Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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A Study on the Application of Thin Film Passivation and Crystalline Silicon Solar Cells Using PECVD Process

PECVD 공정을 이용한 후면 패시베이션 및 결정질 실리콘 태양전지 적용에 관한 연구

  • Kim, Kwan-Do (Dept. of Convergence Software, PyeongTaek University)
  • 김관도 (평택대학교 융합소프트웨어학과)
  • Received : 2020.06.11
  • Accepted : 2020.06.22
  • Published : 2020.06.30
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Abstract

In this study, SiNx and Al2O3 thin film was manufactured using PECVD deposition process and applied to crystalline silicon solar cells, resulting in 16.7% conversion efficiency. The structural improvement experiment of the rear electrode resulted in a 1.7% improvement in conversion efficiency compared to the reference cell by reducing the recombination rate of minority carriers and increasing the carrier lifetime by forming a passivation layer consisting of SiNx and Al2O3 thin films through the PECVD process.

Keywords

References

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