References
- IPCC (2007) Climate Change 2007: Synthesis Report. Contribution of Working Group I, II and III to the Fourth Assessment Report of the Itergovernmental panel Panel on Climate Change [Core Writing Team, Pachauri, R.K and Reisinger, A. (eds.)]. IPCC, Geneva Swizerland, 104.
-
Jeon, S.-C., D.-Y. Kong, D.-S. Pyo, H.-Y. Choi, C.S. Cho, B.-H. Kim, and J.-H. Lee (2012) A Study on Etching of
$Si_3N_4$ Thin Film and the Exhausted Gas Using$C_3F_6$ Gas for LCD Process, Journal of the Korean Vacuum Society, 21, 199-204. https://doi.org/10.5757/JKVS.2012.21.4.199 - John, F.-M., F.-S. William, E.-S. Peter, and D.-B. Kenneth (1992) A Reference Book of Standard Spectra for Identification and Interpretation of XPS Data, Physical Electronics Inc., U.S.A., 261.
- Kim, D.-Y. and D.-W. Park (2008) Decomposition of PFCs by steam plasma at atmospheric pressure, The 6th Asian-European International Conference in Plasma Surface Engineering (AEPSE 2007), 306.
-
Kim, J.-B., J.-Y. Ryu, C.-Y. Choi, S.-H. Jang, and Y.-I. Son (2013) A Study on Destruction Efficiency and Particulate by-products of Sulfur Hexafluoride (
$SF_6$ ) using High Ionization Energy with Oxygen, Water Vapor and Hydrogen, Journal of of Korea Society of Waste Management, 30(8), 870-878. https://doi.org/10.9786/kswm.2013.30.8.870 - Lee, C.-Y. and K.-J. Jeon (2012) A study on catalytic Process in Pilot Plant for Abatement of PFC Emission, Journal of Clean Technology, 18(2), 216-220. https://doi.org/10.7464/ksct.2012.18.2.216
- Lee, D.-G. (2011) Basic Study for Improvement of GHG Emission Statistics, Statistical Research Institute Occasional Task Research Report, 12, 18.
-
Lee, S.-H., N.-K. Park, S.-H. Yoon, W.-C. Chang, and T.-J. Lee (2009) Catalytic decomposition of
$SF_6$ by hydrolysis and oxidation over${\gamma}$ -$Al_2O_3$ , Journal of Clean Technology, 15(4), 273-279. - Nam, S.-E., A. Park, and Y.-I. Park (2013) Separation and Recovery of F-gases, Journal of Membrane, 23(3), 189-203.
- No, I.-J., P.-K. Shin, D.-W. Park, H.-K. Kim, S.-H. Lee, J.-K. Park, D.-H. Kang, and J.S. Kim (2008) Gliding arc plasma application for PFCs gas decomposition, The Transactions of The Korean Institute of Electrical Engineers, 7, 16-18.
- Park, D.-W. and H.-S. Seon (2009) Thermal Plasma Process for Decomposing PFCs, Journal of Environmental and Thermal Engineers, 6, 89-98.
-
Ryu, J.-Y., J.-B. Kim, C.-Y. Choi, and S.-J. Lee (2012) A Study on Destruction Potential of Sulfur Hexafluoride (
$SF_6$ ) Using High Ionization Energy, Journal of Korean Society for Atmospheric Environment, 28(4), 446-453. https://doi.org/10.5572/KOSAE.2012.28.4.446 - Ryu, J.-Y., Y.-I. Son, and S.-H. Jang (2015) A Study on Decomposition and By-products of PFCs using Electron-beam, Journal of Korea Society of Waste Management, 32(1), 1-6. https://doi.org/10.9786/kswm.2015.32.1.1
-
Tasai, W.-T. (2007) The decomposition products of sulfur hexa-fluoride (
$SF_6$ ), Reviews of environmental and health risk analysis, Journal of Fluorine Chemistry, 128, 1345-1352. https://doi.org/10.1016/j.jfluchem.2007.06.008 -
Xu, X., L. Sun, and Y. Wang (2011)
$NF_3$ decomposition over$Al_2O_3$ reagents with water, Journal of Natural Gas Chemistry, 20, 418-422. https://doi.org/10.1016/S1003-9953(10)60201-0 -
Yoo, H.-J., J.-S. Kim, J.-S. Lee, D.-M. Moon, J.-B. Lee, J.-H. Kim, S.-H. Kim, and I.-Y. Lee (2011) Measurement and characterization of atmospheric
$SF_6$ at Korea GAW center in 2007, Journal of Korean Society for Atmospheric Environment, 27(1), 1-15. https://doi.org/10.5572/KOSAE.2011.27.1.001
Cited by
- A Study on Decomposition of Perfluorocompounds (NF3, CF4, SF6) Emitted from Semiconductor Process using Plasma vol.35, pp.3, 2018, https://doi.org/10.9786/kswm.2018.35.3.250