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Implementation of an Integrated Pressure-sensor System Adapted to the Optimum Sensitivity

  • Hong, Sung-Hee (Department of Electronic & Electrical Engineering, College of Science and Technology, Hongik University) ;
  • Cho, Chun-Hyung (Department of Electronic & Electrical Engineering, College of Science and Technology, Hongik University)
  • Received : 2016.08.09
  • Accepted : 2016.09.28
  • Published : 2017.04.30

Abstract

An integrated pressure-sensor system was developed using the sensor-conditioning processes, which resulted in the optimum sensitivity of the pressure-sensor through the signal amplification, noise reduction, and level shift. Due to the specified characteristics among the components, such as operation range, the sensor output was generally limited compared to the full scale of the reading when coupled with other parts. Devices fabricated exhibited comparable characteristics with higher pressure sensitivity to that of the pressure sensor without sensor-conditioning process. In this work, the sensor resolution was at least enhanced at least by 25% using the sensor-conditioning processes.

Keywords

References

  1. C. S. Smith, "Piezoresistance Effects in Germanium and Silicon," Physical Review, Vol. 94 (1), 42-49, 1954. https://doi.org/10.1103/PhysRev.94.42
  2. C.-H. Cho, R. C. Jaeger, J. C. Suhling, Y. Kang and A. Mian, "Characterization of the Temperature Dependence of the Pressure Coefficients of n- and p-type Silicon Using Hydrostatic Testing," IEEE Sensors Journal, vol. 8(4), 392-400, 2008. https://doi.org/10.1109/JSEN.2008.917491
  3. J. C. Suhling and R. C. Jaeger, "Silicon piezoresistive stress sensors and their application in electronic packaging", IEEE Sensors Journal, Vol. 1, no. 1, pp. 14-30, 2001. https://doi.org/10.1109/JSEN.2001.923584
  4. A. Mian, J. C. Suhling and R. C. Jaeger, "The van der Pauw stress sensors," IEEE Sensors Journal, Vol. 6, no. 2, pp. 340-356, 2006. https://doi.org/10.1109/JSEN.2006.870140
  5. C.-H Cho and H.-Y Cha, "Stress-Sensors with High-Sensitivity Using the Combined Meandering-Patterns," JSTS, Vol. 15(1), pp. 1-6, 2015. https://doi.org/10.5573/JSTS.2015.15.1.001
  6. C.-H Cho, R. C. Jaeger and J. C. Suhling, "Characterization of the Temperature Dependence of the Piezoresistive Coefficients of Silicon From - $150^{\circ}C$ to $+125^{\circ}C$," IEEE Sensors Journal, Vol.8(8), 1455-, 2008. https://doi.org/10.1109/JSEN.2008.923575
  7. C.-H Cho, Ginkyu Choi and H.-Y Cha, "Strain Effects in van der Pauw (VDP) Stress Sensor Fabricated on (111) Silicon, " IEICE Transactions on Electronics, Vol. E93(5), 640-643, 2010.