The Journal of the Convergence on Culture Technology (문화기술의 융합)

The International Promotion Agency of Culture Technology (국제문화기술진흥원)
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Fault diagnosis of wafer transfer robot based on time domain statistics

시간 영역 통계 기반 웨이퍼 이송 로봇의 고장 진단

  • Received : 2024.04.22
  • Accepted : 2024.06.15
  • Published : 2024.07.31
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Abstract

This paper applies statistical analysis methods in the time domain to the fault diagnosis of wafer transfer robots, and proposes a methodology to discern the critical characteristics of vibration and torque signals. Subsequently, principal component analysis (PCA) is applied to diminish the data's dimensionality, followed by the development of a fault diagnosis algorithm utilizing Euclidean distance and Hotelling's T-square statistics. The algorithm establishes decision boundaries to categorize failure states based on the observed data. Our findings indicate that data classification incorporating velocity parameters enhances diagnostic accuracy. This approach serves to enhance the precision and efficacy of fault diagnosis.

본 논문에서는 웨이퍼 이송 로봇의 고장 진단에 시간 영역에서의 통계적 분석 방법을 적용하고, 진동 및 토크 신호의 중요 특성을 파악하는 방법을 제안한다. 이를 기반으로 데이터의 차원을 축소하기 위해 주성분 분석을 사용하고, 유클리드 거리와 Hotelling의 T-제곱 통계량을 활용하여 고장 진단 알고리즘을 개발했다. 이 알고리즘은 관측된 데이터에 대해 고장 상태를 분류하는 결정 경계를 형성한다. 속도 파라미터를 고려한 데이터 분류는 진단 정확도를 향상시킴을 확인했다. 이러한 접근 방식은 고장 진단의 정확성과 효율성을 개선하는 데 기여한다.

Keywords

Acknowledgement

이 논문 또는 저서는 2023년 대한민국 교육부와 한국연구재단의 지원을 받아 수행된 연구임(NRF-2023S1A5A8080527).

References

  1. S. Hong, Y. Lee, and C. Moon, "Transfer Learning-Based Vibration Fault Diagnosis for Ball Bearing," The journal of the convergence on culture technology, vol. 9, no. 3, pp. 845-850, May 2023. doi:10.17703/JCCT.2023.9.3.845.
  2. R. Wladysiak and T. Pacyniak, "Infrared thermography as a tool to elaborate procedures for predictive maintenance of ball mills equipment," 2018. doi: 10.21611/qirt.2018.093.
  3. Hae Seong Hwang, Hyung Joon Park, Hyo LimKang, Kwang Ki Lee, and Seung Ho Han, "Study on Fault Detection Algorithms for Rolling Bearing based on Multivariate Statistical Analysis," Transactions of the Korean Society of Mechanical Engineers - A, vol. 46, no. 6, pp. 601-609, 2022, doi: 10.3795/KSME-A.2022.46.6.601
  4. Moon, Sung Bae and Rim, Kyung-Hwa, "Method of Reducing Residual Vibration at the LCD Transfer Robot," Journal of the Semiconductor & Display Technology, vol. 16, no. 2, pp. 98-105, 2017.
  5. Hee-Seung Yoon, Hyeong-Gyun Kim, Hyun-Il Yoon, Ji-Hyun Yoo, and Seung-Soo Han, "Development of Predictive Maintenance System for Wafer Transfer Robot Using DBSCAN Algorithm," in INFORMATION AND CONTROL SYMPOSIUM, 2018, pp. 180-181.
  6. Seung-il Kim, Noh Yoojeong, KANG YOUNG-JIN, Sunhwa Park, and Byungha Ahn, "Fault Classification Model Based on Time Domain Feature Extraction of Vibration Data, J. Comput. Struct. Eng. Inst. Korea, vol. 34, no. 1, pp. 25-33, 2021. doi:10.7734/COSEIK.2021.34.1.25
  7. K. Pearson, "LIII. On Lines and Planes of Closest Fit to Systems of Points in Space," The London, Edinburgh, and Dublin Philosophical Magazine and Journal of Science, vol. 2, no. 11, pp. 559-572, 1901. https://doi.org/10.1080/14786440109462720
  8. R. De Maesschalck, D. Jouan-Rimbaud, and D. L. Massart, "The Mahalanobis Distance," Chemometrics and Intelligent Laboratory Systems, vol. 50, no. 1, pp. 1-18, 2000. https://doi.org/10.1016/S0169-7439(99)00047-7