• Title/Summary/Keyword: $\alpha$-${Si_3}{N_4

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Synthesis of $\beta$-Sialon from Wando Pyrophyllite (완도납석으로 부터 $\beta$-Sialon의 합성)

  • 이홍림;신현곤
    • Journal of the Korean Ceramic Society
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    • v.21 no.1
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    • pp.5-10
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    • 1984
  • $eta$-Sialon synthesis was investigated via the simulataneous reduction and nitriding of Wando pyrophyllite. When Wando pyrophyllite-graphite-$Si_3N_4$ seed mixture was heated at 135$0^{\circ}C$ for as long as 10 hours in 80% $N_2$-20%$H_2$ atomsphere $eta$-$Si_3N_4$ solid solution was mainly formed together with a small amount of $\alpha$-$Si_3N_4$ The value z of the forming $Si_{6-x}Al_2O_2N{8-z}$ was decreased with heating time.

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Mechanical Properties and Microstructures of Self-toughened Silicon Nitride Cermic Prepared by Microstructural Control (미세구조 제어에 의해 제조한 자체 강인화 질화규소 세라믹의 기계적 성질과 미세조직)

  • 김완중;이영규;조원승;최상욱
    • Journal of the Korean Ceramic Society
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    • v.36 no.4
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    • pp.432-443
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    • 1999
  • The self-toughened Si3N4 ceramics where needle-like coarse ${\beta}$-Si3N4 grains were dispersed within fine-grain-ed matrix were prepared via hot-prssing at 1730$^{\circ}C$ for 2 h using 5 vol% ${\beta}$-Si3N4 whiskers as a seed. In this study the microstructures and mechanical properties of self-toughened Si3N4 ceramics were investigated. The flexural strength of self-toughened Si3N4 ceramics was increased from 600-800 MPa of the Si3N4 monolith to 830-1025 MPa. The KIC was also increased from 4.0-5.0MPa$.$m1/2 of the Si3N4 monolith to 5.8-6.5MPa$.$m1/2$.$The needle-like coarse Si3N4 grains in self-toughened ceramics were considered to induce various toughening mechanisms including the crack deflection pull-out and bridging and to contribute to KIC improvement. In ad-dition to toughening mechanisms the KIC improvement was considered to be partially indebted also to the orien-tation of large ${\beta}$-Si3N4 grains and to the promoting effect of ${\beta}$-Si3N4 whiskers on the ${\alpha}$ to ${\beta}$ transtion.

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Interpretation of the Crazing and Lifting of the SiO2 Film Formed on Si3N4 (질화규소산화막의 균열 및 박리해석)

  • 최두진
    • Journal of the Korean Ceramic Society
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    • v.26 no.3
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    • pp.390-394
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    • 1989
  • The stored elastic strain energy due to the thermal expansion mismatch between the thermally oxidized crystalline layer (cristobalite) and CVD Si3N4($\alpha$-Si3N4) on cooling form high oxidation temperature (1000-140$0^{\circ}C$) to room temperature, releases through the crazing of film and lifting at the SiO2/Si3N4 interface. The ratial equation (1/n) which corresponds to the ratio of the relaxation of the stored elastic stain energy due to crazing of film to the total energy, is derived under the assumption of the square crazed pattern, as follow. 1/n={8${\gamma}$(1-v)2}/(ΔL2dE) The ratial equation suggests the reason for the lifting at the SiO2/Si3N4 interface which was observed in this research.

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Microstructural development of $Si_3N_4/SiC$ nanocomposites during hot pressing ($Si_3N_4/SiC$ 초미립복합재료의 고온가압소결중의 미세구조변화)

  • 황광택;김창삼;정덕수;오근호
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.6 no.4
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    • pp.552-557
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    • 1996
  • Microstructural development of $Si_3N_4$/20 vol% SiC nanocomposites doped 2 wt% $Al_2O_3$ and 6 wt% $Y_2O_3$ as sintering additives were analyzed by sintering interruption. Density of samples was significantly increased between $1500^{\circ}C$ and $1700^{\circ}C$, and near full density was achieved at $1800^{\circ}C$. Transformation rate from $\alpha-Si_3N_4$ to $\betha-Si_3N_4$ was increased at $1700^{\circ}C$ and $1800^{\circ}C$, and then elongated matrix grains were appeared. Small size SiC particles had suppressive effect on densification rate and transformation of $Si_3N_4$ phase.

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Errects of $SiH_4/WF_6$Ratio on the Electrical Properties of LPCVD W Films for Contact Metal (Contact Barrier metal용 LPCVD W막의 전기적 특성에 대한 $SiH_4/WF_6$비의 효과)

  • Lee, Jong-Mu;Park, Won-Gu;Im, Yeong-Jin;Son, Jae-Hyeon;Kim, Hyeong-Jun
    • Korean Journal of Materials Research
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    • v.3 no.6
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    • pp.661-667
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    • 1993
  • Effects of $SiH_4//WF_6$(=R) ratio on the electrical properties of W films such as resistvity, contact resistance, junction leakage current in the selective W CVD technology for contact barrier metal were investigated with the emphasis on the role of $\alpha$-W Resistivity of W increases with increasing R, which is primarily due to the phase transformation from $\alpha$-W to , $\alpha$-W. $\alpha$-W found in the SiH4 reduced CVD W film is stabilized by Si incorporated into the W film rather than by oxygen. $\alpha$-W is found in the W film deposited on the Si substrate for high R, while $\alpha$-W is not found in the W film deposited on the TiN substrate even for high R. Also junction leakages increase with increasing R, which is caused not only by the vertical Si consumption but also the lateral Si consumption.

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Nitridation Behavior of Kaolin with Reduced Alumina Content Obtained by Acid Treatment (산처리에 의하여 알루미나 함량을 줄인 카올린의 질화거동)

  • 배원태;정원도;조철구
    • Journal of the Korean Ceramic Society
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    • v.29 no.5
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    • pp.347-356
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    • 1992
  • Various kaolin samples with different alumina content were prepared from calcined admixture of kaolin and ammonium sulfate by varying the treatment time in sulfuric acid. Samples were nitridated under N2 or N2-H2 atmosphere with changing the amount of added carbon, the reaction time and temperature. As the alumina content lowered, the size of kaolin particles decreased and the specific surface area increased. XRD analysis indicated that ${\alpha}$-quartz remained by decomposition of halloysite and meta-halloysite. Experimental results of nitridation behavior are summerized as follows; 1) Nitridation under N2 atmosphere. With the increase of C/SiO2 ratio and with the decrease of Al2O3 content, disappearance of XRD pattern peaks of mullite, ${\alpha}$-quartz and ${\alpha}$-Al2O3 were accelerated at 1300$^{\circ}C$. SiC was the main phase in the reaction product of acid-treated kaolin samples nitridated at 1300$^{\circ}C$ for 10 hours regardless of C/SiO2 ratio. But the XRD peak intensities of ${\beta}$-Si3N4, ${\beta}$-sialon and SiC did not show much difference when untreated raw kaolin was fired at the same condition. When the ratio of C/SiO2 was 3.5, ${\beta}$-sialon and ${\beta}$-Si3N4 existed in the reaction product of about 22% alumina containing kaolin sample fired at 1350$^{\circ}C$ for 7 hours. Only ${\beta}$-sialon existed in the same sample fired at 1400$^{\circ}C$ for 10 hours. ${\beta}$-sialon was obtained from all of the acid-treated kaolin samples fired at 1400$^{\circ}C$ for 40 hours, but AlN and SiC remained in the untreated kaolin sample. Z value of the ${\beta}$-sialon obtained from the 22% alumina containing kaolin sample fired at 1400$^{\circ}C$ for 40 hours was about 1.3(XRD) and 1.5(EDS). 2) Nitridation under 80N2+2OH2 mixed gas atmosphere with the C/SiO2 ratio of 1 Mullite was not found, but ${\alpha}$-Si3N4, and ${\beta}$-sialon were present in the reaction product of about 22% alumina containing kaolin sample fired at 1300$^{\circ}C$ for 10 hours. When untreated kaolin sample was nitridated at the same condition, mullite remained. AlN and SiC were not found in the reaction product of about 22% alumina containing kaolin sample fired at 1350$^{\circ}C$ for 5 hours. On the other hand, AlN and SiC remained in the product of untreated kaolin fired at the same condition.

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Effect of $Si_3N_4$ Whisker and SiC Platelet Addition on Phase Transformation and Mechanical Properties of the $\alpha/\beta$ Sialon Matrix Composites (보강재로 첨가된 $Si_3N_4$ Whisker와 SiC Platelet가 $\alpha/\beta$ Sialon 복합체의 상변태와 기계적 물성에 미치는 영향)

  • 한병동;임대순;박동수;이수영;김해두
    • Journal of the Korean Ceramic Society
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    • v.32 no.12
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    • pp.1417-1423
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    • 1995
  • α/β sialon based composites containing silicon nitride whisker and silicon carbide platelet were fabricated by hot pressing. Effect of the reinforcing agents on the α to β phase transformation of the sialon as well as on the mechanical properties was investigated. Silicon nitride whisker and silicon carbide platelet promoted the phse transformation. TEM/EDS analysis revealed that the grain containing the whisker had 'core-rim' structure; core being high purity Si3N4 whisker and rim being β-sialon. Flexural strength of the composite decreased with the reinforcement addition which, on the other hand, improved fracture toughness of it. High temperature strength was measured at 1300℃ to be about 130 MPa lower than that measured at RT for the whisker reinforced composites.

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Effect of Increased Oxygen Content due to Intensive Milling on Phase and Microstructural Development of Silicon Nitride

  • Kim, Hai-Doo;Ellen Y. Sun;Paul F. Becher;Kim, Hyo-Jong;Han, Byung-Dong;Park, Dong-Soo
    • Journal of the Korean Ceramic Society
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    • v.38 no.5
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    • pp.405-411
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    • 2001
  • Compacts of a mixture of fine $\alpha$-Si$_3$N$_4$powders, 6% $Y_2$O$_3$and 1% $Al_2$O$_3$were attrition milled time on phase and microstructural development in silicon nitride ceramics. The sintered surface and the interior showed different behaviors in phase and microstructral developments. Increased oxygen content with increased milling time of powder mixture leads to the formation of Si$_2$$N_2$O phase at temperatures as low as 155$0^{\circ}C$. Si$_2$$N_2$O is stable in the interior of the samples but unstable in the surface region of the specimen sintered at higher temperature. This results in a duplex structure where the interior consists of Si$_2$$N_2$O grains dispersed in $\beta$-Si$_3$N$_4$matrix and a surface which contains only $\beta$-Si$_3$N$_4$. The alpha to beta phase transformation and the microstructural development are shown to be influenced by the formation and decomposition of the Si$_2$$N_2$O.

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Novel Synthesis and Properties of $Si_3N_4$-based Nano/Nano-Type Composites

  • Yoshimura, Masahi
    • Journal of Powder Materials
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    • v.8 no.3
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    • pp.210-213
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    • 2001
  • $Si_3N_4$/TiN nano/nano-type composites were successfully fabricated by the combination of a mechano-chemical grinding (MCG) method and a short time sintering process, and their wear resistance was evaluated. Powder mixtures of $\alpha-Si_3N_4$and Ti were prepared using mechano-chemical grinding process and the resulting nanocomposite powder mixtures were consolidated using pulsed electric current sintering (PECS). TEM observation showed that the nano/nano-type composites consisted of homogeneous and very fine matrix grains with the size less than 100 nm. The obtained $Si_3N_4$-based nano/nano-type showed high wear resistance and electric discharge machinability.

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