Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Measurement of Step Difference using Digital Holography of ITO Thin Film Fabricated by Sputtering Method

스퍼터링 공법으로 제작한 ITO 박막의 디지털 홀로그래피를 이용한 단차에 대한 측정

  • Jung, Hyun Il (Dept. of Mechanical System & Automotive Engineering, Graduate School, Chosun UNIV.) ;
  • Shin, Ju Yeop (Habaek Co.,Ltd.) ;
  • Park, Jong Hyun (Dept. of Mechanical System & Automotive Engineering, Graduate School, Chosun UNIV.) ;
  • Jung, Hyunchul (Center for Scientfic Instruments, Industry Academic Cooperation foundation, Chosun UNIV.) ;
  • Kim, Kyeong-suk (Dept. of Mechanical Engineering, Chosun UNIV.)
  • 정현일 (조선대학교 일반대학원 기계시스템미래자동차공학과) ;
  • 신주엽 ((주)하백) ;
  • 박종현 (조선대학교 일반대학원 기계시스템미래자동차공학과) ;
  • 정현철 (조선대학교 산학협력단 공동장비운영센터) ;
  • 김경석 (조선대학교 공과대학 기계공학과)
  • Received : 2021.06.17
  • Accepted : 2021.07.18
  • Published : 2021.09.30
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Abstract

Indium tin oxide (ITO) transparent electrodes, which are used to manufacture organic light-emitting diodes, are used in light-emitting surface electrodes of display EL panels such as cell phones and TVs, liquid crystal panels, transparent switches, and plane heating elements. ITO is a major component that consists of indium and tin and is advantageous in terms of obtaining sheet resistance and light transmittance in a thin film. However, the optical performance of devices decreases with an increase in its thickness. A digital holography system was constructed and measured for the step measurement of the ITO thin film, and the reliability of the technique was verified by comparing the FE-SEM measurement results. The error rate of the step difference measurement was within ±5%. This result demonstrated that this technique is useful for applications in advanced MEMS and NEMS industrial fields.

Keywords

Acknowledgement

이 논문은 2019년도 조선대학교 학술연구비 지원에 의하여 연구되었음.

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