized up to 8.0%. Titanium dioxide was used as the UV scattering powder coated with $Al_{2}O_{3}$(UV-sperse T40/TN). The sunscreen cream prepared with W/O emulsion system by using QB and DP showed higher stability than that of W/O emulsion system by using each QB and DP. W/O emulsion from Formula 3 for passing one year was very durable more than F1 and F2. Within W/O emulsion by observing F1, F2 and F3 for one year, F3 was more excellent than F2 and F3 when they were observed at RT, $4^{\circ}C$, $40^{\circ}C$, because F3 used the mixed QB and DP in W/O emulsion. The zeta potential for F1, F2, and F3 after one year were 21, 30 and 43, respectively. From these result F3 was found best stable emulsion. The in-vitro SPF value for F3 was 35 for the initial product at room temperature and also, the in-vitro SPF values of F3 was 32 for after one year. Finally, the mean in-vivo SPF value of 10 volunteers for F3 was 27.3 by the Korea cosmetic association made the rules of SPF.

• 한국해양학회지:바다
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• 제14권2호
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• pp.69-79
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• 2009

동해 울릉분지 퇴적물의 원소 함량 특성과 제4기 후기 동안의 퇴적물 기원 변화를 파악하기 위해 남.서쪽 사면을 포함한 울릉분지에서 총 3개의 주상시료를 채취하여 주요원소 및 미량원소를 분석하였다. 울릉분지 퇴적물을 황해와 남해 퇴적물과 비교하면 주요원소는 함량 범위가 유사하였으나 미량원소 함량의 경우 해역별로 큰 차이를 보였고, 조사지역인 울릉분지 내에서도 큰 차이를 보였다. 울릉분지 서쪽사면(WS) 퇴적물에서는 Mo의 함량이, 분지평원(Basin) 퇴적물에서는 Zr, Nb, Hf, 그리고 Ta의 함량이 다른 지역에 비해 상대적으로 높게 나타났으며, 남쪽사면(SS) 퇴적물에서는 Ca와 Cs의 함량이 높은 특징을 보였다. 분석된 원소들 중 생물기원이나 자생 및 속성기원의 영향을 받지 않은 것으로 판단되는 원소(K, Ti, Cs, Zr, Nb, Hf 및 Ta)들은 원소/Al 비율 크기와 수직적 변화를 기준으로 3가지 형태로 구분되었다. 첫 번째는 모든 주상시료에서 유사한 비율을 보이며 수직적인 변화가 크지 않은 원소(K, Ti), 두 번째는 서쪽사면(WS)과 남쪽사면(SS) 퇴적물에서 차이를 보이는 원소(Cs), 그리고 분지평원(Basin) 퇴적물에서 사면 퇴적물보다 상대적으로 높은 비를 보이는 원소(Zr, Nb, Hf, La)이다. 이들 분포형태별 원소들의 특성에 근거할 때 울릉분지의 분지평원(Basin) 퇴적물은 퇴적시기에 따라 기원이 변화된 것으로 해석될 수 있다. 분지평원(Basin) 퇴적물은 해수면이 상대적으로 낮은 약 $10,000{\sim}7,000\;yr$ BP 동안 서쪽사면(WS) 퇴적물과 화산재가 혼합된 특징을 보였으며, 7,000 yr BP 이후는 남쪽사면(SS) 퇴적물과 화산재가 혼합된 특징을 나타내었다. 이러한 결과는 기존에 연구된 대마난류의 동해 유입시기와 매우 유사한 결과로, 해수면 상승에 의한 울릉분지의 퇴적환경변화에 의한 것으로 해석된다.

• 한국방사성폐기물학회:학술대회논문집
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• 한국방사성폐기물학회 2004년도 학술논문집
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• pp.285-291
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• 2004

LiCl-$Li_2O-O_2$ 용융염계에서 용융염 취급장치의 구조재료를 위한 평가의 일환으로 Inconel 718, X-750, Haynes 75, 263 합금의 부식거동을 분위기온도; $650^{\circ}C$, 부식시간: 24~168h, $Li_2O$농도; 3wt%, 혼합가스농도; Ar-10%$O_2$에서 조사하였다. LiCl-$Li_2O-O_2$ 용융염계에서 부식속도는 Haynes 263 ＜ Haynes 75 ＜ Inconel X-750 ＜ Inconel 718 순서로 나타났으며, Haynes 263 합금이 가장 우수한 내부식성을 나타내었다. Haynes 75의 부식생성물은 $Cr_2O_4$, $NiFe_2O_4$, $LiNiO_2$, $Li_2NiFe_2O_4$, Inconel 718의 부식생성물은 $Cr_2O_4$ 및 $NiFe_2O_4$ 이며 Haynes 263은 $Li(Ni,Co)O_2$, $NiCr_2O_4$ 및 $LiTiO_2$, Inconel X-750은 $Cr_2O_3$, $NiFe_2O_4$,$FeNi_3$, (Al,Nb,Ti)$O_2$의 부식생성물을 나타내었다. Haynes 263은 국부부식의 거동을 보이는 반면, Haynes 75, Inconel 718 및 Inconel X-750은 전면 부식 거동을 나타내었다.

• Korean Chemical Engineering Research
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• 제51권3호
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• pp.394-402
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• 2013

티타늄화합물과 티타늄부톡사이드를 각각 디아민과 결합시켜 새로운 구조의 중합촉매를 개발하였으며, 이들은 부타디엔의 삼중고리화를 통한 싸이클로도데카트리엔(CDT)의 합성반응에 대해 높은 촉매활성을 나타내었다. CDT합성반응은 고압식 액상반응기를 사용한 배취형 반응계에서 수행하였으며, 반응온도, 촉매의 종류, 촉매량, Al/Ti의 몰비 및 고정화방법 등이 생성물 CDT의 생성수율에 미치는 영향을 관찰하였다. 디아민과 4염화티타늄을 1:1로 결합시킨 촉매는 생성물 CDT에 대하여 90% 이상의 높은 선택성을 보였다. 생성된 CDT 중의 TTT/TTC 입체이성체비는 티타늄에 결합된 디아민의 종류와 Ti/디아민의 비율 등에 따라 달라졌다. 이들 균일계 착체는 담체상에 고정화시켜 사용할 수 있었으며, 티타늄 주촉매는 반응 중 추출되지 않고 활성을 유지하면서 여러 번 사용이 가능하였다. 실리카 담체보다는 탄소담체를 사용하여 티타늄화합물을 고정한 촉매가 보다 높은 활성을 보였으며, 특히 아미노실란 만을 중합시켜 제조한 담체에 티타늄을 결합시키면 BD의 전환율도 높고 CDT에 대한 선택도도 높게 나타났다.

• 한국세라믹학회지
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• 제22권6호
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• pp.71-79
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• 1985

In order to fabricate the translucent electrooptic ceramics which are comparable to PLZT, $PNZT^*$ has been prepared from aqueous solutions of their itrate and chlorides. In the quarternary $Pb^{1-x} Nd_x(Zr_{0.63} Ti_{0.37})^{1-\frac{x}{4}O_3$, (PNZT) $(0.02\le x\ge 0.12)$ system cold-pressed PNZT slugs were sintered in $O_2$ in pt-crucible for 45 min. at 118$0^{\circ}C$ and were then heat-treated in air for 60 hrs. at 120$0^{\circ}C$ in Al2O3 crucibles containing $PbZrO_3$ powder to control the atmosphere. Mean particle size of calcined PNZT powders was 0.1~0.15${\mu}{\textrm}{m}$. It was found that the maximum value of optical transmission has been revealed at 6~8 at. % $Nd_2O_3$ added body and that their dielectric constant has been decreased as the frequency increased. Curic temperature has been varied inversely with $Nd^{3+}$ ion content up to 8 at. % and become constant above this value. $^*Pb_{1-x}Nd_x(Zr_{0.63} Ti_{0.37})_{1-2/4}O_3$

• 융복합기술연구소 논문집
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• 제1권2호
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• pp.29-32
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• 2011

In this paper, we will introduce the overview of new project dealing how to increase of refrigeration cycle COP using nano-fluids, CuO, TiO2, Al2O3, that are used on similar previous studies. Recently many studies were performed to show the effect of nano-fluids at refrigeration cycle. But, the reason was not cleared yet. In general, the flow phenomena at the evaporator were guessed to be mixed with the partial pool boiling condition and the flow boiling condition from the previous results not published yet. So, we hope that the COP increase of refrigeration cycle will be verified and showed through this project.

• 동력기계공학회지
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• 제2권3호
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• pp.49-54
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• 1998

This paper is investigated of hardness and adhesiveness of plasma sprayed coating steels by AE(Acoustic Emission) testing when loading a tensile. AE Parameters used are Event, Count, Energy and Amplitude. Test specimens are carbon steel(S45C) with sprayed coating layers of Ni-4.5wt.%Al(bond coating) and $TiO_2$(top coating), and carry out heat treatment at $800^{\circ}C\;and\;1000^{\circ}C$, respectively. The micro-hardness of the heat treatment specimen have been improved more than that of non-heat treatment. On the tensile test, the process and occurence of the exfoliation of the sprayed coating layer can be estimated by AE Characteristics of AE parameters, such as event, count, amplitude and energy, on the layer exfoliation are shown the similar aspects. The exfoliation of bond coating occure at about 20% of strain and top coating is about 5% of strain.