Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Improvement of Optical and Electrical Properties of ITO/Ag/ITO Thin Films for Transparent Conducting Electrode

투명 전극 ITO/Ag/ITO 박막의 광학적 및 전기적 특성 향상 연구

  • Shin, Yeon Bae (Department of Energy Convergence Engineering, Cheongju University) ;
  • Kang, Dong-Won (Department of Energy Convergence Engineering, Cheongju University) ;
  • Kim, Jeha (Department of Energy Convergence Engineering, Cheongju University)
  • 신연배 (청주대학교 에너지융합학과) ;
  • 강동원 (청주대학교 에너지융합학과) ;
  • 김제하 (청주대학교 에너지융합학과)
  • Received : 2017.09.11
  • Accepted : 2017.10.12
  • Published : 2017.11.01
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Abstract

Herein we studied the electrical and optical properties of indium tin oxide ITO/Ag/ITO multilayer thin films for application in transparent conducting electrodes. The ITO and Ag thin films were deposited onto soda lime glass (SLG) using radiofrequency and DC-sputtering methods, respectively. The as-synthesized ITO/Ag/ITO multilayer thin films were analyzed using 4-point probe, UV-Visible spectroscopy, and Hall measurement. We observed a rapid increase in electron concentration with increasing Ag thickness. However, electron mobility decreased with increasing Ag thickness. Finally, ITO/Ag/ITO multilayer thin films showed a characteristic low sheet resistance of $18{\Omega}/sq$ and high optical transmittance value (80%) with variation of Ag thickness (5~10 nm).

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