Journal of Surface Science and Engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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ZnO/Cu/Al2O3 transparent heaters fabricated by magnetron sputtering

마그네트론 스퍼터링법으로 제조된 ZnO/Cu/Al2O3 투명 면상 발열체 연구

  • Min, Changheum (School of Advanced Materials Engineering, Dong-Eui University) ;
  • Choi, Dooho (School of Advanced Materials Engineering, Dong-Eui University)
  • 민창흠 (동의대학교 신소재공학부) ;
  • 최두호 (동의대학교 신소재공학부)
  • Received : 2022.10.13
  • Accepted : 2022.10.20
  • Published : 2022.10.31
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Abstract

Herein, we studied ultrathin Cu-layer-based transparent heaters embedded between a ZnO underlayer and an Al2O3 overlayer. The anti-reflecting functions for the ZnO and Al2O3 layers by independently varying the layer thicknesses, with the Cu layer thickness fixed at 8.5 nm. The smallest visible light transmittance of 11.1% was achieved when the overlayer and underlayer thicknesses were 90 and 30 nm, respectively. We conducted electrically driven Joule heating test for the Cu layers having thicknesses of 8.5 nm (Rs: 14.7 Ohm/sq.) and 19 nm (Rs: 3.4 Ohm/sq.). External voltages were increased with an interval of 2 V until irreversible failures occurred at temperatures of ~390 ℃ and 550 ℃, respectively. At each voltage increase before heater failures, the heater exhibited superior thermal response with the heater temperatures reaching over 90% of the final temperatures. The heaters also showed excellent reproducibility when turning on and off the heater repeatedly.

Keywords

Acknowledgement

This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIT) (grant number NRF-2022R1A2B5B01001938) and Basic Science Research Capacity Enhancement Project through Korea Basic Science Institute (Core-facility for Converging Materials) grant funded by the Ministry of Education (2019R1A6C1010045). This work was supported by Dong-eui University Grant (202201630001)

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