한국결정성장학회지 (Journal of the Korean Crystal Growth and Crystal Technology)

  • 제29권6호
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  • Pages.294-297
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  • 2019
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  • 1225-1429(pISSN)
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  • 2234-5078(eISSN)
한국결정성장학회 (The Korea Association of Crystal Growth)
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The effect of rotation on the macro-steps formation during 4H-SiC solution growth

  • Shin, Yun-Ji (Energy Efficient Materials Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Park, Tae-Yong (Energy Efficient Materials Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Bae, Si-Young (Energy Efficient Materials Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Jeong, Seong-Min (Energy Efficient Materials Center, Korea Institute of Ceramic Engineering and Technology)
  • 투고 : 2019.09.23
  • 심사 : 2019.11.26
  • 발행 : 2019.12.31
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초록

New insights about macro-step formation has been investigated. The phenomena of surface instability caused by the interaction between step flow and fluid flow was describe in mechanical way. The rotation of the seed crystal in a clockwise direction was applied with a speed varied from 30 to 200 rpm during the TSSG process on the Si- and C-faces 4H-SiC. The macro-steps were formed along the two specific directions at different locations on the crystal for each, i.e., [10-10] or [01-10] directions or both. From the results, it is suggested that the macro-steps were generated from the micro-steps by interaction between step flow and fluid flow during the rotation of seed crystal. Furthermore, The fluid flow could be effective to control the micro- and/or macro-step behavior during solution growth.

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참고문헌

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