Acknowledgement
This work was supported by Ceramic Strategic Research Program through Korea Institute of Ceramic Engineering & Technology (KICET).
References
- Y. Kobayashi, in Proceedings of the 37th Seminar on High-Temperature Ceramics (Osaka, Japan, 2005). ed. p. 17.
- G. Cunge, B. Pelissier, O. Joubert, R. Ramos and C. Maurice, Plasma Sourc. Sci. Tech., 14, 599 (2005). https://doi.org/10.1088/0963-0252/14/3/025
- D. M. Kim, Y. S. Oh, S. W. Kim, H. T. Kim, D. S. Lim and S. M. Lee, Thin Solid Films, 519, 6698 (2011). https://doi.org/10.1016/j.tsf.2011.04.049
- Y. Shiba, A. Teramoto, T. Goto, Y. Kishi, Y. Shirai and S. Sugaha, J. Vac. Sci. Technol., A, 35, 021405 (2017). https://doi.org/10.1116/1.4975143
- T. K. Lin, W. K. Wang, S. Y. Huang, C. T. Tasi and D. S. Wuu, Nanomaterials (Basel), 7, 183 (2017). https://doi.org/10.3390/nano7070183
- R. Tahara, T. Tsunoura, K. Yoshida, T. Yano and Y. Kishi, Jpn. J. Appl. Phys., 57, 06JF04 (2018). https://doi.org/10.7567/JJAP.57.06JF04
- Z. Chen, Z. Li, J. Li, C. Liu, C. Lao and Y. Fu, J. Eur. Ceram. Soc., 39, 661 (2019). https://doi.org/10.1016/j.jeurceramsoc.2018.11.013
- J. Deckers, J. Vleugels, J.-P. Kruth, J. Ceram. Sci. Technol., 05, 245 (2014).
- R. He, W. Liu, Z. Wu, D. An, M. Huang, H. Wu, Q. Jiang, X. Ji, S. Wu and Z. Xie, Ceram. Int., 44, 3412 (2018). https://doi.org/10.1016/j.ceramint.2017.11.135
- I. L. de Camargo, M. M. Morais, C. A. Fortulan and M. C. Branciforti, Ceram. Int., 47, 11906 (2021). https://doi.org/10.1016/j.ceramint.2021.01.031
- T. Zheng, W. Wang, J. Sun, J. Liu and J. Bai, Ceram. Int., 46, 8682 (2020). https://doi.org/10.1016/j.ceramint.2019.12.102
- M. Krkobabic, D. Medarvic, S. Cvijc, B. Grujic and S. Ibric, Int. J. Pharm., 572, 118790 (2019). https://doi.org/10.1016/j.ijpharm.2019.118790
- Z. Chen, J. Li, C. Liu, Y. Liu, J. Zhu and C. Lao, Ceram. Int., 45, 11549 (2019). https://doi.org/10.1016/j.ceramint.2019.03.024
- K. Zhang, C. Xie, G. Wang, R. Hea, G. Ding, M. Wang, D. Dai and D. Fang, Ceram. Int., 45, 203 (2019). https://doi.org/10.1016/j.ceramint.2018.09.152
- C. J. Bae and J. W. Halloran, J. Eur. Ceram. Soc., 39, 4299 (2019). https://doi.org/10.1016/j.jeurceramsoc.2019.05.034
- R. Srivastavab, J. Liua, C. Hea and Y. Sun, Mater. Sci. Eng., C, 88, 25 (2018). https://doi.org/10.1016/j.msec.2018.01.011
- A. M. Homola and H. V. Nguyen, J. Chem. Phys., 94, 2346 (1991). https://doi.org/10.1063/1.459906
- A. Thakur, A. K. Banthia and B. R. Maw, J. Appl. Polym. Sci., 58, 959 (1995). https://doi.org/10.1002/app.1995.070580601
- C. Nason, T. Roper, C. Hoyle and J. A. Pojman, Macromolecules, 38, 5506 (2005). https://doi.org/10.1021/ma048569y