Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)

The Korean Microelectronics and Packaging Society (한국마이크로전자및패키징학회)
권호 표지
DOI QR코드

DOI QR Code

Optical Properties of All Solution processed ZnO/Ag/ZnO Multilayers

용액공정으로 제작한 ZnO/Ag/ZnO 다층구조의 광학적 특성 연구

  • Lee, Hyungin (Department of Advanced Materials Engineering, Kyonggi University) ;
  • Kim, Jiwan (Department of Advanced Materials Engineering, Kyonggi University)
  • 이형인 (경기대학교 신소재공학과) ;
  • 김지완 (경기대학교 신소재공학과)
  • Received : 2018.12.03
  • Accepted : 2018.12.27
  • Published : 2018.12.31
Download PDF
⟨ Previous Next ⟩

Abstract

Various ZnO/Ag/ZnO multilayers were fabricated and their optical properties were investigated. Top and bottom ZnO layers were formed by sol-gel method and mid-metal layers were deposited by spin coating. To find suitable deposition condition of Ag, we measure thickness and sheet resistance of Ag monolayer. After the optimization of Ag monolayer, we fabricate ZnO/Ag/ZnO multilayers. Transmittance of ZnO/Ag/ZnO multilayers increased to 63%. In near IR region, transmittance of ZnO/Ag/ZnO multilayers decreased to 35% when the concentration of Ag solution was 2.5wt%.

본 논문은 용액공정으로 제작한 ZnO/Ag/ZnO 다층구조의 투과도에 대해 연구하였다. 다양한 두께의 ZnO/Ag/ZnO 다층구조를 스핀코팅을 이용해 제작하였고 광학적 특성을 측정하였다. ZnO는 졸겔법으로 제작하였고 Ag는 Ag 용액을 이용해 스핀코팅으로 증착하였다. 최적화된 Ag 두께를 찾기 위해 Ag 용액의 농도, 스핀코팅의 회전속도를 조절하고 두께와 면저항을 측정하였다. ZnO/Ag/ZnO 다층구조의 투과도는 가시광 영역에서 최대 63%까지 증가하였다. 적외선 영역에서 ZnO/Ag/ZnO 다층구조의 투과도는 Ag 용액의 농도가 2.5wt%일 때 투과도가 35%까지 감소하였다.

Keywords

MOKRBW_2018_v25n4_119_f0001.png 이미지

Fig. 2. Correlation graph of sheet resistance and thickness of Ag monolayer deposited by spin coating.

MOKRBW_2018_v25n4_119_f0002.png 이미지

Fig. 3. Transmittance of Ag monolayer deposited by spin coating.

MOKRBW_2018_v25n4_119_f0003.png 이미지

Fig. 4. Transmittance spectra of ZnO/Ag/ZnO multilayers with various deposition condition of Ag layer.

MOKRBW_2018_v25n4_119_f0004.png 이미지

Fig. 5. Photograph of ZnO/Ag/ZnO multilayers coated glass on the background images.

MOKRBW_2018_v25n4_119_f0005.png 이미지

Fig. 1. (a) XRD pattern of ZnO layer deposited by sol-gel method, (b) Transmittance of ZnO layer deposited by sol-gel method.

References

  1. Q. Wan, E. N. Dattoli, and W. Lu, "Transparent metallic Sbdoped $SnO_2$ nanowires", Appl. Phys. Lett., 90, 222107 (2007). https://doi.org/10.1063/1.2743746
  2. M. Purica, E. Budianu, E. Rusu, M. Danila, and R.Gavrila, "Optical and structural investigation of ZnO thin film prepared by chemical vapor deposition (CVD)", Thin Solid Films, 403(1), 485 (2002).
  3. T. Minami, H. Sonohara, T. Kakumu, and S. Takata, "Physics of very thin ITO conducting films with high transparency prepared by DC magnetron sputtering", Thin Solid Films, 270(1-2), 37 (1995). https://doi.org/10.1016/0040-6090(95)06889-9
  4. M. H. Ahn, E. S. Cho, and S. J. Kwon, "Characteristics of ITO-resistive touch film deposited on a PET substrate by inline DC magnetron sputtering", Vacuum, 101, 221 (2014). https://doi.org/10.1016/j.vacuum.2013.08.018
  5. E.-S. Jang, "Recent progress in synthesis of plate-like ZnO and its applications:A review", J. Korean Ceram Soc., 54(3), 167 (2017). https://doi.org/10.4191/kcers.2017.54.3.04
  6. V. Bhosle, A. Tiwari, and J. Narayan, "Metallic conductivity and metal-semiconductor transition in Ga-doped ZnO", Appl. Phys. Lett., 88, 032106 (2006). https://doi.org/10.1063/1.2165281
  7. G. M. Nam, and M. S. Kwon, "Characterization of F-and Alcodoped ZnO transparent conducting thin film prepared by sol-gel spin coating method", J. Korean Ceram. Soc., 53, 338 (2016). https://doi.org/10.4191/kcers.2016.53.3.338
  8. J. Y. Kim, B. G. Kim, Y. K. Lee, J. H. Kim, D. H. Woo, S. Y. Kweon, D. G. Lim, and J. H. Park, "Properties of Ga-doped ZnO transparent conducting oxide fabricated on PET substrate by RF sputtering", J. Microelectron. Packag. Soc., 17(1), 19 (2010).
  9. G. H. Bang and D. Choi, "Aluminum based ZnO/Al/ZnO flexible transparent electrodes fabricated by magnetron sputtering", J. Microelectron. Packag. Soc., 25(2), 31-34 (2018) https://doi.org/10.6117/KMEPS.2018.25.2.031
  10. D. R. Sahu and J. L. Huang, "High quality transparent conductive ZnO/Ag/ZnO multilayers films deposited at room temperature", Thin Solid Films, 515(3), 876 (2006). https://doi.org/10.1016/j.tsf.2006.07.049
  11. H. Han, N. D. Theodore and T. L. Alford, "Improved conductivity and mechanism of carrier transport in zinc oxide with embedded silver layer", J. Appl. Phys., 103, 013708 (2008). https://doi.org/10.1063/1.2829788
  12. T. Muller and H. Nienhaus, "Ultrathin Ag films on H:Si(111)-1${\times}$1 surfaces deposited at low temperatures", J. Appl. Phys., 93, 924 (2003). https://doi.org/10.1063/1.1530714