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피드스루용 세라믹의 선삭 가공 특성에 관한 연구

Turning the Machining Characteristics of Feed-through Ceramics

  • 박세진 (모던세라믹스(주)) ;
  • 하준태 (모던세라믹스(주)) ;
  • 양동호 (금오공과대학교 기계설계공학과) ;
  • 이종찬 (금오공과대학교 기계설계공학과)
  • 투고 : 2020.05.06
  • 심사 : 2020.06.07
  • 발행 : 2020.10.31

초록

A ceramic vacuum chamber feedthrough ceramic insulator is made of Al2O3; the manufacturing process involves filling alumina powder into a urethane mold and pressing it with a rubber press to produce a molded body. Thereafter, manufacturing is completed through primary shape processing, sintering, and secondary shape processing in the green body, which is a pressurized molding body, This work is intended to prevent defects in the first shape processing by improving the ceramic insulator in the green body, and to improve the productivity of the ceramic insulator by determining the optimal processing conditions.

키워드

참고문헌

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