DOI QR코드

DOI QR Code

전자소자 기반 테라헤르츠 반도체 기술 동향

Trends in Terahertz Semiconductor based on Electron Devices

  • 발행 : 2018.12.01

초록

Traditionally, many researchers have conducted research on terahertz technology utilizing optical devices such as lasers. However, nanometer-scale electronic devices using silicon or III-V compound semiconductors have received significant attention regarding the development of a terahertz system owing to the rapid scaling down of devices. This enables an operating frequency of up to approximately 0.5 THz for silicon, and approximately 1 THz for III-V devices. This article reviews the recent trends of terahertz monolithic integrated circuits based on several electronic devices such as CMOS, SiGe BiCMOS, and InP HBT/HEMT, and a particular quantum device, an RTD.

키워드

HJTOCM_2018_v33n6_34_f0001.png 이미지

(그림 1) 테라헤르츠 시스템의 다양한 응용

HJTOCM_2018_v33n6_34_f0002.png 이미지

(그림 2) 테라헤르츠 신호원 구현 방법: (a) VCO에 의한 하모닉 성분 추출방법, (b) 체배기에 의한 신호원 생성

HJTOCM_2018_v33n6_34_f0003.png 이미지

(그림 3) RTD 원리 및 RTD oscillator 구조: (a) RTD 동작원리 (b) RTD 발진기 구조

<표 1> 단일 VCO 기반의 테라헤르츠 소스원 성능 비교

HJTOCM_2018_v33n6_34_t0001.png 이미지

참고문헌

  1. TeraView, "Teraherts Equipment," http://www.teraview.com/products/TeraPulse%204000/index.html
  2. Terasense, http://terasense.com/
  3. C.M. Armstrong, "The Truth about Terahertz," IEEE Spectrum, vol. 49, no. 9, Sept. 2012, pp. 36-41. https://doi.org/10.1109/MSPEC.2012.6281131
  4. R.L. Schmid et al., "A Comparison of the Degradation in RF Performance due to Device Interconnects in Advanced SiGe HBT and CMOS Technologies," IEEE Trans. Electron Devices, vol. 62, no. 6, June 2015, pp. 1803-1810. https://doi.org/10.1109/TED.2015.2420597
  5. M. Adnan and E. Afshari, "A 247-to-263.5 GHz VCO with 2.6mW Peak Output Power and 1.14% DC-to-RF Efficiency in 65nm Bulk CMOS," IEEE Int. Solid-State Circuits Conf. (ISSCC) Dig. Tech. Papers, San Francisco, CA, USA, Feb. 2014, pp. 262-263.
  6. H. Koo et al., "Design and Analysis of 239 GHz CMOS Push-Push Transformer-Based VCO with High Efficiency and Wide Tuning Range," IEEE Trans. Circuits Syst. I, Reg. Papers, vol. 62, no. 7, July 2015, pp. 1883-1893. https://doi.org/10.1109/TCSI.2015.2426957
  7. P.Y. Chinag et al., "A Silicon-Based 0.3 THz Frequency Synthesizer with Wide Locking Range," IEEE J. Solid State Circuits, vol. 49, no. 12, Dec. 2014, pp. 2951-2963. https://doi.org/10.1109/JSSC.2014.2360385
  8. C. Jiang et al., "An Efficient 210 GHz Compact Harmonic Oscillator with 1.4 dBm Peak Output Power and 10.6% Tuning Range," IEEE Radio Freq. Integr. Circuits Symp. (RFIC), San Francisco, CA, USA, May 2016, pp. 194-197.
  9. J. Zhang et al., "85-to-127 GHz CMOS Signal Generation Using a Quadrature VCO with Passive Coupling and Broadband Harmonic Combining for Rotational Spectroscopy," IEEE J. Solid State Circuits, vol. 50, no. 6, June 2015, pp. 1361-1371. https://doi.org/10.1109/JSSC.2015.2416312
  10. Y. Tousi and E. Afshari, "A High-Power and Scalable 2-D Phased Array for Terahertz CMOS Integrated Systems," IEEE J. Solid State Circuits, vol. 50, no. 2, Feb. 2015, pp. 597-609. https://doi.org/10.1109/JSSC.2014.2375324
  11. K. Schmalz et al., "245 GHz SiGe Transmitter for Gas Spectroscopy," IEEE Compound Semicond. Integr. Circuit Symp., La Jolla, CA, USA, Oct. 2014, pp. 1-4.
  12. X. Mei et al., "First Demonstration of Amplification at 1 THz using 25-nm InP High Electron Mobility Transistor Process," IEEE Electron Device Lett., vol. 36, no. 4, Apr. 2015, pp. 327-329. https://doi.org/10.1109/LED.2015.2407193
  13. Z. Griffith et al., "A 23.2 dBm at 210 GHz to 21.0dBm at 235 GHz 16-Way PA-cell combined InP HBT SSPA," IEEE Compound Semicond. Integr. Circuit Symp., La Jolla, CA, USA, Oct. 2014, pp. 1-4.
  14. M. Urteaga et al., "InP HBT Technologies for THz Integrated Circuits," Proc. IEEE, vol. 105, no. 6, May 2017, pp. 1051-1067. https://doi.org/10.1109/JPROC.2017.2692178
  15. K. Leong et al., "850 GHz Receiver and Transmitter Front-Ends Using InP HEMT," IEEE Trans. THz Sci. Technol., vol. 7, no. 4, July 2017, pp. 466-475. https://doi.org/10.1109/TTHZ.2017.2710632
  16. H. Sugiyama et al., "Room-Temperature Resonant-Tunneling-Diode Terahertz Oscillator Based on Precisely Controlled Semiconductor Epitaxial Growth Technology," NTT Technical Rev., vol. 9, no. 10, Oct. 2011, pp. 1-6.
  17. R. Izumi et al., "1.98 THz Resonant-Tunneling-Diode Oscillator with Reduced Conduction Loss by Thick Antenna Electrode," Int. Conf. Infrared, Millimeter, Terahertz Waves (IRMMW-THz), Cancun, Mexico, Aug. 2017, pp. 1-2.