Synthesis of Diamond Thin Film by RF PACVD from $\textrm{H}_2$ -$\textrm{CH}_4$ Mixed Gas
(고주파 플라즈마 CVD에 의한 $\textrm{H}_2$ -$\textrm{CH}_4$ 계로부터 다이아몬드 박막의 합성)
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- Journal of the Korean Institute of Telematics and Electronics T
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- v.36T no.3
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- pp.13-18
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- 1999