Journal of Korean Society of Occupational and Environmental Hygiene (한국산업보건학회지)

Korean Industrial Hygiene Association (한국산업보건학회)
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Development of Quantitative Exposure Index in Semiconductor Fabrication Work

반도체 FAB근무에 대한 정량적 노출지표 개발

  • Shin, Kyu-Sik (Samsung Health Research Institute, Samsung Electronics Co. Ltd.) ;
  • Kim, Taehun (Samsung Health Research Institute, Samsung Electronics Co. Ltd.) ;
  • Jung, Hyun Hee (Samsung Health Research Institute, Samsung Electronics Co. Ltd.) ;
  • Cho, Soo-Hun (Samsung Health Research Institute, Samsung Electronics Co. Ltd.) ;
  • Lee, Kyoungho (Samsung Health Research Institute, Samsung Electronics Co. Ltd.)
  • Received : 2017.09.01
  • Accepted : 2017.09.22
  • Published : 2017.09.30
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Abstract

Objectives: It is difficult to identify exposure factors in the semiconductor industry due to low exposure levels to hazardous substances and because various processes take place in fabrication (FAB). Furthermore, a single worker often experiences a variety of job histories, so it is difficult to classify similar exposure groups (SEG) in the semiconductor industry. Therefore, we intend to develop a new exposure index, the period of working in FAB, that is applicable to the semiconductor industry. Methods: First, in specifying the classification of jobs, we clearly distinguished whether they were FAB workers or non-FAB workers. We checked FAB working hours per week through questionnaires administered to FAB workers. We derived an exposure index called FAB-Year that can represent the period of working in FAB. FAB-Year is an index that can quantitatively indicate the period of working in FAB, and one FAB-Year is defined as working in FAB for 40 hours per week for one year. Results: A total of 8,453 persons were surveyed, and male engineers and female operators occupied 90% of the total. The average total years of service of the subjects was 9.7 years, and the average FAB-Year value was 6.8. This means that the FAB-working ratio occupies 70% of total years of service. The average FAB-Year value for female operators was 8.4, for male facility engineers it was 7.7, and for male process engineers it was 3.5. A FAB-Year standardization value according to personal information (gender, job group, entry year, retirement year) for the survey subjects can be calculated, and standardized estimation values can be applied to workers who are not participating in the survey, such as retirees and workers on a leave of absence (LOA). Conclusions: This study suggests an alternative method for overcoming the limitations on epidemiological study of the semiconductor industry where it is difficult to classify exposure groups by developing a new exposure index called FAB-Year. Since FAB-Year is a quantitative index, we expect that various approaches will be possible in future epidemiological studies.

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