Fig. 1. Schematic diagram of experiment processes for Pd-Ni-Ag alloy hydrogen separation membrane.
Fig. 2. FE-SEM images, CLSM images and apparent porosity of porous stainless steel supports : (a) HP PSS (b) MIM PSS.
Fig. 3. FE-SEM images and CLSM images of porous stainless steel supports after surface treatment : (a) HP PSS (b) MIM PSS.
Fig. 4. FE-SEM images of sputtered Pd films on the modified MIM PSS at various working pressure and DC power.
Fig. 5. FE-SEM images of sputtered Pd, Ag and Ni films on the modified MIM PSS : (a) Pd, (b) Ag, (c) Ni.
Fig. 6. FE-SEM images, XRD patterns and EDS profiles of Pd-Ni-Ag hydrogen separation membrane : (a) sputter as-deposition, (b) after heat treatment.
Fig. 7. Schematic illustration of Pd/Ag sputter multi-deposition diffusion barrier for preventing intermetallic diffusion in PSS : (a) FE-SEM images of Pd alloy films with dense and homogeneous microstructure, (b) Fe-Ag phase diagram, (c) Fe-Pd phase diagram, (d) cross-sectional EDS composition line scan profiles.
Fig. 8. FE-SEM images and surface composition of Pd alloy as a function of thickness ratio between Pd and Ni films after heat treatment for 1h at 923 K : (a) Pd/Ni layer on Si wafer, (b) Pd/Ni/Pd/Ag/Pd layer on modified MIM PSS.
Fig. 9. Hydrogen perm-selectivity of Pd-Ni-Ag alloy hydrogen separation membranes as a function of surface Ni composition at various pressure difference.
Table 1. Comparison of different Pd-based membranes.
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