• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.421-424
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• 2004

As the deep sub-micron devices are recently integrated high package density, novel process method for sub $0.1{\mu}m$ devices is required to get the superior thin gate oxide characteristics and reliability. However, few have reported on the electrical quality and reliability on the thin gate oxide. In this paper I will recommand a novel shallow trench isolation structure for thin gate oxide $30{\AA}$ of deep sub-micron devices. Different from using normal LOCOS technology, novel shallow trench isolation have a unique 'inverse narrow channel effects' when the channel width of the devices is scaled down shallow trench isolation has less encroachment into the active device area. Based on the research, I could confirm the successful fabrication of shallow trench isolation(STI) structure by the SEM, in addition to thermally stable silicide process was achiever. I also obtained the decrease threshold voltage value of the channel edge and the contact resistance of $13.2[\Omega/cont.]$ at $0.3{\times}0.3{\mu}m^2$. The reliability was measured from dielectric breakdown time, shallow trench isolation structure had tile stable value of $25[%]{\sim}90[%]$ more than 55[sec].

• ETRI Journal
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• v.41 no.2
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• pp.167-175
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• 2019

A wideband dual-polarized antenna coupling cross resonator is proposed for LTE700/GSM850/GSM900 base stations. An additional resonance is introduced to obtain strong coupling between the dipole and resonator. Moreover, the input impedance of the proposed antenna is steadily close to $50{\Omega}$, which results in better impedance matching. Therefore, a wide bandwidth can be achieved with multiresonance. A prototype is fabricated to verify the proposed design. The measured results show that the antenna has a fractional bandwidth of 35.7% from 690 MHz to 990 MHz for ${\mid}S_{11}{\mid}$ < -15 dB. Stable radiation patterns as well as gain are also obtained over the entire operating band. Moreover, a five-element antenna array with an electrical downtilt of $0^{\circ}$to $14^{\circ}$ is developed for modern base station applications. Measurement shows that a wide impedance bandwidth of 34.7% (690 MHz to 980 MHz), stable HPBW (3-dB beamwidth) of $65{\pm}5^{\circ}$, and high gain of $13.8{\pm}0.6dBi$ are achieved with electrical downtilts of $0^{\circ}$, $7^{\circ}$, and $14^{\circ}$.

• Journal of the Korean Vacuum Society
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• v.18 no.3
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• pp.203-207
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• 2009

Copper is known as a replacement for aluminum wire which is used for semiconductor. Because specific resistance of Cu ($1.67{\mu}{\Omega}$-cm) is lower than that of Al ($2.66{\mu}{\Omega}$-cm), Cu reduce RC delay time. Although melting point of Cu($1085^{\circ}C$) is higher than melting point of Al, Cu have characteristic to easily react with Silicon(Si) in low temperature, and it isn't good at adhesive strength with Si. For above these reason, research of diffusion barrier to prevent reaction between Cu and Si and to raise adhesive strength is steadily advanced. Our study group have researched on W-C-N (tungsten-carbon-nitrogen) Diffusion barrier for preventing diffusion of Cu through semiconductor. By recent studies, It's reported that W-C-N diffusion barrier can even precent Cu and Si diffusing effectively at high temperature. In this treatise, we vaporized different proportion of N into diffusion barrier to research Cu's Electromigration based on the results and studied surface hardness in the heat process using nano scale indentation system. We gain that diffusion barrier containing nitrogen is more stable for Cu's electromigration and has stronger surface hardness in heat treatment process.

• Journal of the Korean Ceramic Society
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• v.41 no.10 s.269
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• pp.742-748
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• 2004

Isopropanol of low boiling point was used as a solvent to prepare Al-doped ZnO(AZO) thin films. A homogeneous and stable sol was made from Zn acetate a solute whose mole concentration was 0.7mol/$\iota$ and Al chloride as a dopant. Al-doped ZnO thin films were prepared by sol-gel method as a function of post-heating temperature from 500 to $700^{\circ}C$ and the optical and electrical properties were investigated. The c-axis orientation along (002) plane was enhanced with the increasing of post-heating temperature and the surface morphology of the films showed a homogeneous and nano-sized microstructure. The optical transmittance of the films post-heated below $650^{\circ}C$ was over $86\%$, but decreased at $700^{\circ}C$. The electrical resistivity of the thin films decreased from 73 to 22 $\Omega$-cm as the post-heating temperature increased up to $650^{\circ}C$, but increased greatly to 580 $\Omega$-cm at $700^{\circ}C$. XPS analysis indicated that the deterioration of electrical and optical properties was attributed to the precipitation of $Al_2O_3$ phase on the surface of AZO thin film. This result suggests that the optimum post-heating temperature to improve electrical and optical properties is $600^{\circ}C$.

• Journal of the Korean Society of Marine Environment & Safety
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• v.24 no.2
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• pp.140-145
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• 2018

This paper deals with the dynamical analysis of a two-point mooring vessel under surge excitations. The characteristics of nonlinear behaviors are investigated completely including bifurcation and limit cycle according to particular input parameter changes. The strong nonlinearity of the mooring system is mainly caused by linear and cubic terms of restoring force. The numerical simulation is performed based on the fourth order Runge-Kutta algorithm. The bifurcation diagram and several instability phenomena are observed clearly by varying amplitudes as well as frequencies of surge excitations. Stable periodic solutions, called the periodic windows, can be obtained in succession between chaotic clouds of dots in case of frequency ${\omega}=0.4rad/s$. In addition, the chaotic region is unexpectedly increased when external forcing amplitude exceeds 1.0 with the angular frequency of ${\omega}=0.7rad/s$. Compared to the cases for ${\omega}=0.4$, 0.7rad/s, the region of chaotic behavior becomes more fragile than in the case of ${\omega}=1.0rad/s$. Finally, various types of steady states including sub-harmonic motion, limit cycle, and symmetry breaking phenomenon are observed in the two-point mooring system at each parameter value.

• Journal of the Korean Society of Food Science and Nutrition
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• v.29 no.6
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• pp.981-986
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• 2000

In the process of tuna for food, the unprocessed parts of the whole fish range from 30 to 35%, which are mostly used as animal feed stuff, and wasted. Thus, preliminary study on the recycling of the by-product was done to ultimately produce highly valuable products. The study was peformed on skin, skin flesh, tail flesh, dark flesh and abdominal flesh of the tuna. First, crude protein was the most abundant in the skin at 26.31%. About 21% of the crude protein were found in the other samples. Second, crude fat was greatly obtained in the skin at 15.58%. Interestingly, only 0.75% of crude fat was found in the dark flesh. Third, vitamin C and vitamin B group were highly measured in the abdominal flesh and the dark flesh, respectively. Importantly, docosahexaenoic acid (DHA, C22 : 6 $\omega$ -3) and eicosapentaenoic acid (EPA, C22 : 6 $\omega$ -3) which are highly unsaturated fatty acids, were abundant in the skin and skin flesh. To determine the effect of high temperature to the unprocessed parts, the samples were exposed to steam for 30 min. After this processing, 15-methylhexadecanoic acid (i-17 : 0) were in- creased in the skin flesh and the dark flesh. Furthermore, 3-hydroxytetradecanoic acid (3-OH 14 : 0), heptadecanoic acid (17 : 0), 2-hydroxyhexadecanoic acid (2-OH 16 : 0) and nonadecanoic acid (19 : 0) hat were not found before with steam were detected. The DHA and EPA in the dark flesh and the DHA in the skin were stable, respectively, even after the treatment.

• Korean Chemical Engineering Research
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• v.57 no.1
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• pp.65-72
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• 2019

In this study, heterogeneous ion exchange membranes were prepared by casting method with various mixing ratios of PPO ion-selective solution and ion exchange resin. Then heterogeneous bipolar membranes were prepared by using this. The water content of heterogeneous cation and anion exchange membranes were 60~80% respectively, the ion exchange capacity was 2.81~3.26 meq/g, 2.31~2.74 meq/g and electrical resistances were $1.65{\sim}1.45{\Omega}{\cdot}cm^2$ and $1.55{\sim}1.05{\Omega}{\cdot}cm^2$. The tensile strength of heterogeneous bipolar membrane was lower than that of PPO resin before functionalization ($700Kg_f/cm^2$). The tensile strength of heterogeneous bipolar membrane with catalyst layer was lower than that of non-catalytic heterogeneous bipolar membrane. The water splitting voltage of the heterogeneous bipolar membrane with catalyst layer was low and stable at a minimum of 1.7~1.8 V, maximum 3.9~4.0 V, and the water splitting voltage of the non-catalytic heterogeneous bipolar membrane was constant at 3.8~4.0 V.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.63 no.12
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• pp.1671-1674
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• 2014

This paper presents a frequency-dependent cell impedance analysis chip for use in cancer and normal cell discrimination. The previous cell impedance analysis chips for flowing cells cannot allow enough time for cell-to-electrode contact to monitor frequency-dependent impedance response. Another type of the previous cell impedance analysis chips for the cells clamped by membranes need complex sample control for making stable cell-to-electrode contact. We present a new impedance analysis chip using the microchamber array, on which a PDMS cover is placed to make stable cell-to-electrode contact for the individual cell trapped in each microchamber; thus achieving frequency-dependent single-cell impedance analysis without complex sample control. Compared to the normal cells, the magnitude of NHBE cells is $60.07{\sim}97.41k{\Omega}$ higher than A549 cells in the frequency range of 95.6 kHz~2MHz and the phase of NHBE is $3.96^{\circ}{\sim}20.8^{\circ}$ higher than A549 cells in the frequency range of 4.37 kHz~2MHz, respectively. It is demonstrated experimentally that the impedance analysis chip performs frequency-dependent cell impedance analysis by making stable cell-to-electrode contact with simple sample control; thereby applicable to the normal cell and cancer cell discrimination.

• Macromolecular Research
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• v.17 no.10
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• pp.746-749
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• 2009

Poly(ethylene terephthalate) (PET) fabric/poly(3,4-ethylenedioxythiophene) (PEDOT) composite with stable and high electrochemical activity was fabricated by chemical and electrochemical polymerization of 3,4-ethylenedioxythiophene (EDOT) on a PET fabric in sequence. Effects of polymerization conditions on the following characteristics of the composite were studied: electrical conductivity and surface morphology. The electrochemical properties were also investigated by cyclic voltammetry and cyclic charge/discharge experiments. The specific volume resistivity, electrical conductivity and specific discharge capacitance of the composite were 0.034 $\Omega-cm$ and 25 S/cm, and 54.5 F/g, respectively.

• Journal of the Korean Ceramic Society
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• v.24 no.3
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• pp.270-276
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• 1987

The microstructure and dielectric properties of a SrTiO3-based GBL (Grain Boundary Layer) capacitor were investigated. The 0.6 mol% Nb2O5 doped SrTiO3 was sintered for 3 hr at 1450$^{\circ}C$ in mixed gas(N2/H2) atmosphere. The Nb2O5 promoted the grain growth of the SrTiO3 ceramics was decreased with the amount of Nb2O5. The oxide mixture(PbO, Bi2O3, B2O3) were painted on the reduced specimen and fired at 1000$^{\circ}C$ to 1100$^{\circ}C$ in air. The penetrated oxide mixture into specimen were located in grain boundaries. A SrTiO3-based GBL capacitor had the apparent permittivity of about 3.0${\times}$104, the dielectric loss of 0.01-0.02, and insulating resistance of 108-109$\Omega$.cm. The capacitor had the stable temperature coefficient of capacitance and exhibited dielectric dispersion over 107 Hz. The capacitance-voltage measurements indicated that the grain boundary was composed of the continuous insulating layers.