Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Fabrication of Nano-thin Film Through High-efficiency Evaporation Source and Analysis of Thin Film Characteristics

고효율 증발원을 이용한 나노박막 제작 및 특성

  • Kwan-Do Kim (Dept. of Smart Mobility Engineering, Soonchunhyang University)
  • 김관도 (순천향대학교 스마트모빌리티공학과)
  • Received : 2024.08.01
  • Accepted : 2024.09.12
  • Published : 2024.09.30
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Abstract

High efficiency evaporation source is developed to perform a vacuum deposition process in which a deposition material is heated and vaporized to eject from a solid state to a gaseous state. In order to obtain a uniform thin film, conditions such as the structure of the effusion cell, the distance between the effusion cell and the substrate, nozzle size, and evaporation angle must be optimized. In this experiment, organic material Alq3 and metal Al thin film deposition process was performed using the effusion cell and thin film characteristics was analyzed.

Keywords

References

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