Current Photovoltaic Research

Korea Photovoltaic Society (한국태양광발전학회)
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Effect of Sputtering Power on Optical and Electrical Properties of SnOx Electron Transport Layer Deposited by RF-magnetron Sputtering

RF-마그네트론 스퍼터링으로 증착된 산화주석 전자수송층의 광학적 및 전기적 특성에 대한 증착 전력의 영향

  • Hwang, Ji Seong (Department of Materials Science and Engineering, Korea University) ;
  • Lee, Wonkyu (Department of Materials Science and Engineering, Korea University) ;
  • Hwang, Jae Keun (Department of Materials Science and Engineering, Korea University) ;
  • Lee, Sang-Won (Department of Materials Science and Engineering, Korea University) ;
  • Hyun, Ji Yeon (Department of Materials Science and Engineering, Korea University) ;
  • Lee, Solhee (Department of Materials Science and Engineering, Korea University) ;
  • Jeong, Seok Hyun (Department of Materials Science and Engineering, Korea University) ;
  • Kang, Yoonmook (KU-KIST Green School, Graduate School of Energy and Environment, Korea University) ;
  • Kim, Donghwan (Department of Materials Science and Engineering, Korea University) ;
  • Lee, Hae-Seok (KU-KIST Green School, Graduate School of Energy and Environment, Korea University)
  • 황지성 (신소재공학과, 고려대학교) ;
  • 이원규 (신소재공학과, 고려대학교) ;
  • 황재근 (신소재공학과, 고려대학교) ;
  • 이상원 (신소재공학과, 고려대학교) ;
  • 현지연 (신소재공학과, 고려대학교) ;
  • 이솔희 (신소재공학과, 고려대학교) ;
  • 정석현 (신소재공학과, 고려대학교) ;
  • 강윤묵 (KU-KIST 그린스쿨대학원, 고려대학교) ;
  • 김동환 (신소재공학과, 고려대학교) ;
  • 이해석 (KU-KIST 그린스쿨대학원, 고려대학교)
  • Received : 2020.11.25
  • Accepted : 2021.02.17
  • Published : 2021.03.31
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Abstract

The properties of the electron transport layer (ETL) have a great effect on perovskite solar cell performance. Depositing conformal SnO2 ETL on bottom textured silicon cells is essential to increase current density in terms of the silicon-perovskite tandem solar cells. In the recent study, the SnO2 electron transport layer deposited by the sputtering method showed an efficiency of 19.8%. Also, an electron transport layer with a sputtered TiO2 electron transport layer in a 4-terminal tandem solar cell has been reported. In this study, we synthesized SnOx ETL with a various sputtering power range of 30-60W by Radio-frequency (RF)-magnetron sputtering. The properties of SnOx thin film were characterized using ellipsometer, UV-vis spectrometer, and IV measurement. With a sputtering power of 50W, the solar cell showed the highest efficiency of 13.3%, because of the highest fill factor by the conductivity of SnOx film.

Keywords

References

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