Acknowledgement
이 연구는 2021년도 산업통상자원부 및 산업기술평가관리원(KEIT) 연구비 지원에 의한 연구(n-TOPCon 효율 최적화 pn 접합 형성을 위한 붕소(boron) 도핑(doping) 장비기술개발 소재부품/개발패 키지형 사업, 20016058), 2014년도 산업통상자원부 '산업혁신인재성장지원사업'의 재원으로 한국산업기술진흥원(KIAT)의 지원을 받아 수행된 연구임(2021년 차세대 디스플레이 공정·장비·소재 전문인력 양성사업, 과제번호 : P0012453).
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