Fig. 1. Procedure for the formation of 3D hierarchical hybrid nanostructure by 2-step nano-transfer printing (n-TP). (Step 1) Formation of polymeric replica pattern. (Step 2) Repetitive pattern transfer process using a n-TP.
Fig. 2. Pattern formation of cross-bar hybrid structures by twice n-TP process. Transfer-printed Pt cross-bar array with a width of (a) 2 mm / 2 mm and (b) 1 mm / 250 nm. Well-ordered cross-bar pattern of (c) Pt 2 mm / WO3 2 mm and (d) Pt 1 m / WO3 250 nm line width.
Fig. 3. Highly ordered 3D hybrid pattern on a flexible PI film. (a) Schematic illustration of multi-stacked Pt triangle pattern. Photo images of triple-stacked (b) Pt triangle pattern and (e) Pt/WO3 hybrid nanostructure. (c) SEM image of Pt triangle pattern (line width: 1 mm-2 mm-250 nm). (d) Procedure for formation of Pt/WO3 hybrid nanostructure using a n-TP process. (f) Structural SEM analysis of Pt-WO3-Pt pattern with a width of 1 mm-1 mm-250 nm.
Fig. 4. Distribution of line-width for Pt-WO3-Pt hybrid nanostructure on PI.
참고문헌
- C. Zhu, A. Chortos, Y. Wang, R. Pfattner, T. Lei, A. C. Hlnckley, I. Pochorovski, X. Yan, J. W.-F. To, J. Y. Oh, J. B.-H. Tok, Z. Bao and B. Murmann, Stretchable temperature-sensing circuits with strain suppression based on carbon nanotube transistors, Nat. Electron., 1 (2018) 183-190. https://doi.org/10.1038/s41928-018-0041-0
- H.-E. Lee, H.-Y. Ahn, J. Mun, Y. Y. Lee, M. Kim, N. H. Cho, K. Chang, W. S. Kim, J. Rho and K. T. Nam, Amino-acid- and peptide-directed synthesis of chiral plasmonic gold nanoparticles, Nature, 556 (2018) 360-365. https://doi.org/10.1038/s41586-018-0034-1
- Y. Zhu, S. Murali, W. Cai, X. Li, J. W. Suk, J. R. Potts and R. S. Ruoff, Graphene and Graphene Oxide?: Synthesis , Properties , and Applications, Adv. Mater., 22 (2010) 3906-3924. https://doi.org/10.1002/adma.201001068
- W. Seung, M. K. Gupta, K. Y. Lee, K.-S. Shin, J.-H. Lee, T. Y. Kim, S. Kim, J. Lin, J. H. Kim and S.-W. Kim, Nanopatterned textile-based wearable triboelectric nanogenerator, ACS Nano, 4 (2015) 3501-3509.
- T. Yamada, Y. Hayamizu, Y. Yamamoto, Y. Yomogida, A. L.-Najafabadi, D. N. Futaba and K. Hata, A stretchable carbon nanotube strain sensor for human-motion detection, Nat. Nanotechnol., 6 (2011) 296-301. https://doi.org/10.1038/nnano.2011.36
- Z. L. Wang and W. Wu, Nanotechnology-enabled energy harvesting for self-powered micro-/nanosystems, Angew. Chem. Int. Ed., 51 (2012) 11700-11721. https://doi.org/10.1002/anie.201201656
- Q. H. Wang, K. K.-Zadeh, A. Kis, J. N. Coleman and M. S. Strano, Electronics and optoelectronics of two-dimensional transition metal dichalcogenides, Nat. Nanotechnol., 7, (2012) 699-712. https://doi.org/10.1038/nnano.2012.193
- J.-P. Colinge, C.-W. Lee, A. Afzalian, N. D. Akhavan, R. Yan, L. Ferain, P. Razavi, B. O'Neil, A. Blake, M. White, A.-M. Kelleher, B. McCarthy and R. Murphy, Nanowire transistors without junctions, Nat. Nanotechnol., 5, (2010) 225-229. https://doi.org/10.1038/nnano.2010.15
- X. Duan, C. Niu, V. Sahi, J. Chen, J. W. Parce, S. Empedocles and J. L. Goldman, High-performance thin-film transistors using semiconductor nanowires and nanoribbons, Nature, 425 (2003) 274-278. https://doi.org/10.1038/nature01996
- J. A. Defranco, B. S. Schmidt, M. Lipson and G. G. Malliaras, Photolithographic patterning of organic electronic materials, Organic Electronics, 7 (2006) 22-28. https://doi.org/10.1016/j.orgel.2005.10.002
- Z. Nie and E. Kumacheva, Patterning surfaces with functional polymers, Nat. Mater., 7 (2008) 277-290. https://doi.org/10.1038/nmat2109
- Chou, S. Y., Krauss, P. R. & Renstrom, P. J. Nanoimprint lithography. J. Vac. Sci. Technol. B, 14 (1996) 4129-4133. https://doi.org/10.1116/1.588605
- I. Maximov, E.-L. Sarwe, M. Beck, K. Deppert, M. Graczyk, M. H. Magnusson and L. Montelius, Fabrication of Si-based nanoimprint stamps with sub-20 nm features, Microelectron. Eng., 61-62 (2002) 449-454.
- M. P. Stoykovich, H. Kang, K. Ch. Daoulas, G. Liu, C.-C. Liu, J. J. de Pablo, M. Muller and P. F. Nealey, Directed self-assembly of block copolyners for nanolithography: fabrication of isolated features and essential integrated circuit geometries, ACS Nano, 1 (2007) 168-175. https://doi.org/10.1021/nn700164p
- D. O. Shin, J. H. Mun, G.-T. Hwang, J. M. Yoon, J. Y. Kim, J. M. Yoon, Y.-B. Yang, Y. Oh, J. Y. Lee, J. Shin, K. J. Lee, S. Park, J. U. Kim and S. O. Kim, Multicomponent nanopatterns by directed block copolymer self-assembly, ACS Nano, 7 (2013) 8899-8907. https://doi.org/10.1021/nn403379k
- J. W. Jeong, S. R. Yang, Y. H. Hur, S. W. Kim, K. M. Baek, S. Yim, H.-I. Jang, J. H. Park, S. Y. Lee, C.-O. Park and Y. S. Jung, High-resolution nanotransfer printing applicable to diverse surfaces via interface-targeted adhesion switching, Nat. Commun., 5 (2014) 1-12.