Journal of Powder Materials (한국분말재료학회지)

The Korean Powder Metallurgy & Materials Institute (한국분말재료학회 (*구 분말야금학회))
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Fabrication and Sintering Behavior Analysis of Molybdenum-tungsten Nanopowders by Pechini Process

페치니 공정을 이용한 몰리브덴-텅스텐 나노 분말 제조 및 소결 특성 평가

  • Suyeon Kim (Department of Urban, Energy, and Environmental Engineering, Chungbuk National University) ;
  • Taehyun Kwon (Department of Urban, Energy, and Environmental Engineering, Chungbuk National University) ;
  • Seulgi Kim (Department of Urban, Energy, and Environmental Engineering, Chungbuk National University) ;
  • Dongju Lee (Department of Urban, Energy, and Environmental Engineering, Chungbuk National University)
  • 김수연 (충북대학교 도시.에너지.환경 융합학부) ;
  • 권태현 (충북대학교 도시.에너지.환경 융합학부) ;
  • 김슬기 (충북대학교 도시.에너지.환경 융합학부) ;
  • 이동주 (충북대학교 도시.에너지.환경 융합학부)
  • Received : 2023.10.19
  • Accepted : 2023.10.28
  • Published : 2023.10.28
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Abstract

Molybdenum-tungsten (Mo-W) alloy sputtering targets are widely utilized in fields like electronics, nanotechnology, sensors, and as gate electrodes for TFT-LCDs, owing to their superior properties such as high-temperature stability, low thermal expansion coefficient, electrical conductivity, and corrosion resistance. To achieve optimal performance in application, these targets' purity, relative density, and grain size of these targets must becarefully controlled. We utilized nanopowders, prepared via the Pechini method, to obtain uniform and fine powders, then carried out spark plasma sintering (SPS) to densify these powders. Our studies revealed that the sintered compacts made from these nanopowders exhibited outstanding features, such as a high relative density of more than 99%, consistent grain size of 3.43 ㎛, and shape, absence of preferred orientation.

Keywords

Acknowledgement

본 연구는 2020년도 정부(산업통상자원부)의 재원으로 한국산업기술평가관리원의 지원(20011520, 스크랩을 활용한 정밀가공용 100 nm급 텅스텐계 소재 및 공구제조기술 개발) 및 2021년도 정부(산업통상자원부)의 재원으로 한국에너지기술평가원의 지원을 받아 수행된 연구임(20217510100020, 저품위 공정 폐액으로부터 희소금속 회수 공통 핵심(농축, 분리회수)공정 플랫폼 구축 및 소재화기술 개발).

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