Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Development of a Compact Desktop-sized Roll-to-roll Nanoimprinting System for Continuous Nanopatterning

데스크탑 규모의 간결한 롤투롤 나노임프린팅 기반 나노패턴 연속가공 시스템 개발

  • Lee, Jeongsoo (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Lee, Jihun (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Nam, Seungbum (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Cho, Sungil (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Jo, Yongsu (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Go, Minseok (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Lee, Seungjo (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Oh, Dong Kyo (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Kim, Jeong Dae (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Lee, Jae Hyuk (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Ok, Jong G. (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology)
  • 이정수 (서울과학기술대학교 기계.자동차공학과) ;
  • 이지훈 (서울과학기술대학교 기계.자동차공학과) ;
  • 남승범 (서울과학기술대학교 기계.자동차공학과) ;
  • 조성일 (서울과학기술대학교 기계.자동차공학과) ;
  • 조용수 (서울과학기술대학교 기계.자동차공학과) ;
  • 고민석 (서울과학기술대학교 기계.자동차공학과) ;
  • 이승조 (서울과학기술대학교 기계.자동차공학과) ;
  • 오동교 (서울과학기술대학교 기계.자동차공학과) ;
  • 김정대 (서울과학기술대학교 기계.자동차공학과) ;
  • 이재혁 (서울과학기술대학교 기계.자동차공학과) ;
  • 옥종걸 (서울과학기술대학교 기계.자동차공학과)
  • Received : 2016.12.28
  • Accepted : 2017.01.23
  • Published : 2017.02.28
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Abstract

We have developed a compact desktop-sized nanopatterning system driven by the Roll-to-Roll (R2R) nanoimprinting (NIL) principle. The system realizes the continuous and high-speed stamping of various nanoscale patterns on a large-area flexible substrate without resorting to ponderous and complicated instruments. We first lay out the process principle based on continuous NIL on a UV-curable resin layer using a flexible nanopatterned mold. We then create conceptual and specific designs for the system by focusing on two key processes, imprinting and UV curing, which are performed in a continuous R2R fashion. We build a system with essential components and optimized modules for imprinting, UV curing, and R2R conveying to enable simple but effective nanopatterning within the desktop volume. Finally, we demonstrate several nanopatterning results such as nanolines and nanodots, which are obtained by operating the built desktop R2R NIL system on transparent and flexible substrates. Our system may be further utilized in the scalable fabrication of diverse flexible nanopatterns for many functional applications in optics, photonics, sensors, and energy harvesters.

Keywords

References

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