Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Error Compensation due to Environmental Temperature for Diaphragm-Type Pressure Sensor

다이어프램형 압력센서에서 주변 온도에 의한 오차 보상

  • Received : 2019.04.24
  • Accepted : 2019.05.28
  • Published : 2019.05.31
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Abstract

Pressure sensors are used in various industries such as automobiles, airplanes, medical equipment, and coolers. Even if the ambient temperature changes, the measurement is reliable and stable. In this study a diaphragm-type pressure sensor was used to derive a temperature-compensated pressure estimation equation for accurate pressure measurement at $100^{\circ}C$ and $-40^{\circ}C$. To understand the characteristics of the pressure sensor diaphragm with respect to temperature and pressure, experiments were conducted in temperature-variable chamber using FEM analysis to confirm that the influence of temperature effect was nonlinear. Based on the experimental results, a nonlinear method for calculating the pressure by compensating for the error due to temperature was derived. The calculated pressure value is lower than 0.5 % at low and high temperatures, and lower than 0.4 % at $22^{\circ}C$, thereby eliminating the effect of temperature.

Keywords

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Fig. 1. Diaphragm type pressure sensor and its cross section

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Fig. 2. Effect of environmental temperature on diaphragm displacement; (a) -40℃, (b) 100℃

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Fig. 3. FEM result of diaphragm displacement; (a) under different temperature, (b) under different pressure

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Fig. 4. Displacement measurement test in a pressure chamber

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Fig. 5. Measured diaphragm displacement in a pressure chamber; (a) under different temperature, (b) under different pressure

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Fig. 6. Nonlinear surface of diaphragm displacement according to pressure and temperature

Table 1. Diaphragm displacement according to temperature and pressure (unit: μm)

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Table 2. Compensated pressure by use of each measured temperature and displacement

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