Fabrication and characterization of $\alpha$ -Fe$_2$ O$_3$ thin film gas sensor by CVD
(CVD법을 이용한 $\alpha$ -Fe$_2$ O$_3$ 박막 가스센서의 제조 및 물성평가)
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- Journal of the Korean Crystal Growth and Crystal Technology
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- v.9 no.3
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- pp.280-285
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- 1999