Fig. 2. Numerical calculation of light transmission characteristics according to design variables. (a) Spectral measurements when the height of the AZ 1500 nanopillars was changed from 110 nm to 170 nm in the nanostructure of T = 30 nm, P = 350 nm and D = 170 nm, (b) Spectral measurements when the period of the array is changed from 270 nm to 360 nm in the nanostructure of H = 120 nm, T = 30 nm and D = 140 nm, (c) Spectral measurements when the diameter of the nanodisk array and the diameter of the nanohole array are changed from 130 nm to 160 nm in the nanostructure of H = 120 nm, P = 300 nm and T = 35 nm, (d) Spectral measurements when the thickness of the aluminum on the glass substrate and the AZ 1500 nanopillars is changed from 35 nm to 50 nm in the nanostructure of H = 120 nm, P = 350 nm and D = 170 nm.
Fig. 3. Calculated transmittance and electric field intensity on the x-z plane (at the center of the nanoholes): (a) Spectral measurements when the height of the AZ 1500 nanopillars was changed from 100 nm to 170 nm in the nanostructure of T = 30 nm, P = 350 nm and D = 170 nm; (b), (c), (d), (e), (f) and (g) represent the intensity of the electric field at the cross section calculated at the wavelength with the maximum transmittance in the spectrum for the hybrid nanostructure; (b) H = 100 nm, (c) H = 110 nm, (d) H = 120 nm, (e) H = 130 nm, (f) H = 150 nm, (g) H = 170 nm.
Fig. 4. Transmission spectra of the plasmonic red color filter of hybrid structure. Each graph shows the transmittance according to the thickness of the deposited aluminum. The wavelength range of the color representing red is from 620 nm to 750 nm. Each spectrum in one graph corresponds to the same period and diameter of nanodisks and resist nanopillars; (a) P = 370 nm, (b) P = 380 nm, (c) P = 390 nm, (d) P = 400 nm.
Fig. 5. Transmission spectra of the plasmonic green color filter of hybrid structure. Each graph shows the transmittance according to the thickness of the deposited aluminum. The wavelength range of the color representing green is from 495 nm to 570 nm. Each spectrum in one graph corresponds to the same period and diameter of nanodisks and resist nanopillars; (a) P = 270 nm, (b) P = 280 nm, (c) P = 290 nm, (d) P = 300 nm.
Fig. 6. Transmission spectra of the plasmonic blue color filter of hybrid structure. Each graph shows the transmittance according to the thickness of the deposited aluminum. The wavelength range of the color representing Blue is from 450 nm to 495 nm. Each spectrum in one graph corresponds to the same period and diameter of nanodisks and resist nanopillars; (a) P = 180 nm, (b) P = 190 nm, (c) P = 200 nm, (d) P = 210 nm.
Fig. 1. (a) A schematic diagram of a complementary plasmonic color filter consisting of an aluminum nanohole array (NHA) and a nanodisk array (NDA) spatially separated by an AZ 1500 resist nanopillar, (b) Design parameters of the nanostructure; the height (H) of the resist nanopillars, the period (P) of the arrangement, the diameter (D) of the nanodisks and the resist nanopillars, the thickness (T) of the deposited aluminum.
참고문헌
- F. I. Baida and D. Van Labeke, "Light transmission by subwavelength annular aperture arrays in metallic films," Opt. Commun. 209, 17-22 (2002). https://doi.org/10.1016/S0030-4018(02)01690-5
- U. Schroter and D. Heitmann, "Surface-plasmon-enhanced transmission through metallic gratings," Phys. Rev. B: Condens. Matter Mater. Phys. 58, 15419-15421 (1998). https://doi.org/10.1103/PhysRevB.58.15419
- A. Ono, J. I. Kato, and S. Kawata, "Subwavelength optical imaging through a metallic nanorod array," Phys. Rev. Lett. 95, 1-4 (2005).
- F. I. Baida, A. Belkhir, D. Van Labeke, and O. Lamrous, "Subwavelength metallic coaxial waveguides in the optical range: Role of the plasmonic modes," Phys. Rev. B: Condens. Matter Mater. Phys. 74, 1-7 (2006).
- C. Genet and T. W. Ebbesen, "Light in tiny holes," Nature 445, 39-46 (2007). https://doi.org/10.1038/nature05350
- T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, "Extraordinary optical transmission through sub-wavelength hole arrays," Nature 86, 1114-7 (1998).
- M. S. Lee and C. Huh, "Display device," U.S. Patent 753194B2 (2017).
- K. A. Willets and R. P. Van Duyne, "Localized surface plasmon resonance spectroscopy and sensing," Annu. Rev. Phys. Chem. 58, 267-297 (2007). https://doi.org/10.1146/annurev.physchem.58.032806.104607
- S. Yokogawa, S. P. Burgos, and H. A. Atwater, "Plasmonic color filters for CMOS image sensor applications," Nano Lett. 12, 4349-4354 (2012). https://doi.org/10.1021/nl302110z
- A. Mahanipour and A. Mokhtari, "Optimization of plas monic color filters for CMOS image sensors by genetic algorithm," in Proc. 2nd Conference on Swarm Intelligence and Evolutionary Computation (Shahid Bahonar Univ., Iran, Mar. 2017), pp. 12-15.
- R. W. Sabnis, "Color filter technology for liquid crystal displays," Displays 20, 119-129 (1999). https://doi.org/10.1016/S0141-9382(99)00013-X
- T. F. Villesen, C. Uhrenfeldt, B. Johansen, and A. Nylandsted Larsen, "Self-assembled Al nanoparticles on Si and fused silica, and their application for Si solar cells," Nanotechnology 24 (2013).
- H. Ghaemi, T. Thio, D. Grupp, and T. Ebbesen, "Surface plasmons enhance optical transmission through subwavelength holes," Phys. Rev. B: Condens. Matter Mater. Phys. 58, 6779-6782 (1998). https://doi.org/10.1103/PhysRevB.58.6779
- G. Ctistis, E. Papaioannou, P. Patoka, J. Gutek, and P. Fumagalli, "Optical and magnetic properties of hexagonal arrays of subwavelength," Nano Lett. 9, 1-6 (2009). https://doi.org/10.1021/nl801811t
- V. R. Shrestha, S.-S. Lee, E.-S. Kim, and D.-Y. Choi, "Aluminum plasmonics based highly transmissive polarizationindependent subtractive color filters exploiting a nanopatch array," Nano Lett. 14, 6672-6678 (2014). https://doi.org/10.1021/nl503353z
- S. Xiao and N. A. Mortensen, "Surface-plasmon-polaritoninduced suppressed transmission through ultrathin metal disk arrays," Opt. Lett. 36, p. 37 (2011). https://doi.org/10.1364/OL.36.000037
- B. Kang, J. Noh, J. Lee, and M. Yang, "Heterodyne interference lithography for one-step micro/nano multiscale structuring," Appl. Phys. Lett. 103, 1-6 (2013).
- W. L. Barnes, A. Dereux, and T. W. Ebbesen, "Surface plasmon subwavelength optics," Nature 424, 824-830 (2003). https://doi.org/10.1038/nature01937
- J. R. Krenn, A. Dereux, J. C. Weeber, E. Bourillot, Y. Lacroute, J. P. Goudonnet, G. Schider, W. Gotschy, A. Leitner, F. R. Aussenegg, and C. Girard, "Squeezing the optical near-field zone by plasmon coupling of metallic nanoparticles," Phys. Rev. Lett. 82, 2590-2593 (1999). https://doi.org/10.1103/PhysRevLett.82.2590