• 제목/요약/키워드: $\alpha$-SiC

검색결과 529건 처리시간 0.027초

$SiH_4$ 환원에 의한 Selective CVD-W막 특성에 대한 증착시간과 압력의 효과 (Effect of Deposition Time and Pressure on Properties of Selective CVD-W by $SiH_4$ Reduction)

  • 이종무;이강욱;박선후
    • 한국재료학회지
    • /
    • 제1권4호
    • /
    • pp.177-183
    • /
    • 1991
  • $SiH_4$환원에 의한 선택성 CVD-W 공정에서 증착시간과 증착압력에 따른 W막 특성의 변화를 조사하였다. $300^{\circ}C$, 100mtorr이하에서 W막이 Si기판 전면에 증착되는 데에 약 30초의 시간이 걸렸고, 증착시간에 따라 막 두께는 초기에는 직선적으로, 나중에는 포물선적으로 증가하였으며, 면저항은 초기에는 급히, 나중에는 서서히 감소하는 경향을 나타내었다. 50-300mtorr의 압력범위에서 압력의 증가에 따라 결정립도(grain size)는 별로 변하지 않았으나 결정립계(grain boundary)의 윤곽이 불확실해지는 경향을 나타내었다. 또한 이 압력범위에서는 ${\alpha}-W$만 나타날 뿐 ${\beta}-W$의존재는 발견되지 않았다. 증차압력의 증가에 따라 W막의 증착속도가 증가하고, 비저항도 증가하는 경향을 보였다. AES 분석결과에 의하면, 증착압력온 Si/W의 조성비나 W/Si계면에서의 실리사이드화에는 큰 영향을 미치지 않는 것으로 나타났다.

  • PDF

Fe-Co-Cu-Nb-Si-B 초미세결정합금의 자기적 특성연구 (Magnetic Properties of Nanocrystalline Fe-Co-Cu-Nb-Si-B Alloys)

  • 김약연;백종성;서영수;임우영;유성초;이수형
    • 한국자기학회지
    • /
    • 제3권2호
    • /
    • pp.130-134
    • /
    • 1993
  • 초급냉법중 단롤법으로 제작한 $Fe_{73.5-X}Co_{X}Cu_{1}Nb_{3}Si_{13.5}B_{9}(x=2,\;4)$ 비정질 합금을 $400~650^{\circ}C$에서 열처리하여 자기적 특성을 조사하였다. $Fe_{71.5}Co_{2}Cu_{1}Nb_{3}Si_{13.5}B_{9}$ 비정질 합금의 최적 열처리 온도는 $550^{\circ}C$이며, 이온도에서 열처 리된 시료의 상대 투자율과 항자력은 1 kHz에서 각각 $1.1{\times}10^{4}$, 0.22 Oe이다. $Fe_{69.5}Co_{4}Cu_{1}Nb_{3}Si_{13.5)B_{9}$의 경우는 $600^{\circ}C$에서 열처리 했을때 상대 투자율과 항자력이 각각 $1.0{\times}10^{4}$, 0.19 Oe로 가장 우수한 연자성 특성을 보였다. X-선 실험결과, 이러한 연자성 특성의 향상은 $\alpha$-Fe(Si) 결정립의 형성에 의한 것임을 확인 할 수 있었으며, 강자성 공명 실험에 의하면 최적 열처리 조건은 공명 흡수선의 반치폭이 급격히 증가하기 직전의 온도임을 알 수 있었다.

  • PDF

APEX-1은 GDNF/GFRα1 시그널을 통해 세포증식을 조절한다 (APEX-1 Regulates Cell Proliferation through GDNF/GFRα1 Signaling)

  • 김홍범;구루사미 하리하라수단;윤차경
    • 생명과학회지
    • /
    • 제23권10호
    • /
    • pp.1183-1191
    • /
    • 2013
  • APEX-1 (인간 apyrimidinic/apurinic 효소)은 염기성 사이트 및 DNA단일 가닥 결손으로 손상된 DNA을 복구 할 수 있는 다기능 단백질이다. 또한 APEX-1은 많은 전사 인자들의 redox-modifying factor (산화 환원 수정 요소)로서의 역할을 한다고 알려져 있다. 이런 APEX-1의 전사 타겟을 동정하는 것은 APEX-1의 다양한 세포 내 작용 메커니즘을 이해하는데 필수적이다. 따라서 이 논문에서는 먼저 Expression array analysis를 통해 glial cell-derived neurotropic factor receptor ${\alpha}1$ ($GFR{\alpha}1$)을 동정하였다. $GFR{\alpha}1$은 glial cell-derived neurotropic factor (GDNF) family 수용체이며 APEX-1에 의해 발현이 증가된다. APEX-1이 과발현된 세포에서 GDNF처리에 의해 GDNF/$GFR{\alpha}1$ 시그널 타겟인 c-Src가 Tyr418잔기에서 인산화 됨을 관찰하였다. 또한 APEX-1이 과발현된 세포에 GDNF처리하면, 세포증식이 증가함을 보았다. 반면, APEX-1 발현을 siRNA을 이용하여 감소시키면 $GFR{\alpha}1$ 발현과 GDNF에 의한 c-Src 인산화 및 세포증식이 감소함을 확인하였다. 이상의 결과는 APEX-1은 GDNF/$GFR{\alpha}1$ 시그널을 통해 세포 생존과 증식을 조절함을 증명하였다. 따라서 본 연구를 통해 APEX-1의 세포 증식을 조절하는 새로운 기전을 규명하였다.

Down-regulation of FRα Inhibits Proliferation and Promotes Apoptosis of Cervical Cancer Cells in Vitro

  • Bai, Li-Xia;Ding, Ling;Jiang, Shi-Wen;Kang, Hui-Jie;Gao, Chen-Fei;Chen, Chen;Zhou, Qin;Wang, Jin-Tao
    • Asian Pacific Journal of Cancer Prevention
    • /
    • 제15권14호
    • /
    • pp.5667-5672
    • /
    • 2014
  • Folate receptor alpha ($FR{\alpha}$) mediates folate uptake by endocytosis, and while folate is essential to DNA methylation and synthesis and may have an important role in proliferating cells. $FR{\alpha}$ is known to be expressed in rapidly proliferating cells, including many cancer cell lines, but there has been no systematic assessment of expression in cervical cancer cell lines. The aim of the present study was to evaluate the effects of $FR{\alpha}$ on proliferation and apoptosis of cervical cells and correlation mechanism. In this study, we investigated the biological function of $FR{\alpha}$ in Hela cells using RNA interference. Cell proliferation was evaluated by Cell Counting Kit-8 (CCK8) assay, while cell cycling and apoptosis were assessed by flow cytometry, mRNA levels by real time-PCR and protein levels of $FR{\alpha}$, c-Fos and c-Jun by Western blotting. The results revealed that $FR{\alpha}$ was highly expressed in Hela cells and its silencing with a small interfering RNA (siRNA) inhibited cell proliferation and induced cell apoptosis, arresting the cell cycle in G0/G1 stages while decreasing the proportion in S and G2/M stages, and suppressed the expression levels of c-Fos and c-Jun. In conclusion, the results of this study indicated that $FR{\alpha}$ down-regulation might be capable of suppressing cervical cancer cell proliferation and promoting apoptosis. It suggested that $FR{\alpha}$ might be a novel therapeutic target for cervical cancer.

TiAlSiN 코팅의 대기중 고온산화 속도와 스케일 분석 (High-temperature Oxidation Kinekics and Scales Formed on the TiAlSiN film)

  • 지권용;박상환;김민정;박순용;정승부;이동복
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2015년도 춘계학술대회 논문집
    • /
    • pp.131-132
    • /
    • 2015
  • $Ti_{0.26}Al_{0.16}Si_{0.01}N_{0.57}$ (at%) coatings were synthesized on stainless steel 304 by using arc ion plating systems (AIPS). Targets employed for the deposition were Ti, AlSi(67:33at%) and AlSi(82:18at%). The thickness of TiAlSiN coatings is $4{\mu}m$. The oxidation characteristics of the deposited coatings were studied by thermogravimetric analysis (TGA) in air between 800 and $900^{\circ}C$ for 75 hr. The oxide scale formed on the TiAlSiN coatings consisted of $rutile-TiO_2$ layer and ${\alpha}-Al_2O_3$. At $800^{\circ}C$, the coatings oxidized relatively slowly, and the scales were thin and adherent. When oxidized above $900^{\circ}C$, $TiO_2$ grew fast over the mixed oxide layer, and the oxide scale formed on TiAlSiN coatings was prone to spallation. Microstructural changes of the TiAlSiN coatings that occurred during high temperature oxidation were investigated by EPMA, XRD, SEM and TEM.

  • PDF

SiC 전도성 세라믹 복합체의 특성에 미치는 TiB$_2$의 영향 (Effect of TiB$_2$on Properties of SiC Electroconductive Ceramic Composites)

  • 신용덕;박미림;소병문;이동문
    • 대한전기학회논문지:전기물성ㆍ응용부문C
    • /
    • 제51권4호
    • /
    • pp.141-146
    • /
    • 2002
  • The mechanical and electrical properties of the pressureless sintered SiC-TiB$_2$electroconductive ceramic composites were investigated as functions of the transition metal of TiB$_2$. The result of phase analysis for the SiC-TiB$_2$ composites by XRD revealed $\alpha$-SiC(6H), TiB$_2$, and YAG(Al$_{5}$Y$_3$O$_{12}$) crystal phases. The relative density showed the lowest 84.8% for the SiC-TiB$_2$composites added with 39vol.%TiB$_2$. Owing to crack deflection, crack bridging and YAG of fracture toughness mechanism, the fracture toughness showed the highest value of 7.8 MPa.m$^{1}$2/ for composites added with 39vol.%TiB$_2$under a pressureless annealing at room temperature. The electrical resistivity of the SiC-27vol.%TiB$_2$ composites was negative temperature coefficient resistance(NTCR), and the electrical resistivity of the besides SiC-27vol.%TiB$_2$composites was all positive temperature coefficient resistance(PCTR) in the temperature range of $25^{\circ}C$ to $700^{\circ}C$.EX>.

시효처리에 따른 Ti-6Al-4Fe-0.25Si 합금의 미세조직 변화 (Microstructure Evolution of Ti-6Al-4Fe-0.25Si through Aging Heat Treatment)

  • 송용환;강주희;박찬희;김성웅;현용택;강남현;염종택
    • 대한금속재료학회지
    • /
    • 제50권7호
    • /
    • pp.477-485
    • /
    • 2012
  • The effect of aging heat treatment on microstructure evolution of the Ti-6Al-4Fe-0.25Si alloy with an initial microstructure of an elongated alpha was investigated. Aging treatments of the samples were carried out at $550^{\circ}C$ for up to 100 hours. The microstructure of the 5 hours heat-treated sample consisted of alpha grains, beta matrix and some TiFe intermetallic compounds that were precipitated from the beta matrix. Increasing the aging time to 10 hours, most of the beta matrix was decomposed to very fine alpha grains (${\sim}0.5{\mu}m$) and TiFe, and thus the volume fraction of the beta matrix was significantly decreased. EBSD analysis revealed that newly formed tertiary-alpha-grains in the vicinity of TiFe had high angle boundaries with respect to the primary and secondary alpha grains. As a result of these phase transformations during aging, the fraction of the alpha/alpha grain boundary was increased while that of the alpha/beta phase boundary was decreased.

졸-겔법에 의한 코디어라이트 제조와 분석에 관한 연구 (A study on the preparation and analysis of cordierite by sol-gel method)

  • 전경수;이영환
    • 분석과학
    • /
    • 제21권2호
    • /
    • pp.123-128
    • /
    • 2008
  • 졸-겔법에 의한 코디어라이트계 전구체(precursor) 제조 시 마그네슘 에톡사이드를 사용하면 황금색을 띠는 불투명한 전구체 용액이 되고, 조핵제인 5%-$Zr(OC_3H_7)_4$ 첨가 시에는 투명한 코디어라이트를 얻을 수 있다. 적외선 흡수 분광 분석에서 $SiO_2$ 성분은 $1045cm^{-1}$에서 흡수 피크를 확인 할 수 있었으며, 동시에 $1140cm^{-1}$$940cm^{-1}$의 두 개 피크 분리는 열처리 한 겔체인 $SiO_4$ 신축 진동이고, $Al_2O_3$ 성분은 $580cm^{-1}$$680cm^{-1}$의 흡수 피크로 보아 $Al_2O_6$ 망목 구조이고, MgO 성분은 $575cm^{-1}$에서 MgO 신축 진동 임을 알 수 있었다. X-선 회절 분석에서 코디어라이트계 전구체 : 물 몰비 1:5의 경우 반응 소결 온도 $1000^{\circ}C$ 이상에서는 ${\mu}$-cordierite 결정상이 나타남을 알 수 있었고, 코디어라이트계 전구체 : 암모니아 몰비 1:5 건조 겔체의 경우 $1050^{\circ}C$에서는 ${\mu}$-cordierite와 ${\alpha}$-cordierite가 공존 하다가 $1100^{\circ}C$에서는 ${\alpha}$-cordierite만이 존재함을 알 수 있었다.

액상소결(液狀燒結)한 SiC계(系)의 전도성(電導性) 복합체(複合體)의 미세구조(微細構造)와 특성(特性)에 미치는 Boride의 영향(影響) (Effects of Boride on Microstructure and Properties of the Electroconductive Ceramic Composites of Liquid-Phase-Sintered Silicon Carbide System)

  • 신용덕;주진영;고태헌
    • 전기학회논문지
    • /
    • 제56권9호
    • /
    • pp.1602-1608
    • /
    • 2007
  • The composites were fabricated, respectively, using 61[vol.%] SiC-39[vol.%] $TiB_2$ and using 61[vol.%] SiC-39[vol.%] $ZrB_2$ powders with the liquid forming additives of 12[wt%] $Al_2O_3+Y_2O_3$ by hot pressing annealing at $1650[^{\circ}C]$ for 4 hours. Reactions between SiC and transition metal $TiB_2$, $ZrB_2$ were not observed in this microstructure. The result of phase analysis of composites by XRD revealed SiC(6H, 3C), $TiB_2$, $ZrB_2$ and $YAG(Al_5Y_3O_{12})$ crystal phase on the Liquid-Phase-Sintered(LPS) $SiC-TiB_2$, and $SiC-ZrB_2$ composite. $\beta\rightarrow\alpha-SiC$ phase transformation was occurred on the $SiC-TiB_2$ and $SiC-ZrB_2$ composite. The relative density, the flexural strength and Young's modulus showed the highest value of 98.57[%], 249.42[MPa] and 91.64[GPa] in $SiC-ZrB_2$ composite at room temperature respectively. The electrical resistivity showed the lowest value of $7.96{\times}10^{-4}[\Omega{\cdot}cm]$ for $SiC-ZrB_2$ composite at $25[^{\circ}C]$. The electrical resistivity of the $SiC-TiB_2$ and $SiC-ZrB_2$ composite was all positive temperature coefficient resistance (PTCR) in the temperature ranges from $25[^{\circ}C]$ to $700[^{\circ}C]$. The resistance temperature coefficient of composite showed the lowest value of $1.319\times10^{-3}/[^{\circ}C]$ for $SiC-ZrB_2$ composite in the temperature ranges from $100[^{\circ}C]$ to $300[^{\circ}C]$ Compositional design and optimization of processing parameters are key factors for controlling and improving the properties of SiC-based electroconductive ceramic composites.

Gas Permeation of SiC Membrane Coated on Multilayer γ-Al2O3 with a Graded Structure for H2 Separation

  • Yoon, Mi-Young;Kim, Eun-Yi;Kim, Young-Hee;Whang, Chin-Myung
    • 한국재료학회지
    • /
    • 제20권9호
    • /
    • pp.451-456
    • /
    • 2010
  • A promising candidate material for a $H_2$ permeable membrane is SiC due to its many unique properties. A hydrogen-selective SiC membrane was successfully fabricated on the outer surface of an intermediate multilayer $\gamma-Al_2O_3$ with a graded structure. The $\gamma-Al_2O_3$ multilayer was formed on top of a macroporous $\alpha-Al_2O_3$ support by consecutively dipping into a set of successive solutions containing boehmite sols of different particle sizes and then calcining. The boehmite sols were prepared from an aluminum isopropoxide precursor and heated to $80^{\circ}C$ with high speed stirring for 24 hrs to hydrolyze the precursor. Then the solutions were refluxed at $92^{\circ}C$ for 20 hrs to form a boehmite precipitate. The particle size of the boehmite sols was controlled according to various experimental parameters, such as acid types and acid concentrations. The topmost SiC layer was formed on top of the intermediate $\gamma-Al_2O_3$ by pyrolysis of a SiC precursor, polycarbosilane, in an Ar atmosphere. The resulting amorphous SiC-on-$Al_2O_3$ composite membrane pyrolyzed at $900^{\circ}C$ possessed a high $H_2$ permeability of $3.61\times10^{-7}$ $mol{\cdot}m^{-2}{\cdot}s^{-1}{\cdot}Pa^{-1}$ and the $H_2/CO_2$ selectivity was much higher than the theoretical value of 4.69 in all permeation temperature ranges. Gas permeabilities through a SiC membrane are affected by Knudsen diffusion and a surface diffusion mechanism, which are based on the molecular weight of gas species and movement of adsorbed gas molecules on the surface of the pores.