Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Synthesis and Characterization of Zinc Oxide Nanorods for Nitrogen Dioxide Gas Detection

  • Park, Jong-Hyun (Department of Materials Science and Engineering, Chungnam National University) ;
  • Kim, Hyojin (Department of Materials Science and Engineering, Chungnam National University)
  • Received : 2021.10.07
  • Accepted : 2021.10.26
  • Published : 2021.10.31
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Abstract

Synthesizing low-dimensional structures of oxide semiconductors is a promising approach to fabricate highly efficient gas sensors by means of possible enhancement in surface-to-volume ratios of their sensing materials. In this work, vertically aligned zinc oxide (ZnO) nanorods are successfully synthesized on a transparent glass substrate via seed-mediated hydrothermal synthesis method with the use of a ZnO nanoparticle seed layer, which is formed by thermally oxidizing a sputtered Zn metal film. Structural and optical characterization by x-ray diffraction (XRD), scanning electron microscopy (SEM), and Raman spectroscopy reveals the successful preparation of the ZnO nanorods array of the single hexagonal wurtzite crystalline phase. From gas sensing measurements for the nitrogen dioxide (NO2) gas, the vertically aligned ZnO nanorod array is observed to have a highly responsive sensitivity to NO2 gas at relatively low concentrations and operating temperatures, especially showing a high maximum sensitivity to NO2 at 250 ℃ and a low NO2 detection limit of 5 ppm in dry air. These results along with a facile fabrication process demonstrate that the ZnO nanorods synthesized on a transparent glass substrate are very promising for low-cost and high-performance NO2 gas sensors.

Keywords

Acknowledgement

This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2017R1D1A3B04030425).

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