• 한국정밀공학회지
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• 제24권1호
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• pp.47-56
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• 2007

Recently, demands on mechanical micro machining technology have been increased in manufacturing of micro-scale precision shapes and parts. The main purpose of this research is to verify the accuracy and cost efficiency of the mechanical micro machining. In order to measure the precision and feasibility of mechanical micro machining, various micro features were machined. Aluminum molds were machined by a 3-axis micro stage in order to fabricate microchips with $200{\mu}m$ wide channel for capillary electrophoresis, then the same geometry of microchip was made by injection molding. To evaluate the cost efficiency of various micro manufacturing processes, cost estimation for mechanical micro machining was conducted, and actual costs of microchips fabricated by mechanical micro machining, injection molding, and MEMS (Micro electro mechanical system) were compared.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.934-937
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• 2001

It is well-known that the micro fabrication technology of micro parts are the high energy beam or silicon-based micro machining method such as LIGA Process, Laser machining, photolithography and etching technology. But, for fabricating complex 3-D structure it is better to use mechanical machining. This machining method by the mechanical machine tool with nanometer accuracy is getting attention in some field-especially micro optics machining such as grating, holographic lens, micro lens array, fresnel lens, encoder disk etc.. In this study, we survey the micro fabrication by mechanical cutting method and set up the mechanical micro machining system. And we carried out micro cutting experiments for micro parts with v-shape groove.

• 한국기계가공학회지
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• 제15권3호
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• pp.86-92
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• 2016

Mechanical milling, in association with electrical discharge machining (EDM) for hybrid machining, is presented in this paper. An end mill cutting tool, an electrode of the EDM, was used for the system. That means that some parts were cut by the mechanical cutting process and others by the EDM. The possibility of combining both processes was simulated with the cutting simulation software. In addition, the machining reality was verified by measuring the electrical signal from the EDM power supply, which was measured in time and frequency domains. From this initial research, the hybrid machining system proposed in this paper appears to be well suited for difficult to cut material processing.

• Journal of Mechanical Science and Technology
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• 제16권1호
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• pp.46-59
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• 2002

The main purpose of this study is to investigate the variation of tool electrode edge wear and machining performance outputs, namely, the machining rate (workpiece removal rate), tool wear rate and the relative wear, with the varying machining parameters (pulse time, discharge current and dielectric flushing pressure) in EDM die sinking. The edge wear profiles obtained are modeled by using the circular arcs, exponential and poller functions. The variation of radii of the circular arcs with machining parameters is given. It is observed that the exponential function models the edge wear profiles of the electrodes, very accurately. The variation of exponential model parameters with machining parameters is presented.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.1047-1050
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• 2000

As the progress of new industrial products or parts technology, the precise and fine machining technologies are needed more and more. Micro fabrication technology of these products are usally consisted of mechanical machining or MEMS technology. Direct machining by mechanical method is not applicable to mass production. MEMS technology also has several problems such as low mechanical strength, bad surface roughness and difficulty of 3 dimensional machining. In this study, we introduce several micro fabrication technology to make micro molds and dies and our project to develop these machining technology.

• 한국정밀공학회지
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• 제19권7호
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• pp.88-96
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• 2002

High-speed machining is one of the most effective technologies to improve productivity. Because of the high speed and high feed rate, high-speed machining can give great advantages for the machining of dies and molds. This paper describes on the improvement of machining accuracy in high-speed machining. Depth of cut, feed rate and spindle revolution are control factors. The effect of the control factors on machining accuracy is investigated using two-way factorial design.

• 한국정밀공학회지
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• 제19권1호
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• pp.186-195
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• 2002

The mechanism of micro machining of reacted layer on silicon surface were proposed. The depth of reacted layer and the change of mechanical property were measured and analyzed. Depth of hydrated layer which is created on the surface of silicon by potassium hydrate was analyzed with SEM and XPS. The decrease of the micro victors hardness of silicon surface was shown with the increase of the concentration of potassium hydrate and the change of the dynamic friction coefficient by chemical reacted layer was measured due to the readiness of machining. The experiment of groove machining was done with 3-axis machine with constant load. With chemical mechanical micro machining the surface crack and burrs generated by both brittle and ductile micro machining were diminished. And the surface profile and groove depth was shown in accordance with the machining speed and reaction time with SEM and AFM.

• 한국정밀공학회지
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• 제28권3호
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• pp.308-314
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• 2011

In micro electrochemical machining (micro ECM), machining conditions have been determined to maintain a small side gap and to machine a workpiece stably However, machining speed is slow. To improve machining speed while maintaining the form accuracy, the paper investigates machining parameters such as pulse amplitude, duty ratio, pulse on-time, and the electrolyte's temperature and concentration. The experiment in this study shows that the electrolyte's concentration is the key factor that can reduce machining time while maintaining the form accuracy Micro square columns were fabricated to confirm the machining parameters' effects.

• 한국기계가공학회지
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• 제16권6호
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• pp.69-74
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• 2017

In the current machining industry, machining precision is necessary and machining is being carried out. In this ultra-precision machining industry, the fixation of the workpiece is very important and the degree of machining depends on the degree of fixation of the workpiece. In ultra-precision machining, various methods, such as using a vise chuck or the like and using bolt nut coupling, are used for fixing a workpiece to an existing machine tool. In particular, when the precision gripping force of the jig is insufficient during machining of the ultra-precision mold parts, the machining material shakes due to the vibration or friction, and the machining precision is lowered. In the ultra-precision machining of power transmission parts, such as gears, the accuracy of the product is then determined. In addition, the amount of heat generated during machining has a significant effect on the machining accuracy. This is because the vibration value changes according to the grasp force of the jig that fixes the workpiece, and the change in the calorific value due to the change in the main shaft rotation speed of the ultra-precision machining. The increase in the spindle rotation speed during machining decreased the heat generation during machining, and the machining accuracy was also good, and it was confirmed that the machining heat changed according to the fixed state of the workpiece and the machining accuracy also changed. In this study, we try to optimize the driving part of the power vise by using structural analysis, rather than the power vise, using the basic mechanical-type power unit.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.739-742
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• 2000

Micro machining technology has been studied to fabricate small size and high accuracy milli-structure products. To perfectly overcome the conventional mechanical machining methods, the chemical mechanical micro machining(C3M) process was developed. The mechanism of C3M process is that chemical solution etches the material and results in the generation of the chemical reacted layer, and the mechanical micro tool subsequently removes the layer. From the fundamental experiments, the C3M process has been founded to have the advantages of lower machining resistance, tool wear, and higher surface quality and form accuracy than conventional methods. This study focuses on the micro grooving of both the metallic material(SKDII, A1) and hard brittle silicon oxide.