Safety and Health at Work

Occupational Safety and Health Research Institute, Korea Occupational Safety and Health Agency (산업안전보건연구원)
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Chemical Use and Associated Health Concerns in the Semiconductor Manufacturing Industry

  • Yoon, Chungsik (Department of Environmental Health, School of Public Health, Seoul National University) ;
  • Kim, Sunju (Department of Environmental Health, School of Public Health, Seoul National University) ;
  • Park, Donguk (Department of Environmental Health, Korea National Open University) ;
  • Choi, Younsoon (Management and Planning Bureau, Korea Occupational Safety and Health Agency) ;
  • Jo, Jihoon (Occupational Safety and Health Research Institute, Korea Occupational Safety and Health Agency) ;
  • Lee, Kwonseob (Occupational Safety and Health Research Institute, Korea Occupational Safety and Health Agency)
  • Received : 2019.03.15
  • Accepted : 2020.04.12
  • Published : 2020.12.30
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Abstract

Background: Research on the status of many chemicals used in the semiconductor industry is needed. The purpose of this study was to describe the overall status of chemical use in the semiconductor industry in Korea and to examine it from a health perspective. Methods: Data on the status of chemical use and safety data sheets at 11 of 12 major semiconductor workplaces in Korea were collected. The number of chemical products and chemical constituents, quantities of chemicals, and trade secret ingredients used, as well as the health hazards were examined. Results: On average, 210 chemical products and 135 chemical constituents were used at the surveyed workplaces. Among all chemical products, 33% (range: 16-56%) contained at least one trade secret ingredient. Most of the trade secret ingredients were used in the photolithography process. Several carcinogens, including sulfuric acid, chromic acid, ethylene oxide, crystalline silica, potassium dichromate, and formaldehyde were also used. Only 29% (39 of 135) of the chemical constituents had occupational exposure limits, and more than 60% had no National Fire Protection Association health, safety, and reactivity ratings. Based on the aforementioned results, this study revealed the following. First, many chemical products and constituents are being used in the semiconductor industry and many products contained trade secret ingredients. Second, many products contained significant amounts of carcinogenic, mutagenic, and reproductive toxicant materials. Conclusion: We conclude that protecting workers in the semiconductor industry against harm from chemical substances will be difficult, due to widespread use of trade secret ingredients and a lack of hazard information. The findings of the status of chemical use and the health and safety risks in semiconductor industry will contribute to epidemiological studies, safe workplace, and worker health protection.

Keywords

Acknowledgement

This work was supported by the BK21 Plus project (No. 5280-20180100), a grant funded by theNational Research Foundation of Korea (NRF).

References

  1. Williams RS. The evolution of technology for electronic materials over the last 50 years. J Occup Med 2007;59:58-62.
  2. Hwang CG. Semiconductor memories for IT era. In: Solid-state circuits conference 2002. p. 24-7. Digest of Technical Papers ISSCC 2002 IEEE International 2002.
  3. Kang SW, Han JU, Kim YT, Yoon SB. Semiconductor device having transistor with vertical gate electrode and method of fabricating the same; 2011. US Patent US 7936003 B2.
  4. Arden W. Future semiconductor material requirements and innovations as projected in the ITRS 2005 roadmap. Mater Sci Eng B 2006;134:104-8. https://doi.org/10.1016/j.mseb.2006.07.004.
  5. LaDou J, Bailar JC. Cancer and reproductive risks in the semiconductor industry. Int J Occup Environ Health 2007;13:376-85. https://doi.org/10.1179/oeh.2007.13.4.376.
  6. LaDou J, Rohm T. The international electronics industry. Int J Occup Environ Health 1998;4:1-18. https://doi.org/10.1179/oeh.1998.4.1.1.
  7. Smith T, Sonnenfeld DA, Pellow DN. Challenging the chip: labor rights and environmental justice in the global electronics industry. Temple University Press; 2006.
  8. Kim MH, Kim H, Paek D. The health impacts of semiconductor production: an epidemiologic review. Int J Occup Environ Health 2014;20:95-114. https://doi.org/10.1179/2049396713Y.0000000050.
  9. Villard A, Lelah A, Brissaud D. Drawing a chip environmental profile: environmental indicators for the semiconductor industry. J Clean Prod 2015;86:98-109. https://doi.org/10.1016/j.jclepro.2014.08.061.
  10. FocusTaiwan. NT$560 million awarded in RCA pollution case. http://focustaiwan.tw/news/asoc/201504170015.aspx 2015; 2015.
  11. Belanger PL, Whorton MD, Milby TH. HHE report no. HHE-79-66, Signetics Corporation, Sunnyvale, California, interim report. no. 2. National Institute for Occupational Safety and Health, HHE 79-66; 1980. p. 1-17.
  12. Wade R, Williams M, Mitchell T, Wong J, Tuse B. Semiconductor industry study. San Francisco: California Department of Industrial Relations, Division of Occupational Safety and Health, Taskforce on the Electronics Industry; 1981.
  13. Bender TJ, Beall C, Cheng H, Herrick RF, Kahn AR, Matthews R, Sathiakumar N, Schymura MJ, Stewart JH, Delzell E. Cancer incidence among semiconductor and electronic storage device workers. Occup Environ Med 2007;64:30-6. https://doi.org/10.1136/oem.2005.023366.
  14. Boice Jr JD, Marano DE, Munro HM, Chadda BK, Signorello LB, Tarone RE, Blot WJ, McLaughlin JK. Cancer mortality among US workers employed in semiconductor wafer fabrication. J Occup Environ Med 2010;52:1082-97. https://doi.org/10.1097/JOM.0b013e3181f7e520.
  15. McElvenny DM. Investigation of cancer incidence and mortality at a Scottish semiconductor manufacturing facility. Occup Med 2003;53:419-30. https://doi.org/10.1093/occmed/kqg111.
  16. Nichols L, Sorahan T. Cancer incidence and cancer mortality in a cohort of UK semiconductor workers, 1970-2002. Occup Med 2005;55:625-30. https://doi.org/10.1093/occmed/kqi156.
  17. Clapp RW. Mortality among US employees of a large computer manufacturing company: 1969-2001. Environ Health 2006;5:30. https://doi.org/10.1186/1476-069X-5-30.
  18. Darnton A, Wilkinson S, Miller B, MacCalmna L, Galea K, Shafrir A, Cherrie J, McElvenny D, Osman J. A further study of cancer among the current and former employees of National Semiconductor (UK) Ltd. UK: Health and Safety Executive; 2010.
  19. Lee HE, Kim EA, Park J, Kang SK. Cancer mortality and incidence in Korean semiconductor workers. Saf Health Work 2011;2:135-47. https://doi.org/10.5491/SHAW.2011.2.2.135.
  20. Tenenbaum DJ. Short-circuiting environmental protections? Environ Health Perspect 2003;111:A278. https://doi.org/10.1289/ehp.111-a278.
  21. Yoon C. Much concern but little research on semiconductor occupational health issues. J Korean Med Sci 2012;27:461-4. https://doi.org/10.3346/jkms.2012.27.5.461.
  22. Kim EA, Lee S, Seo HK, Jeon KY, Park SW. Epidemiological survey on health status of semiconductor manufacturing workers-focusing on cancer diseases-. Ulsan (Korea). Occupational Safety and Health Research Institute(OSHRI), Korea Occupational Safety and Health Agency; 2019. Report No. 2019-OSHRI271. pp.1-8, 80-150. [in Korean].
  23. Kim S, Yoon C, Ham S, Park J, Kwon O, Park D, Choi S, Kim S, Ha K, Kim W. Chemical use in the semiconductor manufacturing industry. Int J Occup Environ Health 2018;24:109-18. https://doi.org/10.1080/10773525.2018.1519957.
  24. Environment ITRS. Safety, and health summary. http://www.itrs.net/home.html 2015. [Accessed 7 May 2018]; 2015.
  25. IEEE (Institute of electrical and electronics engineers). International roadmap for devices and systems; 2016. 2016 Edition, Environment, Safety, and Health white paper.
  26. Jang M, Yoon C, Park J, Kwon O. Evaluation of hazardous chemicals with material safety data sheet and by-products of a photoresist used in the semiconductor-manufacturing industry. Saf Health Work 2019;10:114-21. https://doi.org/10.1016/j.shaw.2018.08.001.

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