측정점 교환방식 미세입자 모니터링 시스템 고도화

Advancement of Sequential Particle Monitoring System

  • 안성준 (제주한라대학교 지능형시스템공학과)
  • An, Sung Jun (Department of Intelligent Systems Engineering, Cheju Halla University)
  • 투고 : 2022.01.21
  • 심사 : 2022.03.25
  • 발행 : 2022.03.31

초록

In the case of the manufacturing industry that produces high-tech components such as semiconductors and large flat panel displays, the manufacturing space is made into a cleanroom to increase product yield and reliability, and various environmental factors have been managed to maintain the environment. Among them, airborne particle is a representative management item enough to be the standard for actual cleanroom grade, and a sequential particle monitoring system is usually used as one parts of the FMS (Fab or Facility monitoring system). However, this method has a problem in that the measurement efficiency decreases as the length of the sampling tube increases. In this study, in order to solve this problem, a multiple regression model was created. This model can correct the measurement error due to the decrease in efficiency by sampling tube length.

키워드

참고문헌

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