반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

An Experimental Study on IMP-based and DOB-based Controllers for Position Control of a BLDC Motor System

  • 투고 : 2024.06.05
  • 심사 : 2024.06.21
  • 발행 : 2024.06.30
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초록

As semiconductor processes require several nanometers precision, the importance of motor control is increasing in semiconductor equipment. Due to unpredictable uncertainties such as friction and mechanical vibrations achieving precise position control in semiconductor processes is challenging. The internal model principle-based controller is a control technique that ensures robust steady-state performance by incorporating a model of the reference and disturbance. The disturbance observer-based controller is a prominent robust control technique implemented to cope with various nonlinearities and uncertainties. Provided that the two controllers can be designed to exhibit equivalent performance under certain conditions, this paper demonstrates through experiments that they yield identical results for the case of a BLDC position control problem. The experimental results also indicate that they can offer enhanced robustness compared with the conventional PID controller in the presence of a time-varying disturbance.

키워드

과제정보

This paper was conducted with the support of the Korea Institute for Advancement of Technology (G02P18800005502) through the 2024 Ministry Collaborative Semiconductor Main Track Project, and the authors would like to thank Professor S. J. Hong of Myongji University for his help in carrying out the research.

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