Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Enhancement of Hydrophobicity by a Heat Treatment of Zinc Aluminate Thin Film Deposited on Glass Substrate

글라스 기판 위에 증착된 Zin Aluminate 박막의 열처리를 통한 소수성 특성의 향상

  • Seo, Sang-Young (Department of Materials Science Engineering, Chungnam National University) ;
  • Yoon, Soon-Gil (Department of Materials Science Engineering, Chungnam National University)
  • Received : 2020.04.08
  • Accepted : 2020.04.13
  • Published : 2020.07.01
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Abstract

An 80 nm thick zinc aluminate thin film was deposited on a glass substrate via radio-frequency (rf) magnetron sputtering and heat treated to analyze changes in the wetting angles due to a surface modification. The thin films were modified from hydrophilic to hydrophobic by a simple thermal treatment. The surface modification from a heat treatment increased the wetting angles up to 111°, which was explained by the relationship with the excess surface area. The wetting angles of the annealed thin films decreased with increasing exposure time under ambient conditions, which was attributed to the oxygen vacancies in the films that were introduced during deposition. The annealed thin films were treated by ionized oxygen via oxygen plasma. After the oxygen plasma treatment, the decreased wetting angles were maintained at ~95° for 11 days.

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References

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