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반도체 및 전자패키지의 방열기술 동향

Heat Dissipation Trends in Semiconductors and Electronic Packaging

  • 문석환 (저탄소집적기술창의연구실) ;
  • 최광성 (저탄소집적기술창의연구실) ;
  • 엄용성 (저탄소집적기술창의연구실) ;
  • 윤호경 (저탄소집적기술창의연구실) ;
  • 주지호 (저탄소집적기술창의연구실) ;
  • 최광문 (저탄소집적기술창의연구실) ;
  • 신정호 (저탄소집적기술창의연구실)
  • S.H. Moon ;
  • K.S. Choi ;
  • Y.S. Eom ;
  • H.G. Yun ;
  • J.H. Joo ;
  • G.M. Choi ;
  • J.H. Shin
  • 발행 : 2023.12.01

초록

Heat dissipation technology for semiconductors and electronic packaging has a substantial impact on performance and lifespan, but efficient heat dissipation is currently facing limited improvement. Owing to the high integration density in electronic packaging, heat dissipation components must become thinner and increase their performance. Therefore, heat dissipation materials are being devised considering conductive heat transfer, carbon-based directional thermal conductivity improvements, functional heat dissipation composite materials with added fillers, and liquid-metal thermal interface materials. Additionally, in heat dissipation structure design, 3D printing-based complex heat dissipation fins, packages that expand the heat dissipation area, chip embedded structures that minimize contact thermal resistance, differential scanning calorimetry structures, and through-silicon-via technologies and their replacement technologies are being actively developed. Regarding dry cooling using single-phase and phase-change heat transfer, technologies for improving the vapor chamber performance and structural diversification are being investigated along with the miniaturization of heat pipes and high-performance capillary wicks. Meanwhile, in wet cooling with high heat flux, technologies for designing and manufacturing miniaturized flow paths, heat dissipating materials within flow paths, increasing heat dissipation area, and reducing pressure drops are being developed. We also analyze the development of direct cooling and immersion cooling technologies, which are gradually expanding to achieve near-junction cooling.

키워드

과제정보

This work was supported by ETRI grant funded by the Korean government[23YB1100].

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