Korean Chemical Engineering Research

  • 제60권3호
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  • Pages.452-458
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  • 2022
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  • 0304-128X(pISSN)
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  • 2233-9558(eISSN)
한국화학공학회 (The Korean Institute of Chemical Engineers)
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기-액 하이브리드 대기압 플라즈마 반응기 제작 및 특성 분석

Fabrication and Characterization of Gas-liquid Hybrid Reactor Equipped with Atmospheric Pressure Plasma

  • 권흥수 (강원대학교 화공.생물공학부) ;
  • 이원규 (강원대학교 화공.생물공학부)
  • Kwon, Heoung Su (Division of Chemical Engineering and Bioengineering, Kangwon National University) ;
  • Lee, Won Gyu (Division of Chemical Engineering and Bioengineering, Kangwon National University)
  • 투고 : 2022.01.13
  • 심사 : 2022.02.23
  • 발행 : 2022.08.01
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초록

3가지 종류의 기-액 하이브리드 수평형, 수직형 그리고 needle-to-cylinder형 플라즈마 반응기가 제작되었다. 이들 반응기를 통하여 대기압 플라즈마 방전에서 발생하는 반응 활성종 생성과 전극 내의 전위차를 통한 세정성분의 기-액 활성화 반응을 일으키는 고효율 친환경 기반의 세정 개념을 제시하였다. 세정성능에 대한 효율성을 비교한 결과, needle-to-cylinder형 반응기가 가장 우수한 특성을 가졌다. 본 연구를 통해 기-액 하이브리드 대기압 플라즈마 반응기가 반도체 공정 등 초정밀 세정공정에 응용 가능성이 있음을 확인하였다.

Three types of gas-liquid hybrid horizontal, vertical and needle-to-cylinder plasma reactors were fabricated. Through these reactors, a high-efficiency, eco-friendly cleaning concept that generates reactive active species generated in atmospheric plasma discharge and gas-liquid activation reaction of cleaning components through the potential difference within the electrode was presented. As a result of comparing the efficiency for cleaning performance, the needle-to-cylinder type reactor had the best characteristics. Through this study, it was confirmed that the gas-liquid hybrid atmospheric pressure plasma reactor has the potential to be applied to ultra-precision cleaning processes such as semiconductor processes.

키워드

과제정보

본 연구는 대한민국 정부의 재원으로 한국연구재단의 지원으로 수행되었습니다(NRF-2019R1A2C1005445).

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