JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
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Advanced On-chip SOL Calibration Method for Unknown Fixture De-embedding

  • Received : 2017.04.19
  • Accepted : 2017.06.20
  • Published : 2017.08.30
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Abstract

SOL (Short, Open and Load) calibration based on iterative error sensitivity is proposed in this paper. With advanced SOL calibration, unknown parasitic parameters at on-chip terminations are accurately estimated up to 20 GHz. Artificial terminations are designed on printed circuit board (PCB) to experiment the proposed method. On-chip SHORT, OPEN and LOAD fabricated inside silicon shows the accuracy of proposed calibration method through the comparison with known fixture S-parameter after de-embedding.

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References

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